JPS6123655B2 - - Google Patents
Info
- Publication number
- JPS6123655B2 JPS6123655B2 JP3331578A JP3331578A JPS6123655B2 JP S6123655 B2 JPS6123655 B2 JP S6123655B2 JP 3331578 A JP3331578 A JP 3331578A JP 3331578 A JP3331578 A JP 3331578A JP S6123655 B2 JPS6123655 B2 JP S6123655B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- container
- wafers
- grooves
- vertical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 137
- 238000003860 storage Methods 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000003825 pressing Methods 0.000 claims description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- -1 polyethylene Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 210000005069 ears Anatomy 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Packaging For Recording Disks (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3331578A JPS54124969A (en) | 1978-03-22 | 1978-03-22 | Semiconductor wafer container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3331578A JPS54124969A (en) | 1978-03-22 | 1978-03-22 | Semiconductor wafer container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54124969A JPS54124969A (en) | 1979-09-28 |
| JPS6123655B2 true JPS6123655B2 (enrdf_load_stackoverflow) | 1986-06-06 |
Family
ID=12383116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3331578A Granted JPS54124969A (en) | 1978-03-22 | 1978-03-22 | Semiconductor wafer container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54124969A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138337U (ja) * | 1982-03-12 | 1983-09-17 | ソニー株式会社 | ウエハ支持治具 |
| JPWO2005057649A1 (ja) * | 2003-12-10 | 2007-07-05 | 冨士ベークライト株式会社 | 半導体ウェーハキャリア容器 |
-
1978
- 1978-03-22 JP JP3331578A patent/JPS54124969A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54124969A (en) | 1979-09-28 |
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