JPS6121907A - 水素化ケイ素の製造方法 - Google Patents

水素化ケイ素の製造方法

Info

Publication number
JPS6121907A
JPS6121907A JP14133184A JP14133184A JPS6121907A JP S6121907 A JPS6121907 A JP S6121907A JP 14133184 A JP14133184 A JP 14133184A JP 14133184 A JP14133184 A JP 14133184A JP S6121907 A JPS6121907 A JP S6121907A
Authority
JP
Japan
Prior art keywords
hydride
silicon
positive integer
reaction
silicon compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14133184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0480847B2 (cs
Inventor
Masayoshi Ito
正義 伊藤
Hiroji Miyagawa
博治 宮川
Toshihiro Abe
智弘 安部
Kaoru Inoue
薫 井上
Hiroshige Amita
裕茂 網田
Kiyougo Koizumi
鏡悟 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP14133184A priority Critical patent/JPS6121907A/ja
Publication of JPS6121907A publication Critical patent/JPS6121907A/ja
Publication of JPH0480847B2 publication Critical patent/JPH0480847B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP14133184A 1984-07-10 1984-07-10 水素化ケイ素の製造方法 Granted JPS6121907A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14133184A JPS6121907A (ja) 1984-07-10 1984-07-10 水素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14133184A JPS6121907A (ja) 1984-07-10 1984-07-10 水素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS6121907A true JPS6121907A (ja) 1986-01-30
JPH0480847B2 JPH0480847B2 (cs) 1992-12-21

Family

ID=15289458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14133184A Granted JPS6121907A (ja) 1984-07-10 1984-07-10 水素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS6121907A (cs)

Also Published As

Publication number Publication date
JPH0480847B2 (cs) 1992-12-21

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