JPH0337135B2 - - Google Patents

Info

Publication number
JPH0337135B2
JPH0337135B2 JP60049949A JP4994985A JPH0337135B2 JP H0337135 B2 JPH0337135 B2 JP H0337135B2 JP 60049949 A JP60049949 A JP 60049949A JP 4994985 A JP4994985 A JP 4994985A JP H0337135 B2 JPH0337135 B2 JP H0337135B2
Authority
JP
Japan
Prior art keywords
measured
air
hot air
measurement
purification means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60049949A
Other languages
Japanese (ja)
Other versions
JPS61209338A (en
Inventor
Isao Hishikari
Takao Kobayashi
Susumu Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP4994985A priority Critical patent/JPS61209338A/en
Publication of JPS61209338A publication Critical patent/JPS61209338A/en
Publication of JPH0337135B2 publication Critical patent/JPH0337135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15Preventing contamination of the components of the optical system or obstruction of the light path

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Measuring Cells (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、光を利用して測定対象の性状を測
定する光学的測定装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an optical measurement device that measures the properties of a measurement target using light.

[従来の技術] 従来、熱放射を利用して被測定対象の温度を測
定する放射温度計、あるいは水分を吸収する波長
の光と水分を吸収しない波長の光との比から水分
率を測定する水分計等の光学的測定装置が知られ
ている。
[Prior art] Conventionally, radiation thermometers measure the temperature of a target using thermal radiation, or moisture content is measured from the ratio of light at a wavelength that absorbs moisture to light at a wavelength that does not absorb moisture. Optical measuring devices such as moisture meters are known.

[この発明が解決しようとする問題点] しかしながら、測定雰囲気の状態が悪く、塵埃
等により被測定対象から十分な放射エネルギーが
来なくなつたり、測定用の窓部が汚れてしまうこ
とがある。このため、測定方向に清浄なエアを噴
出させ、塵埃等の影響を受けないようエアパージ
する方法がある。
[Problems to be Solved by the Invention] However, the measurement atmosphere may be in poor condition, and dust or the like may prevent sufficient radiant energy from coming from the object to be measured, or the measurement window may become dirty. For this reason, there is a method of air purging by jetting clean air in the measurement direction to avoid the influence of dust and the like.

ところが、このエアパージのため、被測定対象
が冷却され、正しい測定ができなくなつたり、測
定装置の光学系等にも結露を生じる問題点があつ
た。
However, due to this air purge, the object to be measured is cooled, making it impossible to perform accurate measurements, and there are also problems in that dew condensation occurs on the optical system of the measuring device.

この発明の目的は、以上の点に鑑み、熱風をエ
アパージのエアに用い、冷却、結露等のおそれの
ない光学的測定装置を提供することである。
In view of the above points, an object of the present invention is to provide an optical measuring device that uses hot air as air for air purging and is free from cooling, dew condensation, and the like.

[問題点を解決するための手段] この発明は、被測定対象からの放射エネルギー
を受光する検出部と、この検出部の被測定対象方
向に設けられた熱風を噴出するエアパージ管とを
備えるようにした光学的測定装置である。
[Means for Solving the Problems] The present invention includes a detection unit that receives radiant energy from an object to be measured, and an air purge pipe that blows out hot air provided in the direction of the detection unit to the object to be measured. This is an optical measuring device.

[実施例] 第1図は、この発明の一実施例を示す構成説明
図である。
[Embodiment] FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention.

図において、1は、被測定対象で、この被測定
対象1に光源2の光を光フアイバー3を介して検
出部4に導いて投光し、その反射光を検出部4で
集光して再び光フアイバー3を介し測定部5に導
き、被測定対象1の水分、その他の性状を測定す
るようにしている。そして、検出部4の外周の被
測定対象1の方向に開口6aを有するエアパージ
管6が設けられ、エア導入口より暖められた熱風
(温風)Aが、被測定対象1方向に噴出し、エア
パージがなされる。
In the figure, reference numeral 1 denotes an object to be measured. Light from a light source 2 is directed to the object to be measured 1 via an optical fiber 3 and directed to a detection section 4, and the reflected light is collected by the detection section 4. The optical fiber 3 is guided again to the measuring section 5 to measure the moisture content and other properties of the object 1 to be measured. Then, an air purge pipe 6 having an opening 6a in the direction of the object to be measured 1 on the outer periphery of the detection part 4 is provided, and heated hot air (warm air) A is blown out in the direction of the object to be measured 1 from the air inlet. Air purge is performed.

