JPS60231911A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS60231911A
JPS60231911A JP8675784A JP8675784A JPS60231911A JP S60231911 A JPS60231911 A JP S60231911A JP 8675784 A JP8675784 A JP 8675784A JP 8675784 A JP8675784 A JP 8675784A JP S60231911 A JPS60231911 A JP S60231911A
Authority
JP
Japan
Prior art keywords
magnetic
recording medium
magnetic recording
metal
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8675784A
Other languages
Japanese (ja)
Inventor
Kazuhiko Nakamura
一彦 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP8675784A priority Critical patent/JPS60231911A/en
Publication of JPS60231911A publication Critical patent/JPS60231911A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a magnetic recording medium having strong coercive force Hc and improved magnetic characteristics by using a Co-Re alloy as the material of a magnetic layer so as to form a crystal structure made of only an hcp phase having high anisotropy. CONSTITUTION:A nonmagnetic layer 2 of a low m.p. metal and the magnetic layer 3 of a Co1-xRex alloy (0.1<=x<=0.35) are successively formed on a nonmagnetic substrate 1 by vapor deposition, sputtering or other method to obtain the magnetic recording medium. The film of a polymer such as polyethylene terephthalate, polyamide, polyamidoimide or polyimide or a plate of glass, ceramics, sapphire or a surface oxidized metal may be used as the substrate 1. The nonmagnetic and low m.p. metal 2 is a metal having <=650 deg.C m.p. such as Bi, Ga, Sb, In, Sn, Tl, B, Al or an alloy thereof such as Ga-Al or Bi-In.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は磁気記録媒体に関する。[Detailed description of the invention] Industrial applications The present invention relates to magnetic recording media.

背景技術とその問題点 近年、磁気記録の高密度化の目的で磁性薄膜型の磁気記
録媒体、即ち非磁性基体上に真空蒸着、スパッタリング
等の方法により数百人〜略1μの厚さのCo等の強磁性
金属を形成させた磁気記録媒体についての研究が盛んで
ある。このような磁性薄膜型の磁気記録媒体として、斜
め蒸着法によることなく、はぼ垂直蒸着によっても高い
抗磁力を示し且つ高い角形比を有する磁気的に等方性の
磁気記録媒体が提案されている。この磁気記録媒体は非
磁性基体上に下地層としてのBi等の非磁性金属を被着
した後、引き続きこれの上にCo等の金属磁性層を形成
するものである。
BACKGROUND TECHNOLOGY AND PROBLEMS In recent years, for the purpose of increasing the density of magnetic recording, magnetic thin film type magnetic recording media, that is, Co with a thickness of several hundred to approximately 1 μm, have been deposited on a non-magnetic substrate by vacuum evaporation, sputtering, etc. There is active research into magnetic recording media made of ferromagnetic metals such as ferromagnetic metals. As such a magnetic thin film type magnetic recording medium, a magnetically isotropic magnetic recording medium has been proposed that exhibits high coercive force and has a high squareness ratio not only by oblique evaporation but also by almost perpendicular evaporation. There is. In this magnetic recording medium, a nonmagnetic metal such as Bi is deposited as an underlayer on a nonmagnetic substrate, and then a metal magnetic layer such as Co is formed thereon.

しかるに、このようなCoを主体とした強磁性金属薄膜
に於ては、X線回折の結果ではCOがhap相(六方最
密充填構造)とfcc相(面心立方構造)に分かれてお
り、このことが磁気特性を低下させる原因となっている
。因みに、結晶磁気異方性についてみると、hcp相が
1軸異方性、fcc相が3軸異方性であり、その異方性
定数はhcp相が大きく、fcc相が小さい。そして、
磁気記録媒体の性質として重要な抗磁力Hcは異方性定
数の大きさに比例し、従ってfcc相の存在は抗磁力H
cの低下につながる。
However, in such a ferromagnetic metal thin film mainly composed of Co, X-ray diffraction results show that CO is divided into a hap phase (hexagonal close-packed structure) and an fcc phase (face-centered cubic structure). This causes deterioration of magnetic properties. Incidentally, regarding magnetocrystalline anisotropy, the hcp phase has uniaxial anisotropy, and the fcc phase has triaxial anisotropy, and the anisotropy constant is large for the hcp phase and small for the fcc phase. and,
The coercive force Hc, which is important as a property of magnetic recording media, is proportional to the magnitude of the anisotropy constant, so the presence of the fcc phase increases the coercive force H
This leads to a decrease in c.

発明の目的 本発明は、上述の点に鑑み、高い磁気特性を有する磁気
記録媒体を提供するものである。
OBJECTS OF THE INVENTION In view of the above points, the present invention provides a magnetic recording medium having high magnetic properties.

発明の概要 本発明は、非磁性基体上に非磁性の低融点金属とCoR
e合金磁性層とが連続して被着形成して成る磁気記録媒
体である。
Summary of the Invention The present invention provides a non-magnetic low melting point metal and a CoR on a non-magnetic substrate.
This is a magnetic recording medium in which an e-alloy magnetic layer is continuously deposited.

