JPH04351733A - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPH04351733A JPH04351733A JP12608791A JP12608791A JPH04351733A JP H04351733 A JPH04351733 A JP H04351733A JP 12608791 A JP12608791 A JP 12608791A JP 12608791 A JP12608791 A JP 12608791A JP H04351733 A JPH04351733 A JP H04351733A
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- recording medium
- optical recording
- underlayer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 6
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052984 zinc sulfide Inorganic materials 0.000 claims abstract description 6
- 150000001875 compounds Chemical class 0.000 claims description 11
- ADDWXBZCQABCGO-UHFFFAOYSA-N titanium(iii) phosphide Chemical group [Ti]#P ADDWXBZCQABCGO-UHFFFAOYSA-N 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 abstract 1
- 229910052950 sphalerite Inorganic materials 0.000 abstract 1
- JUWGUJSXVOBPHP-UHFFFAOYSA-B titanium(4+);tetraphosphate Chemical compound [Ti+4].[Ti+4].[Ti+4].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O JUWGUJSXVOBPHP-UHFFFAOYSA-B 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 14
- 238000010586 diagram Methods 0.000 description 14
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 230000005291 magnetic effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 230000005374 Kerr effect Effects 0.000 description 1
- 229910005091 Si3N Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000012994 photoredox catalyst Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、記録膜の基板側にPt
層を形成した構造の光磁気記録媒体に関するものである
。[Industrial Application Field] The present invention provides Pt on the substrate side of the recording film.
The present invention relates to a magneto-optical recording medium having a layered structure.
【0002】0002
【従来の技術】従来技術によるPt/Co積層構造の光
磁気記録媒体の例を図2、図3に示す。図2は、ガラス
やPC(ポリカーボネート)の基板1上に、カー効果を
増大させるため下地層(Si3N4)4を成膜し、成膜
した下地層4の表面を平滑にするため、エッチング5処
理を行い、更にその上にPtとCoをPt層、Co層、
…、Pt層の順に積層したものである(第14回 日
本応用磁気学会学術講演概要集(1990)65頁「P
t/Co積層膜の微細構造」鷲見他)。このような光磁
気記録媒体では、Si3N4がアモルファスであり、P
t層が[111]方向にきれいに積層されない。従って
、垂直磁気異方性が小さく、保磁力は1kOe程度しか
得られない。2. Description of the Related Art Examples of magneto-optical recording media having a Pt/Co laminated structure according to the prior art are shown in FIGS. 2 and 3. In Figure 2, a base layer (Si3N4) 4 is formed on a substrate 1 made of glass or PC (polycarbonate) in order to increase the Kerr effect, and an etching treatment 5 is applied to smooth the surface of the formed base layer 4. Then, on top of that, Pt and Co are formed as a Pt layer, a Co layer,
..., Pt layers are laminated in this order (14th Japanese Society of Applied Magnetics, Abstracts of Academic Lectures (1990), p. 65 "P
Microstructure of t/Co stacked film” Sumi et al.). In such a magneto-optical recording medium, Si3N4 is amorphous and P
The t-layers are not neatly stacked in the [111] direction. Therefore, the perpendicular magnetic anisotropy is small, and a coercive force of only about 1 kOe can be obtained.
【0003】また、図3に示すようなGaAs6やPt
を下地層として用いることによって、Pt/Co積層構
造の光磁気記録媒体の保磁力が4kOeまで増大したと
いう報告があるが(E−MRS spring’90
CVIII−7)、GaAsやPtは不透明なため
、そのような下地層を設けると、信号の読み出しができ
ない。In addition, GaAs6 and Pt as shown in FIG.
There is a report that the coercive force of a magneto-optical recording medium with a Pt/Co stacked structure was increased to 4 kOe by using Pt/Co as an underlayer (E-MRS spring '90
CVIII-7), GaAs, and Pt are opaque, so if such an underlayer is provided, signals cannot be read out.
【0004】0004
【発明が解決しようとする課題】本発明は、かかる問題
点を解決するためになされたものであり、記録膜の基板
側にPt層を形成した構造の光磁気記録媒体において、
保磁力を大きくするものである。SUMMARY OF THE INVENTION The present invention has been made to solve these problems, and provides a magneto-optical recording medium having a structure in which a Pt layer is formed on the substrate side of the recording film.
This increases the coercive force.