このように、熱風をエアパージに用いているの
で、検出部4の光学系等を冷却して結露を生じさ
せることがなく、水滴が被測定対象1に落下して
品質の低下等を招くことがない。また、熱風なの
で被測定対象1を冷却して測定誤差、品質の低下
を招くおそれもない。なお、熱風の温度として
は、雰囲気温度、被測定対象1の温度、状態か
ら、結露、冷却を生じない温度であればよい。
In this way, since hot air is used for air purging, there is no possibility of cooling the optical system of the detection unit 4 and causing dew condensation, and there is no possibility that water droplets will fall onto the object to be measured 1 and cause deterioration of quality. do not have. Furthermore, since the air is hot, there is no risk of cooling the object 1 to be measured, resulting in measurement errors or quality deterioration. Note that the temperature of the hot air may be any temperature that does not cause dew condensation or cooling based on the ambient temperature and the temperature and condition of the object 1 to be measured.

また、エアパージ管6の熱風の導入位置は、検
出部6を暖める図示の位置の他に、検出部6の入
射面より被測定対象1の方向に寄つた位置で検出
部4を暖めない位置のいずれの位置であつてもよ
い。また、熱風は、被測定対象1の乾燥用の熱風
を兼ねてもよい。
In addition, the hot air introducing position of the air purge pipe 6 is not only the illustrated position where the detection unit 6 is heated, but also a position closer to the measurement target 1 from the entrance surface of the detection unit 6 and a position where the detection unit 4 is not heated. It may be in any position. Further, the hot air may also serve as hot air for drying the object 1 to be measured.

第2図は、この発明の他の実施例を示す構成説
明図である。
FIG. 2 is a configuration explanatory diagram showing another embodiment of the present invention.

この例では、加熱炉7内に被測定対象1を位置
させ、加熱炉7の壁面からの放射エネルギーの影
響を除去するラジエーシヨンシールを兼ねたエア
パージ管6を炉壁7aより被測定対象方向に設け
ている。そして、エアパージ管6の他端には受光
窓8を介して検出器4が設けられ、被測定対象1
からの放射エネルギーを検出し、その検出信号は
測定部5に導かれその温度測定等が行われるよう
になつている。そして、加熱炉7内の雰囲気中の
エアAは、炉壁7aに設けられたフイルタのよう
な浄化手段9で浄化され、送風器10を介してエ
アパージ管6より被測定対象1方向に噴出し、エ
アパージとして使用される。
In this example, the object to be measured 1 is located in the heating furnace 7, and the air purge pipe 6, which also serves as a radiation seal to remove the influence of radiant energy from the wall surface of the heating furnace 7, is directed from the furnace wall 7a toward the object to be measured. It is set up in A detector 4 is provided at the other end of the air purge tube 6 through a light receiving window 8, and a detector 4 is installed at the other end of the air purge tube 6.
Radiant energy from the sensor is detected, and the detection signal is led to a measuring section 5 to measure its temperature. The air A in the atmosphere inside the heating furnace 7 is purified by a purifying means 9 such as a filter provided on the furnace wall 7a, and is ejected from the air purge pipe 6 in the direction of the object to be measured via the blower 10. , used as an air purge.

