JPS61234053A - 集積半導体装置 - Google Patents

集積半導体装置

Info

Publication number
JPS61234053A
JPS61234053A JP9453686A JP9453686A JPS61234053A JP S61234053 A JPS61234053 A JP S61234053A JP 9453686 A JP9453686 A JP 9453686A JP 9453686 A JP9453686 A JP 9453686A JP S61234053 A JPS61234053 A JP S61234053A
Authority
JP
Japan
Prior art keywords
island
layer
crystal silicon
single crystal
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9453686A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228582B2 (enExample
Inventor
Shigeru Kawamata
川又　繁
Kiyoshi Tsukuda
佃　清
Yoshikazu Hosokawa
細川　義和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9453686A priority Critical patent/JPS61234053A/ja
Publication of JPS61234053A publication Critical patent/JPS61234053A/ja
Publication of JPS6228582B2 publication Critical patent/JPS6228582B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9453686A 1986-04-25 1986-04-25 集積半導体装置 Granted JPS61234053A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9453686A JPS61234053A (ja) 1986-04-25 1986-04-25 集積半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9453686A JPS61234053A (ja) 1986-04-25 1986-04-25 集積半導体装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP13002679A Division JPS5655061A (en) 1979-10-11 1979-10-11 Integrated semiconductor device

Publications (2)

Publication Number Publication Date
JPS61234053A true JPS61234053A (ja) 1986-10-18
JPS6228582B2 JPS6228582B2 (enExample) 1987-06-22

Family

ID=14113046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9453686A Granted JPS61234053A (ja) 1986-04-25 1986-04-25 集積半導体装置

Country Status (1)

Country Link
JP (1) JPS61234053A (enExample)

Also Published As

Publication number Publication date
JPS6228582B2 (enExample) 1987-06-22

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