この発明の磁気記録媒体では、COの相がすべてhcp
相となり、磁気特性、特に抗磁力ICが向上する。
In the magnetic recording medium of this invention, all CO phases are hcp
phase, and the magnetic properties, especially the coercive force IC, are improved.

実施例 本発明においては、第1図に示すように、非磁性基体(
11上に蒸着、スパッタリング等によって、非磁性の低
融点金属(2)とCox−xRex (0,1≦X≦0
.35)合金磁性層(3)とを連続して被着形成して磁
気記録媒体を構成する。
Example In the present invention, as shown in FIG.
Non-magnetic low melting point metal (2) and Cox-xRex (0,1≦X≦0
.. 35) A magnetic recording medium is constructed by successively depositing the alloy magnetic layer (3).

非磁性基体(1)としては、例えばポリエチレンテレフ
タレート、ポリアミド、ポリアミドイミド、ポリイミド
等の高分子フィルム、或はガラス、セラミック、サファ
イヤ若しくは表面を酸化した金属板等を用いることがで
きる。
As the nonmagnetic substrate (1), for example, a polymer film such as polyethylene terephthalate, polyamide, polyamideimide, polyimide, glass, ceramic, sapphire, or a metal plate with an oxidized surface can be used.

非磁性の低融点金属(2)としては、650℃以下の金
属で例えばBit Ga、 sb、 In、 Sn+ 
Tj! + Bt^β又はこれを含む合金例えばGa 
−An! 、 Bi −In等を用いることができる。
The non-magnetic low melting point metal (2) is a metal with a temperature of 650°C or less, such as Bit Ga, sb, In, Sn+
Tj! + Bt^β or an alloy containing it, such as Ga
-An! , Bi-In, etc. can be used.

第2図は非磁性の低融点金属(2)及びCoRe合金磁
性層(3)を形成する蒸着装置の路線的構成図である。
FIG. 2 is a schematic diagram of a vapor deposition apparatus for forming a nonmagnetic low melting point metal (2) and a CoRe alloy magnetic layer (3).

この装置α旧よ真空蒸着槽内に非磁性基体(1)が供給
リール(11)及び巻取リール(12)間に走行するよ
うになされる。この非磁性基体(1)に対向して低融点
金属の蒸着源例えばBl蒸着源(13)が配され、また
CoRe合金層の蒸着源即ちCo蒸着源(14)とRe
蒸着源(15)が配される。(16)は遮蔽板である。
In this apparatus α, a non-magnetic substrate (1) is run in a vacuum deposition tank between a supply reel (11) and a take-up reel (12). A low melting point metal evaporation source (13), for example, a Bl evaporation source (13), is arranged opposite to this non-magnetic substrate (1), and a CoRe alloy layer evaporation source (14), a Co evaporation source (14), and a Re
A vapor deposition source (15) is provided. (16) is a shielding plate.

このような構成において、非磁性基体(11を赤外線ラ
ンプによって加熱しながら供給リール(11)から巻取
リール(12)に向って走行させ、その走行途上におい
て先ずBi蒸着源(13)によって非磁性基体(11上
にBiを蒸着し、引き続いてこの上にCo蒸着源(14
)及びRe蒸着源(15)からのCo及びReの蒸発で
CoRe合金磁性層を被着形成するようになす。
In such a configuration, a non-magnetic substrate (11) is heated by an infrared lamp while running from a supply reel (11) toward a take-up reel (12), and while it is running, the non-magnetic substrate (11) is first heated by a Bi vapor deposition source (13). Bi is deposited on the substrate (11), and then a Co deposition source (14) is deposited on this.
) and evaporation of Co and Re from the Re evaporation source (15) to deposit a CoRe alloy magnetic layer.

GoとReの組成比は夫々の蒸着源(14)及び(15
)からの蒸発速度で制御できる。
The composition ratio of Go and Re is determined by the respective vapor deposition sources (14) and (15).
) can be controlled by the evaporation rate from

実施例1 上記蒸着装置側を使用し、真空下で高分子フィルムより
なる非磁性基体(1)を走行させ、このときの基体温度
を200℃となして蒸着源(13)よりBi(2)を2
00人の厚さに蒸着し、続いてこの上に蒸着源(14)
及び(15)によってCO[12Rets合金1i(C
Example 1 Using the above vapor deposition apparatus side, a non-magnetic substrate (1) made of a polymer film was run under vacuum, and the substrate temperature at this time was 200°C, and Bi (2) was deposited from the vapor deposition source (13). 2
Deposited to a thickness of 0.00 mm, followed by a deposition source (14) on top of this.
and (15) for CO[12Rets alloy 1i(C
.

が82原子%、Reが18原子%)(3)を蒸着し、磁
気記録媒体を作製した。
(82 atomic % of Re, 18 atomic % of Re) (3) was deposited to produce a magnetic recording medium.

