JPS61240144A - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS61240144A
JPS61240144A JP8123685A JP8123685A JPS61240144A JP S61240144 A JPS61240144 A JP S61240144A JP 8123685 A JP8123685 A JP 8123685A JP 8123685 A JP8123685 A JP 8123685A JP S61240144 A JPS61240144 A JP S61240144A
Authority
JP
Japan
Prior art keywords
inspected
section
data
turntable
average value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8123685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513459B2 (enrdf_load_stackoverflow
Inventor
Shigeru Ogawa
茂 小川
Hiroshi Yamaji
山地　廣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP8123685A priority Critical patent/JPS61240144A/ja
Publication of JPS61240144A publication Critical patent/JPS61240144A/ja
Publication of JPH0513459B2 publication Critical patent/JPH0513459B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP8123685A 1985-04-18 1985-04-18 表面検査装置 Granted JPS61240144A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8123685A JPS61240144A (ja) 1985-04-18 1985-04-18 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8123685A JPS61240144A (ja) 1985-04-18 1985-04-18 表面検査装置

Publications (2)

Publication Number Publication Date
JPS61240144A true JPS61240144A (ja) 1986-10-25
JPH0513459B2 JPH0513459B2 (enrdf_load_stackoverflow) 1993-02-22

Family

ID=13740802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8123685A Granted JPS61240144A (ja) 1985-04-18 1985-04-18 表面検査装置

Country Status (1)

Country Link
JP (1) JPS61240144A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032582A (ja) * 2006-07-31 2008-02-14 Hitachi High-Technologies Corp 異物・欠陥検査装置および異物欠陥・検査方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5950345A (ja) * 1982-09-14 1984-03-23 Meidensha Electric Mfg Co Ltd 硝子ビンのきず検出方法
JPS59173735A (ja) * 1983-03-24 1984-10-01 Toshiba Corp 表面欠陥検出器
JPS6056208A (ja) * 1983-09-08 1985-04-01 Toshiba Corp 表面検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5950345A (ja) * 1982-09-14 1984-03-23 Meidensha Electric Mfg Co Ltd 硝子ビンのきず検出方法
JPS59173735A (ja) * 1983-03-24 1984-10-01 Toshiba Corp 表面欠陥検出器
JPS6056208A (ja) * 1983-09-08 1985-04-01 Toshiba Corp 表面検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032582A (ja) * 2006-07-31 2008-02-14 Hitachi High-Technologies Corp 異物・欠陥検査装置および異物欠陥・検査方法

Also Published As

Publication number Publication date
JPH0513459B2 (enrdf_load_stackoverflow) 1993-02-22

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