このように、被測定対象1とあまり相違しない
雰囲気中の熱風エアを循環させて使用するので、
熱風をつくるための加熱手段は不要で、冷却、結
露のおそれのない、高精度、高信頼性の測定が可
能となる。なお、浄化手段9は必ずしも炉壁7a
に設ける必要もなく、適当な位置で、適当な手段
により必要程度浄化させてやればよい。
In this way, since hot air is circulated in an atmosphere that is not very different from the object to be measured 1,
No heating means is required to generate hot air, and highly accurate and reliable measurements are possible without the risk of cooling or condensation. Note that the purifying means 9 is not necessarily the furnace wall 7a.
There is no need to provide the water at any location, and it is sufficient to purify it to the necessary extent by using appropriate means at an appropriate location.

[発明の効果] 以上述べたように、この発明は、エアパージ用
のエアとして熱風を用いているので、検出部に結
露を生じるおそれがなく、また、被測定対象を冷
却してしまうこともなく、高精度、高信頼性の測
定が可能で、被測定対象を損傷させることもな
い。
[Effects of the Invention] As described above, this invention uses hot air as the air for air purging, so there is no risk of condensation forming on the detection section, and there is no possibility of cooling the object to be measured. , high precision and high reliability measurements are possible, and the object to be measured is not damaged.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図は、この発明の一実施例を示す
構成説明図である。 1……被測定対象、2……光源、3……光フア
イバー、4……検出部、5……測定部、6……エ
アパージ管、7……加熱炉、8……受光窓、9…
…浄化手段、10……送風機。
FIGS. 1 and 2 are configuration explanatory diagrams showing one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Object to be measured, 2...Light source, 3...Optical fiber, 4...Detection section, 5...Measurement section, 6...Air purge tube, 7...Heating furnace, 8...Light receiving window, 9...
...Purification means, 10...Blower.

Claims (1)

【特許請求の範囲】[Claims] 1 加熱雰囲気中の被測定対象からの放射エネル
ギーを受光する検出部と、測定雰囲気中のエアを
浄化する浄化手段と、検出部の被測定対象方向に
設けられ浄化手段よりの熱風エアを噴出するエア
パージ管とを備えたことを特徴とする光学的測定
装置。
1. A detection section that receives radiant energy from the object to be measured in a heated atmosphere, a purification means that purifies the air in the measurement atmosphere, and a purification means installed in the direction of the object to be measured from the detection section and blows out hot air from the purification means. An optical measuring device characterized by comprising an air purge tube.
JP4994985A 1985-03-13 1985-03-13 Optical measuring apparatus Granted JPS61209338A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4994985A JPS61209338A (en) 1985-03-13 1985-03-13 Optical measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4994985A JPS61209338A (en) 1985-03-13 1985-03-13 Optical measuring apparatus

Publications (2)

Publication Number Publication Date
JPS61209338A JPS61209338A (en) 1986-09-17
JPH0337135B2 true JPH0337135B2 (en) 1991-06-04

Family

ID=12845279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4994985A Granted JPS61209338A (en) 1985-03-13 1985-03-13 Optical measuring apparatus

Country Status (1)

Country Link
JP (1) JPS61209338A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0530083Y2 (en) * 1988-08-08 1993-08-02
JP2617001B2 (en) * 1989-10-12 1997-06-04 株式会社東京精密 Dicing machine
WO1992014119A1 (en) * 1991-01-30 1992-08-20 Nkk Corporation Ellipsometer and method of controlling coating thickness by use of ellipsometer
US20050005717A1 (en) * 2003-07-10 2005-01-13 Pfizer Inc Probe holder
DE102009045472B4 (en) * 2009-10-08 2021-06-17 Endress+Hauser Conducta Gmbh+Co. Kg Sensor system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS436238Y1 (en) * 1965-11-20 1968-03-19
JPS5253275U (en) * 1975-10-15 1977-04-16

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160283U (en) * 1974-11-06 1976-05-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS436238Y1 (en) * 1965-11-20 1968-03-19
JPS5253275U (en) * 1975-10-15 1977-04-16

Also Published As

Publication number Publication date
JPS61209338A (en) 1986-09-17

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Legal Events

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EXPY Cancellation because of completion of term