JPS61220455A - 半導体記憶装置の製造方法 - Google Patents

半導体記憶装置の製造方法

Info

Publication number
JPS61220455A
JPS61220455A JP60062315A JP6231585A JPS61220455A JP S61220455 A JPS61220455 A JP S61220455A JP 60062315 A JP60062315 A JP 60062315A JP 6231585 A JP6231585 A JP 6231585A JP S61220455 A JPS61220455 A JP S61220455A
Authority
JP
Japan
Prior art keywords
film
insulating film
semiconductor memory
oxide film
memory device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60062315A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353785B2 (cs
Inventor
Atsuhiko Menju
毛受　篤彦
Soichi Sugiura
杉浦　聡一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP60062315A priority Critical patent/JPS61220455A/ja
Publication of JPS61220455A publication Critical patent/JPS61220455A/ja
Publication of JPH0353785B2 publication Critical patent/JPH0353785B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP60062315A 1985-03-27 1985-03-27 半導体記憶装置の製造方法 Granted JPS61220455A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60062315A JPS61220455A (ja) 1985-03-27 1985-03-27 半導体記憶装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60062315A JPS61220455A (ja) 1985-03-27 1985-03-27 半導体記憶装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61220455A true JPS61220455A (ja) 1986-09-30
JPH0353785B2 JPH0353785B2 (cs) 1991-08-16

Family

ID=13196577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60062315A Granted JPS61220455A (ja) 1985-03-27 1985-03-27 半導体記憶装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61220455A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4826779A (en) * 1986-10-24 1989-05-02 Teledyne Industries, Inc. Integrated capacitor and method of fabricating same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7372447B1 (en) 1996-10-31 2008-05-13 Kopin Corporation Microdisplay for portable communication systems
US7321354B1 (en) 1996-10-31 2008-01-22 Kopin Corporation Microdisplay for portable communication systems

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4826779A (en) * 1986-10-24 1989-05-02 Teledyne Industries, Inc. Integrated capacitor and method of fabricating same

Also Published As

Publication number Publication date
JPH0353785B2 (cs) 1991-08-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees