JPS6123010Y2 - - Google Patents

Info

Publication number

JPS6123010Y2

JPS6123010Y2 JP1511282U JP1511282U JPS6123010Y2 JP S6123010 Y2 JPS6123010 Y2 JP S6123010Y2 JP 1511282 U JP1511282 U JP 1511282U JP 1511282 U JP1511282 U JP 1511282U JP S6123010 Y2 JPS6123010 Y2 JP S6123010Y2

Authority

JP

Japan

Prior art keywords

substrate

liquid phase

support base

epitaxial growth

jig

Prior art date

1982-02-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
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• 239000000758 substrate Substances 0.000 claims description 39
• 239000007791 liquid phase Substances 0.000 claims description 22
• 239000013078 crystal Substances 0.000 claims description 13
• 239000007788 liquid Substances 0.000 claims description 8
• MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 5
• 150000001875 compounds Chemical class 0.000 description 5
• 238000006243 chemical reaction Methods 0.000 description 4
• 239000000463 material Substances 0.000 description 4
• 238000000034 method Methods 0.000 description 4
• 239000004065 semiconductor Substances 0.000 description 4
• 238000010438 heat treatment Methods 0.000 description 3
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
• 230000015572 biosynthetic process Effects 0.000 description 2
• 229910052793 cadmium Inorganic materials 0.000 description 2
• 229910052799 carbon Inorganic materials 0.000 description 2
• 229910052753 mercury Inorganic materials 0.000 description 2
• 238000007711 solidification Methods 0.000 description 2
• 230000008023 solidification Effects 0.000 description 2
• 229910052714 tellurium Inorganic materials 0.000 description 2
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
• BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
• 238000005336 cracking Methods 0.000 description 1
• 238000001514 detection method Methods 0.000 description 1
• 239000007789 gas Substances 0.000 description 1
• 229910052739 hydrogen Inorganic materials 0.000 description 1
• 239000001257 hydrogen Substances 0.000 description 1
• QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• OCGWQDWYSQAFTO-UHFFFAOYSA-N tellanylidenelead Chemical compound [Pb]=[Te] OCGWQDWYSQAFTO-UHFFFAOYSA-N 0.000 description 1
• PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1