JPS61220259A - 電子ビ−ム装置 - Google Patents

電子ビ−ム装置

Info

Publication number
JPS61220259A
JPS61220259A JP60061238A JP6123885A JPS61220259A JP S61220259 A JPS61220259 A JP S61220259A JP 60061238 A JP60061238 A JP 60061238A JP 6123885 A JP6123885 A JP 6123885A JP S61220259 A JPS61220259 A JP S61220259A
Authority
JP
Japan
Prior art keywords
electron beam
deflection
deflector
electrode
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60061238A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0586616B2 (enrdf_load_stackoverflow
Inventor
Akio Ito
昭夫 伊藤
Kazuo Okubo
大窪　和生
Yoshiaki Goto
後藤　善朗
Toshihiro Ishizuka
俊弘 石塚
Kazuyuki Ozaki
一幸 尾崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60061238A priority Critical patent/JPS61220259A/ja
Publication of JPS61220259A publication Critical patent/JPS61220259A/ja
Publication of JPH0586616B2 publication Critical patent/JPH0586616B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60061238A 1985-03-26 1985-03-26 電子ビ−ム装置 Granted JPS61220259A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60061238A JPS61220259A (ja) 1985-03-26 1985-03-26 電子ビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60061238A JPS61220259A (ja) 1985-03-26 1985-03-26 電子ビ−ム装置

Publications (2)

Publication Number Publication Date
JPS61220259A true JPS61220259A (ja) 1986-09-30
JPH0586616B2 JPH0586616B2 (enrdf_load_stackoverflow) 1993-12-13

Family

ID=13165447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60061238A Granted JPS61220259A (ja) 1985-03-26 1985-03-26 電子ビ−ム装置

Country Status (1)

Country Link
JP (1) JPS61220259A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999046798A1 (fr) * 1998-03-09 1999-09-16 Hitachi, Ltd. Microscope electronique a balayage
EP1244132A1 (en) * 1993-12-28 2002-09-25 Hitachi, Ltd. Scanning electron microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1244132A1 (en) * 1993-12-28 2002-09-25 Hitachi, Ltd. Scanning electron microscope
WO1999046798A1 (fr) * 1998-03-09 1999-09-16 Hitachi, Ltd. Microscope electronique a balayage
US6667476B2 (en) 1998-03-09 2003-12-23 Hitachi, Ltd. Scanning electron microscope
US6872944B2 (en) 1998-03-09 2005-03-29 Hitachi, Ltd. Scanning electron microscope
JP4302316B2 (ja) * 1998-03-09 2009-07-22 株式会社日立製作所 走査形電子顕微鏡

Also Published As

Publication number Publication date
JPH0586616B2 (enrdf_load_stackoverflow) 1993-12-13

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