【0005】[0005]
【課題を解決するための手段】記録膜の基板側にPt層
を形成した構造の光磁気記録媒体において、センアエン
鉱型構造、ウルツ石型構造、ヒ化ニッケル型構造、リン
化チタン型構造、炭化タングステン型構造の中のいずれ
かの構造である透明な化合物を下地層として用いた。[Means for Solving the Problems] In a magneto-optical recording medium having a structure in which a Pt layer is formed on the substrate side of a recording film, the present invention provides a magneto-optical recording medium having a cenaeite type structure, a wurtzite type structure, a nickel arsenide type structure, a titanium phosphide type structure, A transparent compound having any of the tungsten carbide type structures was used as the underlayer.
【0006】[0006]
【作用】本発明による光磁気記録媒体では、記録膜を成
膜する際に、下地層の結晶が密な並び方をしているため
、下地層の上にスパッタリング法などによりPt層を成
膜するとPt層も密な並び方をする。これによって、記
録膜の保磁力が大きくなり、高密度記録が可能になる。[Operation] In the magneto-optical recording medium of the present invention, when forming a recording film, since the crystals of the underlayer are arranged in a dense manner, if a Pt layer is formed on the underlayer by sputtering or the like. The Pt layers are also arranged densely. This increases the coercive force of the recording film and enables high-density recording.
【0007】[0007]
【実施例】本発明による一実施例を図面に基づいて説明
する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings.
【0008】図1は、本発明によるPt/Co積層構造
の光磁気記録媒体の断面構造図であり、基板1上に下地
層2を成膜し、更に前記下地層2上にPt層、Co層、
…、Pt層の順にPt/Co積層膜3を形成したもので
ある。前記下地層2は、センアエン鉱型構造、ウルツ石
型構造、ヒ化ニッケル型構造、リン化チタン型構造、炭
化タングステン型構造の中のいずれかの構造である透明
な化合物を用いた。FIG. 1 is a cross-sectional structural diagram of a magneto-optical recording medium having a Pt/Co laminated structure according to the present invention, in which a base layer 2 is formed on a substrate 1, and a Pt layer and a Co layer are further formed on the base layer 2. layer,
..., a Pt/Co laminated film 3 is formed in the order of the Pt layer. The base layer 2 was made of a transparent compound having any one of a senaenite structure, a wurtzite structure, a nickel arsenide structure, a titanium phosphide structure, and a tungsten carbide structure.
【0009】Pt結晶は、図4に示すように面心立方格
子であり、[111]方向から見ると図5のように最密
な積み重ねをした構造である。格子定数は3.9Å、原
子間距離は2.8Åである。下地層表面の原子の並び方
が、Ptの[111]方向から見た面と類似していると
Ptの配向性が向上する。The Pt crystal has a face-centered cubic lattice as shown in FIG. 4, and when viewed from the [111] direction, it has a close-packed stacked structure as shown in FIG. The lattice constant is 3.9 Å, and the interatomic distance is 2.8 Å. If the arrangement of atoms on the surface of the underlayer is similar to the plane of Pt viewed from the [111] direction, the orientation of Pt will improve.
【0010】結晶のある面がPtの[111]方向から
見た面と同じ並び方をするものを図6〜10に示す。図
6は立方晶のセンアエン鉱型構造で[111]方向から
見るとPtと同じように密な並び方をする。図7はウル
ツ石型構造、図8はヒ化ニッケル型構造、図9はリン化
チタン型構造、図10は炭化タングステン型構造で、い
ずれも六方晶であり、[0111]方向から見ると、P
tの[111]方向から見た面と同じ密な並び方をして
いる。そこで、以上の結晶構造を持つもので、立方晶の
格子定数が3.9Å付近、六方晶の格子定数が2.8Å
付近のものを下地層として用い、その上にPtを成膜す
るとPt層も最密な構造で成膜されることになる。図1
1は、下地層の表面がPtの[111]方向から見た面
と大きく異なるときを、図12は類似しているときのP
t層と下地層の界面の状態を示したものである。ここで
、7はPt原子、8は下地層の原子である。図12はP
tが最密な並び方をしながら成膜されている。FIGS. 6 to 10 show crystals in which a certain plane of the crystal is arranged in the same manner as the plane of Pt viewed from the [111] direction. FIG. 6 shows a cubic senaeite-type structure, which when viewed from the [111] direction, is arranged in a dense arrangement similar to Pt. 7 shows a wurtzite structure, FIG. 8 shows a nickel arsenide structure, FIG. 9 shows a titanium phosphide structure, and FIG. 10 shows a tungsten carbide structure, all of which are hexagonal crystals, and when viewed from the [0111] direction, P
They are arranged in the same dense arrangement as the surface viewed from the [111] direction of t. Therefore, for those with the above crystal structure, the cubic lattice constant is around 3.9 Å, and the hexagonal lattice constant is around 2.8 Å.
