JPS61208623A - Production of vertical magnetic recording medium - Google Patents

Abstract

PURPOSE:To improve moisture resistance and wear resistance by introducing gas having small chemical activity from an upper stream side with respect to a substrate moving direction and gas contg. oxygen from a down stream side. CONSTITUTION:The gas having small chemical activity is introduced from the upper stream side with respect to the substrate moving direction and the gas contg. oxygen is introduced from the down stream side with respect to the substrate moving direction. The gas having small chemical reactivity refers to the gas which is not adsorbed to an evaporating material, i.e., ferromagnetic material or is adsorbed thereto at a low rate and is preferably the gas of which the chemical heat of adsorption to the evaporating material, i.e., ferromagnetic material is <=10kcal/mol at a room temp. More specifically, 1 or >=2 kinds of gases selected from N2, Ar, He, CH4, C2H6 are used. The ferromagnetic metal of the evaporating material is a ferromagnetic metal which exhibits ferromagnetism or ferrimagnetism at a room temp. and above all, the material having >=300emu/cc satd. magnetization Ms at a room temp. is preferable. The degree of oxidation near the surface layer of the magnetic recording layer is thereby increased and the corrosion resistance and wear resistance of the magnetic recording layer are improved.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a method for manufacturing a perpendicular magnetic recording medium.

[Conventional technology]

The perpendicular magnetization film was manufactured using Go using electron beam evaporation in a vacuum atmosphere with oxygen gas introduced.
Perpendicularly oriented Co particles and non-ferromagnetic Co.

A Co-based perpendicular magnetic recording medium consisting of a two-phase mixed state of particles has been proposed (Collection of Abstracts of the 7th Academic Conference of the Japan Society of Applied Magnetics, 7aA-9 to 7aA-B, November 1983).
.

Although this manufacturing method has advantages such as a fast film formation rate and no need to heat the substrate, this manufacturing method also has the following drawbacks. In other words, since this manufacturing method uses only oxygen gas as the introduced gas, - a getter effect of oxygen gas occurs due to the Co film that adheres to the substrate or the inner wall of the vacuum layer during vapor deposition, and the pressure of the vacuum atmosphere fluctuates significantly. do. For this reason, there is no reproducibility in the film formation conditions and the magnetic properties of the formed magnetic recording layer. Furthermore, when the magnetic recording layer is continuously formed on a long substrate of an organic polymer film.

There is a problem that the magnetic properties, film thickness, etc. in the longitudinal direction of the film are non-uniform. Moreover, the surface of the magnetic recording layer formed of Co and Go oxides has the drawback of being prone to cracking.

As a manufacturing method to eliminate the above drawbacks,9 the present inventors first introduced a gas into a vacuum atmosphere and used a ferromagnetic material as an evaporation material to form a perpendicular magnetic recording layer on a substrate by vacuum evaporation. A gas with low chemical activity and oxygen gas are used, both gases are introduced at the same time, and the pressure near the substrate at the time of gas introduction is 1 x 10 Torr to 5 Torr.
Vacuum deposition method at x 10 Torr (patent application 1973)
9-214412).

[Problem that the invention seeks to solve]

However, this manufacturing method also has the following drawbacks.

When the evaporation material is Go, the corrosion resistance is poor. In particular, under high humidity, the magnetic properties deteriorate, specifically, the saturation magnetization (MS) decreases, and if left in a high temperature atmosphere for a long period of time, the magnetic layer disappears, which is a serious drawback.

On the other hand, when the evaporation material is Fe, the magnetic layer is mainly composed of iron oxide, so it has excellent lubricity between the head and the magnetic layer, but has the disadvantage of poor wear resistance.

The aim of the invention is to overcome the above-mentioned drawbacks.

The present invention provides a method for manufacturing a perpendicular magnetic recording medium with excellent moisture resistance and abrasion resistance.

