JPS54124969A - Semiconductor wafer container - Google Patents

Semiconductor wafer container

Info

Publication number
JPS54124969A
JPS54124969A JP3331578A JP3331578A JPS54124969A JP S54124969 A JPS54124969 A JP S54124969A JP 3331578 A JP3331578 A JP 3331578A JP 3331578 A JP3331578 A JP 3331578A JP S54124969 A JPS54124969 A JP S54124969A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer container
container
semiconductor
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3331578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6123655B2 (enrdf_load_stackoverflow
Inventor
Tatsuo Niitsuma
Takeshi Moriwaki
Minoru Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daicel Corp
Osaka Titanium Co Ltd
Original Assignee
Daicel Corp
Osaka Titanium Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daicel Corp, Osaka Titanium Co Ltd filed Critical Daicel Corp
Priority to JP3331578A priority Critical patent/JPS54124969A/ja
Publication of JPS54124969A publication Critical patent/JPS54124969A/ja
Publication of JPS6123655B2 publication Critical patent/JPS6123655B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP3331578A 1978-03-22 1978-03-22 Semiconductor wafer container Granted JPS54124969A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3331578A JPS54124969A (en) 1978-03-22 1978-03-22 Semiconductor wafer container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3331578A JPS54124969A (en) 1978-03-22 1978-03-22 Semiconductor wafer container

Publications (2)

Publication Number Publication Date
JPS54124969A true JPS54124969A (en) 1979-09-28
JPS6123655B2 JPS6123655B2 (enrdf_load_stackoverflow) 1986-06-06

Family

ID=12383116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3331578A Granted JPS54124969A (en) 1978-03-22 1978-03-22 Semiconductor wafer container

Country Status (1)

Country Link
JP (1) JPS54124969A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138337U (ja) * 1982-03-12 1983-09-17 ソニー株式会社 ウエハ支持治具
WO2005057649A1 (ja) * 2003-12-10 2005-06-23 Fuji Bakelite Co., Ltd. 半導体ウェーハキャリア容器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138337U (ja) * 1982-03-12 1983-09-17 ソニー株式会社 ウエハ支持治具
WO2005057649A1 (ja) * 2003-12-10 2005-06-23 Fuji Bakelite Co., Ltd. 半導体ウェーハキャリア容器
JPWO2005057649A1 (ja) * 2003-12-10 2007-07-05 冨士ベークライト株式会社 半導体ウェーハキャリア容器

Also Published As

Publication number Publication date
JPS6123655B2 (enrdf_load_stackoverflow) 1986-06-06

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