JPS61209338A - Optical measuring apparatus - Google Patents

Optical measuring apparatus

Info

Publication number
JPS61209338A
JPS61209338A JP4994985A JP4994985A JPS61209338A JP S61209338 A JPS61209338 A JP S61209338A JP 4994985 A JP4994985 A JP 4994985A JP 4994985 A JP4994985 A JP 4994985A JP S61209338 A JPS61209338 A JP S61209338A
Authority
JP
Japan
Prior art keywords
air
measured
hot air
detection part
purging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4994985A
Other languages
Japanese (ja)
Other versions
JPH0337135B2 (en
Inventor
Isao Hishikari
功 菱刈
Takao Kobayashi
孝雄 小林
Susumu Kobayashi
進 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Works Ltd filed Critical Chino Works Ltd
Priority to JP4994985A priority Critical patent/JPS61209338A/en
Publication of JPS61209338A publication Critical patent/JPS61209338A/en
Publication of JPH0337135B2 publication Critical patent/JPH0337135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15Preventing contamination of the components of the optical system or obstruction of the light path

Abstract

PURPOSE:To attain to enhance measuring accuracy by preventing the generation of dew condensation in a detection part, by providing an air purge pipe for injecting hot air and performing the purging of air by injecting hot air to the direction of an object to be measured. CONSTITUTION:The light of a light source 2 is guided through an optical fiber 3 to be projected to an object 1 to be measured and an air purge pipe 6 having an opening 6a is provided around the outer periphery of a detection part 4 collecting reflected light from said object 1 so as to be directed to the object 1 to be measured. Hot air (warm air) A heated to a degree generating no dew condensation and cooling is injected toward the object 1 to be measured from the opening 6a to perform the purging of air. Subsequently, the detection part 4 again sends condensed reflected light to a measuring part 5 through the optical fiber 3 to measure the properties of the object 1 to be measured. Because hot air is used in the purging of air, the generation of dew condensation caused by the cooling of the optical system of the detection part 4 is prevented. By this method, highly accurate and highly reliable measurement is enabled and the damage of the object to be measured is prevented.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、光を利用して測定対象の性状を測定する光
学的測定装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an optical measurement device that measures the properties of a measurement target using light.

[従来の技術] 従来、熱放射を利用して被測定対象の温度を測定する放
射温度計、あるいは水分を吸収する波長の光と水分を吸
収しない波長の光との比から水分率を測定する水分計等
の光学的測定装置が知られている。
[Prior art] Conventionally, radiation thermometers measure the temperature of a target using thermal radiation, or moisture content is measured from the ratio of light at a wavelength that absorbs moisture to light at a wavelength that does not absorb moisture. Optical measuring devices such as moisture meters are known.

[この発明が解決しようとする問題点コしかしながら、
測定雰囲気の状態が悪く、塵埃等により被測定対象から
十分な放射エネルギーが来なくなったり、測定用の窓部
が汚れてしまうことがある。このため、測定方向に清浄
なエアを噴出させ、塵埃等の影響を受けないようエアパ
ージする方法がある。
[The problems that this invention attempts to solve, however,
The measurement atmosphere may be in poor condition, and sufficient radiant energy may not come from the object to be measured due to dust or the like, or the measurement window may become dirty. For this reason, there is a method of air purging by jetting clean air in the measurement direction to avoid the influence of dust and the like.

ところが、このエアパージのため、被測定対象が冷却さ
れ、正しい測定ができなくなったり、測定装置の光学系
等にも結露を生じる問題点があった。
However, due to this air purge, there are problems in that the object to be measured is cooled, making it impossible to perform accurate measurements, and dew condensation also occurs in the optical system of the measuring device.

この発明の目的は、以上の点に鑑み、熱風をエアパージ
のエアに用い、冷却、結露等のおそれのない光学的測定
装置を提供することである。
In view of the above points, an object of the present invention is to provide an optical measuring device that uses hot air as air for air purging and is free from cooling, dew condensation, and the like.

[問題点を解決するための手段] この発明は、被測定対象からの放射エネルギーを受光す
る検出部と、この検出部の被測定対象方向に設けられた
熱風を噴出するエアパージ管とを備えるようにした光学
的測定装置である。
[Means for Solving the Problems] The present invention includes a detection unit that receives radiant energy from an object to be measured, and an air purge pipe that blows out hot air provided in the direction of the detection unit to the object to be measured. This is an optical measuring device.

C実施例〕 第1図は、この発明の一実施例を示す構成説明図である
C Embodiment] FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention.