[Means for solving problems]

The present invention has the following configuration. That is, the present invention provides a vapor deposition apparatus equipped with a running system consisting of a long substrate supply device, a substrate cooling drum, and a substrate winding device inside a vacuum container, and injects a gas with low chemical activity into the vacuum atmosphere of the vacuum container. When forming a perpendicular magnetic recording layer on a running long substrate by vacuum evaporation using a ferromagnetic metal as an evaporation material while introducing a gas containing oxygen, the gas with low chemical activity is applied to the upstream side in the direction of movement of the substrate. This method of manufacturing a perpendicular magnetic recording medium is characterized in that the oxygen-containing gas is introduced from the downstream side with respect to the direction of movement of the substrate, and these gases are supplied to the perpendicular magnetic recording layer forming region.

In the method for manufacturing a perpendicular magnetic recording medium of the present invention, the gases introduced into the vacuum atmosphere are both a gas with low chemical activity and an oxygen gas.

What is a gas with low chemical activity in the present invention?

A gas that is not adsorbed to the ferromagnetic material that is the evaporation material, or a gas that is adsorbed at a slow rate, and the heat of chemical adsorption to the ferromagnetic material that is the evaporation material is 10 Kcal at room temperature.
/ mol or less gas is desirable, specifically,
N2. Ar, He, Ne, Xe, Rn, C
It is desirable to use one or more gases selected from H4, C2M, and 6. Furthermore, because it is easy to obtain and inexpensive, N2. Ar
is the most suitable.

The ferromagnetic metal of the evaporation material used in the present invention is a ferromagnetic metal that exhibits 7 eromagnetism or ferrimagnetism at room temperature, and among them, the saturation magnetization Ms at room temperature is 300 em
Materials with a u 10c or higher are preferred. Examples of the ferromagnetic metal include ferromagnetic metals such as Fe, Go, and Ni, and alloys thereof.

Specifically, Fe, Go, Ni and Fe-Go, Fe
-Ni,,Go-Ni.

These include alloys such as Fe-Co-Ni and alloys of these single metals or alloys with other metals. Other metals specifically include Mo';Y'Tj', Cr, Nb,
Ta, Ti, Zr, Re.

Os, Pd, Pt, Rh, Ru, Zn, Mn, Ce, P
r, Nd, Pm.

Sm, Eu, aa, 'rb, Dy, Ho,
These include Er, Tm, Yk, etc.

In the present invention, the above-mentioned materials can be used, but among these materials, since the magnetocrystalline anisotropy or shape magnetic anisotropy is large, it is difficult to express magnetic anisotropy in the direction perpendicular to the substrate. It is more desirable to use Fe or Go or an alloy thereof as the main component, and most preferably to use Fe or Go or an alloy of both in a weight ratio of 75 or more.

Substrates that can be used in the present invention include, but are not particularly limited to, aluminum and copper.

Examples include metals such as iron and stainless steel, and organic polymer materials such as plastic films. In particular, when processability, moldability, and flexibility are important, organic polymer materials are suitable, including polyesters such as polyethylene terephthalate, polyethylene naphthalate, and polyethylene dicarboxylate, polyethylene, polyglobylene, and polybutene. polyolefin, polymethyl methacrylate, polycarbonate, polysulfone, polyamide, aromatic polyamide, polyphenylene sulfide, polyphenylene oxide, polyamideimide, polyimide, polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride.

Polytetrafluoroethylene, cellulose acetate.

Methyl cellulose, ethyl cellulose, epoxy resin,
Urethane resins, mixtures thereof, copolymers, etc. are suitable. In particular, biaxially stretched films and sheets are most suitable because of their excellent flatness and one-dimensional stability, and among them, polyester, polyphenylene sulfide, aromatic polyamide, etc. are most suitable. The shape of the base body may be a drum shape, a disk shape, a sheet shape, a tape shape, a card shape, etc., and the thickness is not particularly limited.

Processability for sheets, tapes, cards, etc.

In terms of dimensional stability, the thickness is 2μ to 500μ, especially 4μ.
A range of ~200μ is preferred.

9. Prior to the formation of the magnetic recording layer described in the next section, the substrate used in the present invention is prepared to facilitate adhesion, improve flatness, 9. be colored, prevent static electricity, etc.
Various surface treatments and pre-treatments may be performed for the purpose of imparting wear resistance and the like.

