JPS61209338A - 光学的測定装置 - Google Patents

光学的測定装置

Info

Publication number
JPS61209338A
JPS61209338A JP4994985A JP4994985A JPS61209338A JP S61209338 A JPS61209338 A JP S61209338A JP 4994985 A JP4994985 A JP 4994985A JP 4994985 A JP4994985 A JP 4994985A JP S61209338 A JPS61209338 A JP S61209338A
Authority
JP
Japan
Prior art keywords
air
measured
hot air
detection part
purging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4994985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0337135B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Isao Hishikari
功 菱刈
Takao Kobayashi
孝雄 小林
Susumu Kobayashi
進 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Works Ltd filed Critical Chino Works Ltd
Priority to JP4994985A priority Critical patent/JPS61209338A/ja
Publication of JPS61209338A publication Critical patent/JPS61209338A/ja
Publication of JPH0337135B2 publication Critical patent/JPH0337135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
JP4994985A 1985-03-13 1985-03-13 光学的測定装置 Granted JPS61209338A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4994985A JPS61209338A (ja) 1985-03-13 1985-03-13 光学的測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4994985A JPS61209338A (ja) 1985-03-13 1985-03-13 光学的測定装置

Publications (2)

Publication Number Publication Date
JPS61209338A true JPS61209338A (ja) 1986-09-17
JPH0337135B2 JPH0337135B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-04

Family

ID=12845279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4994985A Granted JPS61209338A (ja) 1985-03-13 1985-03-13 光学的測定装置

Country Status (1)

Country Link
JP (1) JPS61209338A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225808U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-08-08 1990-02-20
JPH03126909A (ja) * 1989-10-12 1991-05-30 Tokyo Seimitsu Co Ltd ダイシングマシン
WO1992014119A1 (en) * 1991-01-30 1992-08-20 Nkk Corporation Ellipsometer and method of controlling coating thickness by use of ellipsometer
WO2005111581A1 (en) * 2004-05-17 2005-11-24 Pfizer Products Inc. Probe holder
DE102009045472A1 (de) * 2009-10-08 2011-04-14 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Sensorsystem

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS436238Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1965-11-20 1968-03-19
JPS5160283U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-11-06 1976-05-12
JPS5253275U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-10-15 1977-04-16

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS436238Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1965-11-20 1968-03-19
JPS5160283U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-11-06 1976-05-12
JPS5253275U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-10-15 1977-04-16

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225808U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-08-08 1990-02-20
JPH03126909A (ja) * 1989-10-12 1991-05-30 Tokyo Seimitsu Co Ltd ダイシングマシン
WO1992014119A1 (en) * 1991-01-30 1992-08-20 Nkk Corporation Ellipsometer and method of controlling coating thickness by use of ellipsometer
US5438415A (en) * 1991-01-30 1995-08-01 Nkk Corporation Ellipsometer and method of controlling coating thickness therewith
WO2005111581A1 (en) * 2004-05-17 2005-11-24 Pfizer Products Inc. Probe holder
DE102009045472A1 (de) * 2009-10-08 2011-04-14 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Sensorsystem

Also Published As

Publication number Publication date
JPH0337135B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term