JPS61220132A - Production of vertical magnetic recording medium - Google Patents

Abstract

PURPOSE:To simplify the formation of an Fe-Ni film by reverse-sputtering a nonmagnetic Ni-P film and converting the surface of the Ni-P film into a soft magnetic material. CONSTITUTION:The surface of an aluminum substrate 1 is previously washed and nonmagnetic Ni-P is thickly electroless-plated thereon. The surface of the nonmagnetic Ni-P film 2 is mechanically planed and flattened to reduce the surface roughness. Then the substrate 1 having the film 2 is reversely sputtered by a sputtering device. Subsequently, a Co-Cr film 3 is made again by sputtering. Consequently, the formation of a soft magnetic film of another composition such as an Fe-Ni film can be dispensed with and the process is simplified.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to a recording medium for perpendicular magnetic recording.

[Conventional technology]

Traditionally, perpendicular magnetic recording media have
f! Due to the same magnetic and magnetic properties as above, there have been devices that have a structure called a so-called 2N film perpendicular magnetic recording medium, which has not only a straight A1C film but also a soft magnetic film such as Fe-Ni. FIG. 2 is a sectional view of one example. Aluminum substrate (1
), Ni-P is applied on top for the same mechanical properties 14 such as surface flatness.
A plating film (2) is provided, and a F6-Ni film (4) as a soft magnetic film is provided on the Ni-P@(2), and a magnetic +
8: Co-Cr g (3) was provided as a film body.

[Intermediate point that the invention attempts to solve]

Conventional perpendicular magnetic recording media, so-called magnetic disks, have the above-described structure, which has caused problems such as complicated manufacturing processes.

However, when Ni-P is heat treated, it becomes soft &! If the Ni--P film (2) could be used as a soft magnetic film, the Fe--Ni film would be unnecessary and the process would be omitted.

On the other hand, the thickness required for the soft magnetic film is thin (for example, about 0.5 to 1 μm), and the Ni-P film is later made of Co-
If only the vicinity of the surface ml of the surface where Cr@ is to be provided is soft magnetically 16, the magnetic field is 10 ga.

This invention was made in view of the above points, and the surface 1 of the non-magnetic Ni-P film accommodated on the substrate can be made without newly providing a soft magnetic layer as the underlayer of the magnetic film for perpendicular magnetic recording.
It is an object of the present invention to provide a method for manufacturing a perpendicular magneto-thermal recording medium that has the same effect as that obtained by thinning a soft magnetic film by making the magnetic layer near the magnetic field soft magnetic.

[Means for solving the problem]

The manufacturing method of the magnetic disk according to this invention is such that the substrate is non-magnetic! l: Step of providing a Ni-P film, reverse sputtering of this Ni-P film to make Ni-P1j41J soft magnetic, and applying C for perpendicular magnetic recording to this soft aq Ni-P film.
A step of providing a magnetic film containing o-Cr as a main component is performed.

[Effect]

In this invention, reverse sputtering is performed on the non-magnetic Ni-P film to make the surface ml of the Ni-P film soft magnetic, so it has the same effect as providing a Fe-Ni film as a soft magnetic film. In addition, the Fe--Ni film forming process is simplified.

〔Example〕

FIG. 1 is a cross-sectional view showing a magnetic recording medium obtained according to an embodiment of the present invention. Ni-P
Membrane, <8J hN f -pHI! ,<2) yoic
e Gt f! Co-Cr film for FB 4a"A tie kl, Co-Cr film for Ni-P film (2)
The membrane side surface is made soft magnetic.

Next, the manufacturing method will be explained. Aluminum substrate (1)
The surface of the is pre-cleaned using a well-known method, and then a non-magnetic Ni-P plating with a thickness of several tens of microns (for example, several tens of microns) is applied to the surface. Processing produces a flat and flat finish with low surface roughness. After that, 5×1 t)-' To
The atmosphere is evacuated to below r r, and the substrate (1) with the nonmagnetic Ni--P film (2) is subjected to reverse sputtering. For example, the board *ta
dg g 1IA40wm, Ar gas pressure 80mT
Orr, by sputtering the L substrate side for about 10 minutes with an input power of 400 W, a soft magnetic narrow film with a coercive force of about 100 e and no surface circularity can be obtained on the surface of the non-magnetic Ni--P film. After that, the exhaust is again evacuated to 5X10-7 Torr or less, and a Co-Cr film (for example, substrate electrode surface distance IJ) is formed by sputtering.
80B, Ar gas pressure 5mTorrs input voltage 20
The thickness is about 0.2μ at 0W.

In the above embodiments, the substrate is made of aluminum, but it is also possible to use materials other than aluminum, and the present invention may be applied to both sides of the substrate Cζ.

Further, a small amount of rhodidium-tanta μ, for example, may be added to the Co--Cr film, which is a magnetic film.

〔Effect of the invention〕

As explained above, this invention has non-magnetic Ni-P on the substrate.
A process of forming a film, a process of performing reverse sputtering of this Ni-P film to make the surface of the Ni-P film soft magnetic, and a process of making the surface of the Ni-P film soft magnetic. Since the process of providing an a-casting film containing Cr as the main component was carried out, Ni-P was used to obtain special mechanical improvements such as planar flatness.
The film can have soft magnetic properties, and there is no need to provide a soft magnetic injection film of a different composition such as an Fe-Ni film, making it possible to obtain a manufacturing method for perpendicular magnetic recording media that can simplify the process. effective.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a perpendicular magnetic recording medium obtained by an embodiment of the present invention, and FIG. 2 is a cross-sectional view of a perpendicular magnetic recording medium obtained by a conventional manufacturing method.
& is a side view of the recording medium UJWr. (1)...Aluminum substrate, (2)...Ni-P film,
(3) River Co-Cr film, (4)...Fe-Ni film Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

[Claims] A process of providing a non-magnetic Ni-P film on a substrate, a process of reverse sputtering this Ni-P film to make the surface of the Ni-P film soft magnetic, and a process of forming a soft magnetic Ni-P film for perpendicular magnetic recording. A method for manufacturing a perpendicular magnetic recording medium, which includes a step of providing a magnetic film containing CO-Cr as a main component.