JPS61235575A - ドライエツチング装置 - Google Patents

ドライエツチング装置

Info

Publication number
JPS61235575A
JPS61235575A JP7438085A JP7438085A JPS61235575A JP S61235575 A JPS61235575 A JP S61235575A JP 7438085 A JP7438085 A JP 7438085A JP 7438085 A JP7438085 A JP 7438085A JP S61235575 A JPS61235575 A JP S61235575A
Authority
JP
Japan
Prior art keywords
etching gas
etching
vacuum
vessel
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7438085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS64470B2 (ko
Inventor
Tsunemasa Tokura
戸倉　常正
Masashi Tezuka
雅士 手塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP7438085A priority Critical patent/JPS61235575A/ja
Publication of JPS61235575A publication Critical patent/JPS61235575A/ja
Publication of JPS64470B2 publication Critical patent/JPS64470B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP7438085A 1985-04-10 1985-04-10 ドライエツチング装置 Granted JPS61235575A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7438085A JPS61235575A (ja) 1985-04-10 1985-04-10 ドライエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7438085A JPS61235575A (ja) 1985-04-10 1985-04-10 ドライエツチング装置

Publications (2)

Publication Number Publication Date
JPS61235575A true JPS61235575A (ja) 1986-10-20
JPS64470B2 JPS64470B2 (ko) 1989-01-06

Family

ID=13545500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7438085A Granted JPS61235575A (ja) 1985-04-10 1985-04-10 ドライエツチング装置

Country Status (1)

Country Link
JP (1) JPS61235575A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897171A (en) * 1985-11-26 1990-01-30 Tadahiro Ohmi Wafer susceptor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897171A (en) * 1985-11-26 1990-01-30 Tadahiro Ohmi Wafer susceptor

Also Published As

Publication number Publication date
JPS64470B2 (ko) 1989-01-06

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees