JPS6122776B2 - - Google Patents

Info

Publication number
JPS6122776B2
JPS6122776B2 JP53052368A JP5236878A JPS6122776B2 JP S6122776 B2 JPS6122776 B2 JP S6122776B2 JP 53052368 A JP53052368 A JP 53052368A JP 5236878 A JP5236878 A JP 5236878A JP S6122776 B2 JPS6122776 B2 JP S6122776B2
Authority
JP
Japan
Prior art keywords
gas
sensitive
sensitivity
present
catalyst layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53052368A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54145197A (en
Inventor
Masaki Katsura
Takashi Takahashi
Tadao Kaneda
Hideaki Hiraki
Masayuki Shiratori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP5236878A priority Critical patent/JPS54145197A/ja
Publication of JPS54145197A publication Critical patent/JPS54145197A/ja
Publication of JPS6122776B2 publication Critical patent/JPS6122776B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP5236878A 1978-05-02 1978-05-02 Gas sensitive element Granted JPS54145197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5236878A JPS54145197A (en) 1978-05-02 1978-05-02 Gas sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5236878A JPS54145197A (en) 1978-05-02 1978-05-02 Gas sensitive element

Publications (2)

Publication Number Publication Date
JPS54145197A JPS54145197A (en) 1979-11-13
JPS6122776B2 true JPS6122776B2 (cs) 1986-06-03

Family

ID=12912860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5236878A Granted JPS54145197A (en) 1978-05-02 1978-05-02 Gas sensitive element

Country Status (1)

Country Link
JP (1) JPS54145197A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60170759A (ja) * 1984-02-16 1985-09-04 Matsushita Electric Ind Co Ltd 可燃性ガス検知素子
KR100780076B1 (ko) * 2001-11-08 2007-11-29 허증수 반도체형 가스센서용 감지막 형성방법 및 반도체형가스센서 어레이

Also Published As

Publication number Publication date
JPS54145197A (en) 1979-11-13

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