If a nearby layer is used as a base layer and a Pt film is formed on it, the Pt layer will also be formed in a close-packed structure. Figure 1
1 shows P when the surface of the underlayer is significantly different from the surface seen from the [111] direction of Pt, and FIG. 12 shows P when it is similar.
This figure shows the state of the interface between the t-layer and the underlayer. Here, 7 is a Pt atom, and 8 is an atom of the underlayer. Figure 12 shows P
The film is formed while t is arranged in the closest arrangement.
【0011】本発明によるPt/Co積層構造の光磁気
記録媒体の下地層に用いる化合物の例を表1に示す。Table 1 shows examples of compounds used in the underlayer of the magneto-optical recording medium having a Pt/Co laminated structure according to the present invention.
【0012】0012
【表1】[Table 1]
【0013】図13は、表1の化合物のうちAlNを下
地層として用いたPt/Co積層構造の光磁気記録媒体
9と従来技術よるPt/Co積層構造の光磁気記録媒体
(Si3N4を下地層として用いたもの)10の特性図
である。図13より、明らかに本発明によるPt/Co
積層構造の光磁気記録媒体は保磁力が増大していること
が分かる。FIG. 13 shows a magneto-optical recording medium 9 with a Pt/Co multilayer structure using AlN as an underlayer among the compounds in Table 1 and a magneto-optical recording medium 9 with a Pt/Co multilayer structure according to the prior art (with Si3N4 as an underlayer). Fig. 10 is a characteristic diagram of the sample used as From FIG. 13, it is clear that Pt/Co according to the present invention
It can be seen that the magneto-optical recording medium with the laminated structure has an increased coercive force.
【0014】また、表1のAlN以外の化合物を下地層
として用いた場合も同様の効果が得られる。Similar effects can also be obtained when a compound other than AlN shown in Table 1 is used as the underlayer.
【0015】光磁気記録媒体の記録膜は、Co以外の磁
性体(例えば、Fe)とPtの積層構造や、磁性膜(例
えば、希土類−遷移金属合金)の基板側にPt層を形成
した構造であってもよい。The recording film of the magneto-optical recording medium has a laminated structure of a magnetic material other than Co (for example, Fe) and Pt, or a structure in which a Pt layer is formed on the substrate side of a magnetic film (for example, rare earth-transition metal alloy). It may be.
【0016】[0016]
【発明の効果】本発明によれば、記録膜の基板側にPt
層を形成した構造の光磁気記録媒体において、Ptの配
向性が向上し、記録膜の保磁力が向上する。その結果、
高密度記録が可能になる。Effects of the Invention According to the present invention, Pt is formed on the substrate side of the recording film.
In a magneto-optical recording medium having a layered structure, the orientation of Pt is improved and the coercive force of the recording film is improved. the result,
High-density recording becomes possible.
【図1】本発明によるPt/Co積層構造の光磁気記録
媒体の断面構造図である。FIG. 1 is a cross-sectional structural diagram of a magneto-optical recording medium having a Pt/Co laminated structure according to the present invention.
【図2】Si3N4を下地層に用いたPt/Co積層構
造の光磁気記録媒体の断面構造図である。FIG. 2 is a cross-sectional structural diagram of a magneto-optical recording medium with a Pt/Co laminated structure using Si3N4 as an underlayer.
【図3】GaAsを下地層に用いたPt/Co積層構造
の光磁気記録媒体の断面構造図である。FIG. 3 is a cross-sectional structural diagram of a magneto-optical recording medium with a Pt/Co laminated structure using GaAs as an underlayer.
【図4】Ptの結晶構造(面心立方格子)を示す模式図
である。FIG. 4 is a schematic diagram showing the crystal structure (face-centered cubic lattice) of Pt.
【図5】図4のPt結晶を[111]方向から見たPt
結晶の積み重ねの様子を示す図である。[Figure 5] Pt crystal of Figure 4 viewed from [111] direction
FIG. 3 is a diagram showing how crystals are stacked.