The vacuum evaporation methods described in the present invention include resistance heating evaporation, induction heating evaporation, electron beam evaporation, ion blating,
Any vacuum evaporation method such as ion beam evaporation, laser beam evaporation, or arc discharge evaporation can be used, but it is important to improve magnetic properties such as coercive force and anisotropic magnetic field, and to achieve a high evaporation rate. Methods such as electron beam evaporation and ion blating are suitable for obtaining this, and electron beam evaporation is most suitable from industrial viewpoints such as operability and mass productivity. .

Next, an example of the manufacturing method of the present invention will be explained based on the drawings. FIG. 1 shows an example of an electron beam evaporation apparatus for carrying out the manufacturing method of the present invention. In FIG. 1, the substrate supply device 1. Nip roll 2. Substrate cooling drum 3. Nip roll 4. The substrate winding device 5 constitutes a running system for a long film 6 made of an organic polymer. An organic polymer film 6 wound into a roll is placed on the substrate supply device 1 . Film 6 is nip roll 2. After passing through the substrate cooling drum 3 and the nip roll 4, the substrate is wound onto a winding core disposed in a substrate winding device 5. The substrate cooling drum 6 has a cooling function (not shown) by, for example, passing water 9 so as to keep the back surface of the organic polymer film 6 at 50° C. or lower.

Reference numeral 14 denotes a partition wall that divides the vacuum chamber 10 into an upper tank 15 and a lower tank 16, and the central portion of the partition wall 14 is as shown in the figure.

A side wall portion 20 of a predetermined length is formed by being bent toward the lower tank near the drum, and both ends of the S shield plate 7 are connected to the tip of the side wall portion 20.

The upper tank 15 and the lower tank 16 are each exhausted from exhaust ports 11.12. The shield plate 7 is for restricting the incident angle of the evaporated vapor flow, and has an opening 17 in the center for the evaporated vapor inflow and injection.
is formed. Here, the incident angle is the angle θ formed by the evaporated vapor stream incident on the substrate surface C and the normal B to the substrate surface C in FIG. Of the evaporated vapor flow, the angle of incidence is 45
The shielding plate 7 is preferably arranged so that the evaporated vapor flow is not incident on the substrate surface beyond a selected angle of less than or equal to .degree.

The evaporated vapor flow not restricted by the shielding plate 7, ie the vertically incident component, enters the substrate through the opening 17. 8 is an electron beam evaporator, and 9 is a ferromagnetic metal.

Reference numerals 19A and 19B surrounded by the side wall portion 20, the shielding plate 7, and the lower end side peripheral surface of the substrate cooling drum are gas supply chambers.

In order to increase the sealing efficiency of the gas supply chambers 19A and 19B, it is desirable that the central bent portion of the partition wall 14, that is, the upper end of the side wall portion 20, be placed in close contact with the substrate cooling drum surface as shown in the figure. It is desirable that the gas introduced into the deposition atmosphere be as close as possible to the lower surface of the cooling drum.
- Through the gas supply pipes 18A and IBB, the gas is introduced into the gas supply chambers 19A and 19B. The gas control pulps 13A and 13B have the function of detecting and controlling the gas flow rate.

Although the above apparatus is used to form a perpendicular magnetic recording medium according to the manufacturing method of the present invention, the present invention is not limited to the above apparatus.

A long film made of an organic polymer material, such as a polyethylene terephthalate film, is disposed in the long film running system of the vapor deposition apparatus shown in FIG.

With the ferromagnetic metal placed in the recess of the electron beam evaporator 8, the vacuum chamber 10 is evacuated from the exhaust ports 11 and 12, respectively. The upper tank 15 has a pressure of 5 x 10 Torr or less, and the gas supply chambers 19A and 19B have a pressure of 5
The air is exhausted from the exhaust ports 11 and 12 until the pressure is below x 10 Torr. Next, a gas with low chemical activity is introduced into the gas flow rate control pulp 13A and the inlet pipe 1.
8A to the gas supply chamber 19A located on the upstream side in the direction of movement of the substrate, and at the same time, gas containing oxygen is introduced from the gas flow rate control pulp 13B to the gas supply chamber 19B located on the downstream side in the direction of movement of the substrate via the introduction pipe 18B. to be introduced.