図において、1は、被測定対象で、この被測定対象1に
光源2の光を光ファイバー3を介して検出部4に導いて
投光し、その反射光を検出部4で集光して再び光ファイ
バー3を介し測定部5に導き、被測定対象1の水分、そ
の他の性状を測定するようにしている。そして、検出部
4の外周の被測定対象1の方向に開口6aを有するエア
パージ管6が設けられ、エア導入口より暖められた熱風
(温風)Aが、被測定対象1方向に噴出し、エアパージ
がなされる。
In the figure, reference numeral 1 denotes an object to be measured. Light from a light source 2 is directed to the object to be measured 1 via an optical fiber 3 and directed to a detection section 4, and the reflected light is collected by the detection section 4 and re-entered. The optical fiber 3 is led to a measurement section 5 to measure moisture and other properties of the object 1 to be measured. Then, an air purge pipe 6 having an opening 6a in the direction of the object to be measured 1 on the outer periphery of the detection part 4 is provided, and heated hot air (warm air) A is blown out in the direction of the object to be measured 1 from the air inlet. Air purge is performed.

このように、熱風をエアパージに用いているので、検出
部4の光学系等を冷却して結露を生じさせることがなく
、水滴が被測定対象1に落下して品質の低下等を招くこ
とがない。また、熱風なので被測定対象1を冷却して測
定誤差、品質の低下を招くおそれもない。なお、熱風の
温度としては、雰囲気温度、被測定対象1の温度、状態
から、結露、冷却を生じない温度であればよい。
In this way, since hot air is used for air purging, there is no possibility of cooling the optical system of the detection unit 4 and causing dew condensation, and there is no possibility that water droplets will fall onto the object to be measured 1 and cause deterioration of quality. do not have. Furthermore, since the air is hot, there is no risk of cooling the object 1 to be measured, resulting in measurement errors or quality deterioration. Note that the temperature of the hot air may be any temperature that does not cause dew condensation or cooling based on the ambient temperature and the temperature and condition of the object 1 to be measured.

また、エアパージ管6の熱風の導入位置は、検出部6を
暖める図示の位置の他に、検出部6の入射面より被測定
対象1の方向に寄った位置で検出部4を暖めない位置の
いずれの位置であってもよい。また、熱風は、被測定対
象1の乾燥用の熱風を兼ねてもよい。
In addition, the hot air introduction position of the air purge tube 6 is not only the illustrated position where the detection unit 6 is heated, but also a position closer to the measurement target 1 than the incident surface of the detection unit 6 and a position where the detection unit 4 is not heated. It may be in any position. Further, the hot air may also serve as hot air for drying the object 1 to be measured.

第2図は、この発明の他の実施例を示す構成説明図であ
る。
FIG. 2 is a configuration explanatory diagram showing another embodiment of the present invention.

この例では、加熱炉7内に被測定対象1を位置させ、加
熱炉7の壁面からの放飼エネルギーの影響を除去するラ
ジエーシジンシールを兼ねたエアパージ管6を炉壁7a
より被測定対象方向に設けている。そして、エアパージ
管6の他端には受光窓8を介して検出器4が設けられ、
被測定対象1からの放射エネルギーを検出し、その検出
信号は測定部5に導かれその温度測定等が行われるよう
になっている。そして、加熱炉7内の雰囲気中のエアA
は、炉壁7aに設けられたフィルタのような浄化手段9
で浄化され、送風器10を介してエアパージ管6より被
測定対象1方向に噴出し、エアパージとして使用される
In this example, the object to be measured 1 is located in the heating furnace 7, and the air purge pipe 6, which also serves as a radiation seal to remove the influence of the release energy from the wall surface of the heating furnace 7, is connected to the furnace wall 7a.
It is placed closer to the direction of the object to be measured. A detector 4 is provided at the other end of the air purge tube 6 via a light receiving window 8.
Radiant energy from the object to be measured 1 is detected, and the detection signal is led to the measuring section 5 to measure its temperature and the like. Then, air A in the atmosphere inside the heating furnace 7
is a purifying means 9 such as a filter provided on the furnace wall 7a.
The air is purified by air blower 10 and ejected from air purge tube 6 in one direction toward the object to be measured, and used as an air purge.

このように、被測定対象1とあまり相違しない雰囲気中
の熱風エアを循環させて使用するので、熱風をつくるた
めの加熱手段は不要で、冷却、結露のおそれのない、高
精度、高信頼性の測定が可能となる。なお、浄化手段9
は必ずしも炉壁7aに設ける必要もなく、適当な位置で
、適当な手段により必要程度浄化させてやればよい。
In this way, hot air is circulated in an atmosphere that is not very different from the object to be measured 1, so there is no need for a heating means to create hot air, and there is no risk of cooling or condensation, resulting in high precision and high reliability. measurement becomes possible. In addition, the purification means 9
It is not necessarily necessary to provide it on the furnace wall 7a, but it is sufficient to purify it to the necessary extent by an appropriate means at an appropriate position.