【図6】センアエン鉱型構造の化合物の結晶構造を示す
模式図である。FIG. 6 is a schematic diagram showing the crystal structure of a compound having a senaeite structure.
【図7】ウルツ石型構造の化合物の結晶構造を示す模式
図である。FIG. 7 is a schematic diagram showing the crystal structure of a compound having a wurtzite structure.
【図8】ヒ化ニッケル型構造の化合物の結晶構造を示す
模式図である。FIG. 8 is a schematic diagram showing the crystal structure of a compound having a nickel arsenide type structure.
【図9】リン化チタン型構造の化合物の結晶構造を示す
模式図である。FIG. 9 is a schematic diagram showing the crystal structure of a compound having a titanium phosphide type structure.
【図10】炭化タングステン型構造の化合物の結晶構造
を示す模式図である。FIG. 10 is a schematic diagram showing the crystal structure of a compound having a tungsten carbide type structure.
【図11】下地層の表面がPtの[111]方向から見
た面と大きく異なるときのPt層と下地層の界面の状態
を示す図である。FIG. 11 is a diagram showing the state of the interface between the Pt layer and the underlayer when the surface of the underlayer is significantly different from the plane viewed from the [111] direction of Pt.
【図12】下地層の表面がPtの[111]方向から見
た面と類似しているときのPt層と下地層の界面の状態
を示した図である。FIG. 12 is a diagram showing the state of the interface between the Pt layer and the underlayer when the surface of the underlayer is similar to the surface of Pt viewed from the [111] direction.
【図13】本発明によるPt/Co積層構造の光磁気記
録媒体(AlNを下地層として用いたもの)と従来技術
によるPt/Co積層構造の光磁気記録媒体(Si3N
4を下地層として用いたもの)の特性図である。FIG. 13 shows a magneto-optical recording medium with a Pt/Co stacked structure according to the present invention (using AlN as the underlayer) and a magneto-optical recording medium with a Pt/Co stacked structure according to the prior art (Si3N
4 is used as the base layer).
1 基板
2 下地層
3 Pt/Co積層膜
4 下地層(Si3N4)
5 エッチング
6 下地層(GaAs)
7 Pt原子
8 下地層の原子
9 本発明によるPt/Co積層構造の光磁気記録媒
体(AlNを下地層として用いたもの)1 Substrate 2 Underlayer 3 Pt/Co laminated film 4 Underlayer (Si3N4) 5 Etching 6 Underlayer (GaAs) 7 Pt atoms 8 Underlayer atoms 9 Magneto-optical recording medium with Pt/Co laminated structure according to the present invention (AlN (used as base layer)
Claims (1)
造の光磁気記録媒体において、センアエン鉱型構造、ウ
ルツ石型構造、ヒ化ニッケル型構造、リン化チタン型構
造、炭化タングステン型構造の中のいずれかの構造であ
る透明な化合物を下地層として、前記基板と前記Pt層
の間に挟み込んだことを特徴とする光磁気記録媒体。Claim 1: A magneto-optical recording medium having a structure in which a Pt layer is formed on the substrate side of a recording film, which has a cen-enite structure, a wurtzite structure, a nickel arsenide structure, a titanium phosphide structure, and a tungsten carbide structure. A magneto-optical recording medium characterized in that a transparent compound having one of the following structures is sandwiched between the substrate and the Pt layer as an underlayer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03126087A JP3108126B2 (en) | 1991-05-29 | 1991-05-29 | Magneto-optical recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03126087A JP3108126B2 (en) | 1991-05-29 | 1991-05-29 | Magneto-optical recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04351733A true JPH04351733A (en) | 1992-12-07 |
JP3108126B2 JP3108126B2 (en) | 2000-11-13 |
Family
ID=14926282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP03126087A Expired - Fee Related JP3108126B2 (en) | 1991-05-29 | 1991-05-29 | Magneto-optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3108126B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011147133A (en) * | 1996-02-28 | 2011-07-28 | Panasonic Corp | Optical disk for high resolution and three-dimensional video recording, optical disk reproduction apparatus, and optical disk recording apparatus |
-
1991
- 1991-05-29 JP JP03126087A patent/JP3108126B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011147133A (en) * | 1996-02-28 | 2011-07-28 | Panasonic Corp | Optical disk for high resolution and three-dimensional video recording, optical disk reproduction apparatus, and optical disk recording apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP3108126B2 (en) | 2000-11-13 |
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