JPS61239285A - 液晶表示素子の製造方法 - Google Patents
液晶表示素子の製造方法Info
- Publication number
- JPS61239285A JPS61239285A JP60082031A JP8203185A JPS61239285A JP S61239285 A JPS61239285 A JP S61239285A JP 60082031 A JP60082031 A JP 60082031A JP 8203185 A JP8203185 A JP 8203185A JP S61239285 A JPS61239285 A JP S61239285A
- Authority
- JP
- Japan
- Prior art keywords
- upper electrode
- liquid crystal
- crystal display
- display element
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims description 17
- 239000011521 glass Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 238000007743 anodising Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000007688 edging Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60082031A JPS61239285A (ja) | 1985-04-16 | 1985-04-16 | 液晶表示素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60082031A JPS61239285A (ja) | 1985-04-16 | 1985-04-16 | 液晶表示素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61239285A true JPS61239285A (ja) | 1986-10-24 |
| JPH0437413B2 JPH0437413B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-06-19 |
Family
ID=13763159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60082031A Granted JPS61239285A (ja) | 1985-04-16 | 1985-04-16 | 液晶表示素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61239285A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1985
- 1985-04-16 JP JP60082031A patent/JPS61239285A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437413B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-06-19 |
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