JPS61233949A - 試料像の倍率表示方法および装置 - Google Patents

試料像の倍率表示方法および装置

Info

Publication number
JPS61233949A
JPS61233949A JP60074176A JP7417685A JPS61233949A JP S61233949 A JPS61233949 A JP S61233949A JP 60074176 A JP60074176 A JP 60074176A JP 7417685 A JP7417685 A JP 7417685A JP S61233949 A JPS61233949 A JP S61233949A
Authority
JP
Japan
Prior art keywords
scale
length
magnification
reference line
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60074176A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0442776B2 (enrdf_load_stackoverflow
Inventor
Takashi Kimura
隆志 木村
Tetsuo Koseki
哲郎 小関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP60074176A priority Critical patent/JPS61233949A/ja
Publication of JPS61233949A publication Critical patent/JPS61233949A/ja
Publication of JPH0442776B2 publication Critical patent/JPH0442776B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP60074176A 1985-04-10 1985-04-10 試料像の倍率表示方法および装置 Granted JPS61233949A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60074176A JPS61233949A (ja) 1985-04-10 1985-04-10 試料像の倍率表示方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60074176A JPS61233949A (ja) 1985-04-10 1985-04-10 試料像の倍率表示方法および装置

Publications (2)

Publication Number Publication Date
JPS61233949A true JPS61233949A (ja) 1986-10-18
JPH0442776B2 JPH0442776B2 (enrdf_load_stackoverflow) 1992-07-14

Family

ID=13539589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60074176A Granted JPS61233949A (ja) 1985-04-10 1985-04-10 試料像の倍率表示方法および装置

Country Status (1)

Country Link
JP (1) JPS61233949A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006162452A (ja) * 2004-12-08 2006-06-22 Hitachi Ltd 薄膜評価方法及びその装置
JP2007109560A (ja) * 2005-10-14 2007-04-26 Hitachi High-Technologies Corp 集束イオンビーム装置及び集束イオンビーム装置の加工位置設定方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535961A (en) * 1976-07-07 1978-01-19 Hitachi Ltd Sampled image display unit
JPS55128241A (en) * 1979-03-28 1980-10-03 Hitachi Ltd Sample image display device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535961A (en) * 1976-07-07 1978-01-19 Hitachi Ltd Sampled image display unit
JPS55128241A (en) * 1979-03-28 1980-10-03 Hitachi Ltd Sample image display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006162452A (ja) * 2004-12-08 2006-06-22 Hitachi Ltd 薄膜評価方法及びその装置
JP2007109560A (ja) * 2005-10-14 2007-04-26 Hitachi High-Technologies Corp 集束イオンビーム装置及び集束イオンビーム装置の加工位置設定方法

Also Published As

Publication number Publication date
JPH0442776B2 (enrdf_load_stackoverflow) 1992-07-14

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