JPS62132224A - Vertical magnetic recording medium - Google Patents

Abstract

PURPOSE:To improve the crystal orientability of a vertically magnetized layer and to improve recording density by providing the vertically magnetized layer onto an aluminum nitride layer formed on a substrate. CONSTITUTION:The aluminum nitride layer 3 is formed by, for example, a sputtering method on a soft magnetic layer 2 provided to the surface part of the substrate 1. The crystal orientability of the vertically magnetized layer 4 is improved if the aluminum nitride layer is provided as an underlying layer for the vertically magnetized layer 4. The vertical magnetic recording medium which can be made higher in density is thus obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a recording medium for perpendicular magnetic recording.

[Conventional technology]

Conventionally, the perpendicular magnetic layer of a perpendicular magnetic recording medium is co
-Or films are known. The sputtering method is generally known as the manufacturing method, and hexagonal co-ar carbon
s is arranged vertically on the substrate, and magnetic anisotropy occurs in the C-axis direction. Therefore, it becomes a perpendicular magnetization layer that is magnetized perpendicular to the substrate. The perpendicular magnetic recording system, which is suitable for high-density recording, takes advantage of this point, and the easier the Co-Or film is to be reduced perpendicular to the substrate, the better the material becomes. Therefore, the O-axis orientation of the Go-Or film is an important factor for perpendicular magnetic recording media. It is known that the C-axis orientation of this Co-Or film depends on the crystal orientation of the underlying layer of the Oo-Or film.

Therefore, JP-A-52-78408 discloses a so-called vertical double-layer film medium. In this method, a soft magnetic layer is provided on the surface of the substrate, and 0o-Or
The purpose is to improve the C-axis orientation of the C0-0r film by forming a film.

[Problem that the invention seeks to solve]

Conventional perpendicular magnetic recording media are configured as described above, so if the crystal orientation of the soft magnetic layer, which is the underlayer of the perpendicular magnetic layer, is poor, the crystal orientation of the perpendicular magnetic layer will also be poor. I scored very few points.

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a perpendicular magnetic recording medium that can improve the crystal orientation of perpendicular magnetization 1j4 and increase recording density.

[Means for resolving problem k iQ4] The perpendicular magnetic recording medium according to the present invention includes a substrate, an aluminum nitride layer formed on the substrate, and a perpendicular magnetization layer formed on the aluminum nitride layer.

[Effect]

The aluminum nitride layer in this invention is a material with good crystal orientation, and improves the crystal orientation of the perpendicular magnetic layer formed thereon.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure is a sectional view of a vertical vertical recording medium according to an embodiment of the present invention, and 11) is a substrate, for example, an aluminum substrate, (2)
) is a soft magnetic layer provided on the surface of the substrate +11, which is, for example, a permalloy film formed to a thickness of about 0.5 μm by sputtering. Next, an aluminum nitride (AIN) layer (3) of about 0.05 μm is formed on the permalloy film (2) by, for example, sputtering. this is,
Ar:N2=1:1 as introduced gas,
Gas pressure 3m using aluminum as target
Torr and an input power of 200W. On top of this, a perpendicular magnetization layer (4) of, for example, Co-Cr f
A thickness of about 0.2 μm is produced using the fl f sputtering method.

In this way, the table shows the Δθ50 of the peak of 0oCr (002) for the example in which the aluminum nitride layer (3) is provided as the underlayer of the perpendicular magnetization layer (4) and the comparative example in which the aluminum nitride layer (31) is not provided. The Δθ50 of the 0oCr (002) peak indicates the half-width of the rocking curve of the peak reflected from the (002) plane of the CoCr film measured by an X-ray diffraction device. This shows that the vertical alignment is good.

As shown in the table, aluminum nitride (All) layer (
By providing 31, the vertical alignment of p Co-0r film (41) is improved.

Further, the present invention can be applied even when a soft magnetic layer is provided on the surface of the substrate +11, as shown in FIG.
Commercialization 7 Luminique A (ai)! By forming +a+2, the crystal orientation of the perpendicular magnetic layer (4) formed thereon becomes excellent, and a perpendicular magnetic recording medium with high density can be obtained.

〔Effect of the invention〕

As explained above, the present invention includes a substrate, an aluminum nitride layer formed on the substrate, and a perpendicular magnetic layer formed on the aluminum nitride layer, thereby improving the crystal orientation of the perpendicular magnetic layer and increasing the recording density. This has the effect of providing a perpendicular magnetic recording medium fc that can be made high.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing a perpendicular magnetic recording medium based on VC according to one embodiment of the present invention, and FIG. 2 is a cross-sectional view showing another embodiment of the present invention. FIG. +11--one substrate, +31--one aluminum nitride layer,
(4)-m-perpendicular magnetization layer. In the figures, the same reference numerals indicate the same or corresponding parts.

Claims (2)

[Claims] (1) A substrate, an aluminum nitride layer formed on this substrate,
and a perpendicular magnetic recording medium comprising a perpendicular magnetic layer formed on this aluminum nitride layer. (2) The perpendicular magnetic recording medium according to claim 1, wherein the substrate has a soft magnetic layer provided on its surface.