[発明の効果] 以上述べたように、この発明は、エアパージ用のエアと
して熱風を用いているので、検出部に結露を生じるおそ
れがなく、また、被測定対象を冷却してしまうこともな
く、高精度、高信頼性の測定が可能で、被測定対象を損
傷させることもない。
[Effects of the Invention] As described above, this invention uses hot air as the air for air purging, so there is no risk of condensation forming on the detection section, and there is no possibility of cooling the object to be measured. , high precision and high reliability measurements are possible, and the object to be measured is not damaged.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第2図は、この発明の一実施例を示す構成説明
図である。 1・・・被測定対象、 2・・・光源、 3・・・光フ
ァイバー、 4・・・検出部、 5・・・測定部、 6
・・・エアパージ管、 7・・・加熱炉、 8・・・受
光窓、 9・・・浄化手段、 10・・・送風機
FIGS. 1 and 2 are configuration explanatory diagrams showing one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Object to be measured, 2... Light source, 3... Optical fiber, 4... Detection section, 5... Measurement section, 6
...Air purge pipe, 7.Heating furnace, 8.Light receiving window, 9.Purification means, 10.Blower

Claims (1)

【特許請求の範囲】 1、被測定対象からの放射エネルギーを受光する検出部
と、この検出部の被測定対象方向に設けられ熱風を噴出
するエアパージ管とを備えたことを特徴とする光学的測
定装置。 2、測定雰囲気中のエアを浄化手段により浄化してエア
パージに用いるようにしたことを特徴とする特許請求の
範囲第1項記載の光学的測定装置。
[Claims] 1. An optical system comprising: a detection section that receives radiant energy from an object to be measured; and an air purge pipe that is provided in the direction of the object to be measured from the detection section and blows out hot air. measuring device. 2. The optical measuring device according to claim 1, wherein the air in the measurement atmosphere is purified by a purifying means and used for air purging.
JP4994985A 1985-03-13 1985-03-13 Optical measuring apparatus Granted JPS61209338A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4994985A JPS61209338A (en) 1985-03-13 1985-03-13 Optical measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4994985A JPS61209338A (en) 1985-03-13 1985-03-13 Optical measuring apparatus

Publications (2)

Publication Number Publication Date
JPS61209338A true JPS61209338A (en) 1986-09-17
JPH0337135B2 JPH0337135B2 (en) 1991-06-04

Family

ID=12845279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4994985A Granted JPS61209338A (en) 1985-03-13 1985-03-13 Optical measuring apparatus

Country Status (1)

Country Link
JP (1) JPS61209338A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225808U (en) * 1988-08-08 1990-02-20
JPH03126909A (en) * 1989-10-12 1991-05-30 Tokyo Seimitsu Co Ltd Lens cover for microscope
WO1992014119A1 (en) * 1991-01-30 1992-08-20 Nkk Corporation Ellipsometer and method of controlling coating thickness by use of ellipsometer
WO2005111581A1 (en) * 2004-05-17 2005-11-24 Pfizer Products Inc. Probe holder
DE102009045472A1 (en) * 2009-10-08 2011-04-14 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG sensor system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS436238Y1 (en) * 1965-11-20 1968-03-19
JPS5160283U (en) * 1974-11-06 1976-05-12
JPS5253275U (en) * 1975-10-15 1977-04-16

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS436238Y1 (en) * 1965-11-20 1968-03-19
JPS5160283U (en) * 1974-11-06 1976-05-12
JPS5253275U (en) * 1975-10-15 1977-04-16

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225808U (en) * 1988-08-08 1990-02-20
JPH0530083Y2 (en) * 1988-08-08 1993-08-02
JPH03126909A (en) * 1989-10-12 1991-05-30 Tokyo Seimitsu Co Ltd Lens cover for microscope
WO1992014119A1 (en) * 1991-01-30 1992-08-20 Nkk Corporation Ellipsometer and method of controlling coating thickness by use of ellipsometer
US5438415A (en) * 1991-01-30 1995-08-01 Nkk Corporation Ellipsometer and method of controlling coating thickness therewith
WO2005111581A1 (en) * 2004-05-17 2005-11-24 Pfizer Products Inc. Probe holder
DE102009045472A1 (en) * 2009-10-08 2011-04-14 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG sensor system

Also Published As

Publication number Publication date
JPH0337135B2 (en) 1991-06-04

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