JPS61219568A - 一定位置停止研磨方法及び装置 - Google Patents

一定位置停止研磨方法及び装置

Info

Publication number
JPS61219568A
JPS61219568A JP60060456A JP6045685A JPS61219568A JP S61219568 A JPS61219568 A JP S61219568A JP 60060456 A JP60060456 A JP 60060456A JP 6045685 A JP6045685 A JP 6045685A JP S61219568 A JPS61219568 A JP S61219568A
Authority
JP
Japan
Prior art keywords
carrier
surface plate
polished
polishing
rack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60060456A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232111B2 (enExample
Inventor
Haruo Kobayashi
春夫 小林
Kenzo Mori
毛利　憲三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP60060456A priority Critical patent/JPS61219568A/ja
Publication of JPS61219568A publication Critical patent/JPS61219568A/ja
Publication of JPH0232111B2 publication Critical patent/JPH0232111B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP60060456A 1985-03-25 1985-03-25 一定位置停止研磨方法及び装置 Granted JPS61219568A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60060456A JPS61219568A (ja) 1985-03-25 1985-03-25 一定位置停止研磨方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60060456A JPS61219568A (ja) 1985-03-25 1985-03-25 一定位置停止研磨方法及び装置

Publications (2)

Publication Number Publication Date
JPS61219568A true JPS61219568A (ja) 1986-09-29
JPH0232111B2 JPH0232111B2 (enExample) 1990-07-18

Family

ID=13142786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60060456A Granted JPS61219568A (ja) 1985-03-25 1985-03-25 一定位置停止研磨方法及び装置

Country Status (1)

Country Link
JP (1) JPS61219568A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6195876A (ja) * 1984-10-18 1986-05-14 Toshiba Corp 研磨機におけるキヤリア位置決め方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6195876A (ja) * 1984-10-18 1986-05-14 Toshiba Corp 研磨機におけるキヤリア位置決め方法

Also Published As

Publication number Publication date
JPH0232111B2 (enExample) 1990-07-18

Similar Documents

Publication Publication Date Title
KR890003776B1 (ko) 평면 연마장치
US4739589A (en) Process and apparatus for abrasive machining of a wafer-like workpiece
US4916868A (en) Honing, lapping or polishing machine
US4749898A (en) Superprecision positioning device
US6702657B2 (en) Continuous polisher machine
KR910007627A (ko) 에지폴리셔
US5975986A (en) Index table and drive mechanism for a chemical mechanical planarization machine
JPH04364728A (ja) ウエーハのノッチ部面取り装置
KR100288553B1 (ko) 평면연마장치 및 그것에 이용하는 캐리어
CN115302404A (zh) 一种光学玻璃双面研磨抛光游星轮定位设备
JPH064234B2 (ja) Ｎｃスリッター装置等のｎｃ装置
JPS61219568A (ja) 一定位置停止研磨方法及び装置
US4481814A (en) Stud inspection system
US4813845A (en) Object transport apparatus
US4559919A (en) Grinding wheel profiler
US4312282A (en) Positioning apparatus
JPH01169939A (ja) 半導体ウエハのセンタ合せ装置
JPH10235542A (ja) 端面研磨方法及び装置
JP2552305B2 (ja) 両面研磨装置
JPH02106269A (ja) 異状装填検知器を有する研磨機
JPS6080559A (ja) 研磨装置
JP2004095600A (ja) アライメント装置
JP2001030154A (ja) 端面研磨装置
US3593462A (en) Apparatus for abrading articles
JPH0798303B2 (ja) 平面研磨装置