比較例1 厚さ200人のBi(21上にCO磁性層を250人蒸
着した以外は、実施例1と同様にして磁気記録媒体を作
製した。
Comparative Example 1 A magnetic recording medium was produced in the same manner as in Example 1, except that a 250-layer CO magnetic layer was deposited on a 200-layer thick Bi layer.

上記各側の磁気記録媒体の抗磁力Hcを下記表に示す。The coercive force Hc of the magnetic recording medium on each side is shown in the table below.

表 この表から明らかなようにBi下地層上にCoRe合金
磁性層を被着した磁気記録媒体ではその抗磁力Heが向
上するのが認められる。この理由はCOの相がReと合
金化することにより結晶磁気異方性の大きいhcp相の
みになったためと考えられる。
Table As is clear from this table, it is recognized that the coercive force He of the magnetic recording medium in which the CoRe alloy magnetic layer is deposited on the Bi underlayer is improved. The reason for this is considered to be that the CO phase becomes only the hcp phase with large crystal magnetic anisotropy due to alloying with Re.

また本実施例ではほぼ垂直蒸着で’EoRe合金磁性層
が形成されるので磁気的に面内等方法の磁気記録媒体が
得られる。
Furthermore, in this embodiment, since the 'EoRe alloy magnetic layer is formed by substantially perpendicular deposition, a magnetic recording medium having an in-plane magnetic recording medium can be obtained.

発明の効果 本発明によれば、磁性層としてCoRe合金を用いるこ
とにより、結晶構造が異方性の大きいhcp相のみとな
り、高い抗磁力Hcが得られ、磁気特性の改善された磁
気記録媒体が得られる。また、はぼ垂直方向の蒸着、ス
パッタリング等の方法で非磁性の低融点金属及びCoR
e合金磁性層を形成するので、磁気的に面内等方性の磁
気記録媒体が得られる。従って、高密度記録の磁気テー
プ、磁気ディスク等に適用して好適ならしめるものであ
る。
Effects of the Invention According to the present invention, by using a CoRe alloy as the magnetic layer, the crystal structure becomes only the hcp phase with large anisotropy, a high coercive force Hc is obtained, and a magnetic recording medium with improved magnetic properties is obtained. can get. In addition, non-magnetic low melting point metals and CoR can be produced using methods such as vertical evaporation and sputtering.
Since the e-alloy magnetic layer is formed, a magnetic recording medium that is magnetically isotropic in plane can be obtained. Therefore, it is suitable for application to high-density recording magnetic tapes, magnetic disks, etc.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の磁気記録媒体の一例を示す断面図、第
2図は本発明の製造に適用される蒸着装置の構成図であ
る。 (11は非磁性基体、(2)は非磁性の低融点金属、(
3)はCoRe合金磁性層である。
FIG. 1 is a sectional view showing an example of the magnetic recording medium of the present invention, and FIG. 2 is a configuration diagram of a vapor deposition apparatus applied to manufacturing the present invention. (11 is a non-magnetic substrate, (2) is a non-magnetic low melting point metal, (
3) is a CoRe alloy magnetic layer.

Claims (1)

【特許請求の範囲】[Claims] 非磁性基体上に非磁性の低融点金属とCoRe合金磁性
層とが連続して被着形成されて成る磁気記録媒体。
A magnetic recording medium comprising a nonmagnetic low melting point metal and a CoRe alloy magnetic layer successively deposited on a nonmagnetic substrate.
JP8675784A 1984-04-27 1984-04-27 Magnetic recording medium Pending JPS60231911A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8675784A JPS60231911A (en) 1984-04-27 1984-04-27 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8675784A JPS60231911A (en) 1984-04-27 1984-04-27 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS60231911A true JPS60231911A (en) 1985-11-18

Family

ID=13895621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8675784A Pending JPS60231911A (en) 1984-04-27 1984-04-27 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS60231911A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03189922A (en) * 1989-10-05 1991-08-19 Internatl Business Mach Corp <Ibm> Magnetic memory medium and method of manufacturing the same
JPH05282648A (en) * 1992-03-16 1993-10-29 Internatl Business Mach Corp <Ibm> Magnetic recording medium and its production and magnetic recording device
SG108903A1 (en) * 2002-02-28 2005-02-28 Fuji Electric Co Ltd Magnetic recording medium

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03189922A (en) * 1989-10-05 1991-08-19 Internatl Business Mach Corp <Ibm> Magnetic memory medium and method of manufacturing the same
JPH0561685B2 (en) * 1989-10-05 1993-09-06 Ibm
JPH05282648A (en) * 1992-03-16 1993-10-29 Internatl Business Mach Corp <Ibm> Magnetic recording medium and its production and magnetic recording device
SG108903A1 (en) * 2002-02-28 2005-02-28 Fuji Electric Co Ltd Magnetic recording medium
US6936352B2 (en) 2002-02-28 2005-08-30 Fuji Electric Co., Ltd. Magnetic recording medium with controlled lattice spacing and method of forming thereof

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