As mentioned above, a gas with low chemical activity is supplied to the formation region of the magnetic recording layer through the gas supply chamber located upstream in the direction of substrate movement, and at the same time, a gas containing oxygen is supplied downstream in the direction of substrate movement. The gas is supplied to the formation region of the magnetic recording layer through the gas supply chamber. At this time, the gas flow rate control pulps 13A-13B are used to adjust the pressure in the gas supply chambers 19A and 19B to a predetermined pressure.

After achieving this state, the polyethylene terephthalate film as a substrate is run, and a ferromagnetic metal is melted and evaporated on the film by electron beam evaporation to continuously form a magnetic recording layer having magnetic anisotropy in the perpendicular direction. It is something.

As described above, a gas with low chemical activity is introduced from the upstream side in the direction of movement of the substrate, and a gas containing oxygen is introduced from the downstream side in the direction of movement of the substrate, and the perpendicular magnetic recording layer formation area is supplied immediately. is an important requirement of the present invention.

The gas introduced from the downstream side with respect to the direction of movement of the substrate is a gas containing oxygen, and may be a mixed gas of oxygen and a gas with low chemical activity, preferably containing mainly oxygen, and most preferably introducing only oxygen.

A gas containing a chemically less active gas and oxygen is introduced, and the pressure in the gas supply chamber is I x 10 Torr ~ 5 Torr.
A range of x 10 Torr is desirable, and outside this range, on the low pressure side, the anisotropic magnetic field decreases, and on the high pressure side, the evaporation rate decreases and the vertical coercive force also decreases.

In order to further improve the magnetic properties and obtain a fast evaporation rate, the pressure in the gas supply chamber must be between 2x10 Torr and 2x10 Torr.
A range of Torr is desirable.

Further, the flow rate ratio of oxygen gas and gas other than oxygen gas introduced into the vacuum chamber is preferably in the range of 90/10 to 15/85. If the flow rate of oxygen gas exceeds the above range, the oxygen gas will be subjected to a violent getter action, causing the pressure inside the tank to fluctuate and the magnetic properties to become unstable.Furthermore, cracks will occur on the surface of the magnetic recording layer that has been formed, causing vertical Coercive force and anisotropy field also decrease.

On the other hand, if it deviates from the above range and the flow rate of gases other than oxygen increases.

This is undesirable because it slows down the evaporation rate.

The thickness of the magnetic recording layer obtained by the manufacturing method of the present invention is not particularly limited, but it is practically 0.02 μm.
WI ~5μm range, flexible.

When considering the contact with the magnetic head and the deposition rate of the magnetic recording layer, a range of 0.05 μm to 2.0 μm is desirable.

[Effect]

According to the manufacturing method of the present invention, the pressure near the magnetic recording layer formation region is increased by introducing a gas with low chemical activity from the upstream side in the direction of movement of the substrate.

By promoting the initial growth of columnar structured grains and thereby improving the magnetic properties in the vertical direction, - by introducing a gas containing oxygen from the downstream side in the direction of movement of the force difference body.

Increases the degree of oxidation near the surface layer of the magnetic recording layer that is being formed,
Therefore, it is thought that it contributes to improving the corrosion resistance and wear resistance of the magnetic recording layer.

[Measurement method and evaluation criteria of characteristics]

(1) Method for measuring coercive force and anisotropic magnetic field The magnetic properties of the magnetic recording layer can be measured by the vibrating sample magnetometer method specified in TIS C-2561 or the self-recording magnetometer method. The method of measuring magnetic properties using a vibrating sample magnetometer (manufactured by Riken Denshi, Bl (V-30) will be explained with reference to FIG. 3.

In FIG. 3, 0 indicates the origin, the vertical axis indicates the amount of magnetization (CM) of the magnetized magnetic recording layer, and the horizontal axis indicates the external magnetic field (H) applied to the magnetic recording layer.

An external magnetic field (H
) is applied constantly increasing in one direction, the external magnetic field (
As H) increases, the amount of magnetization (M) increases as indicated by the broken line arrow. When the external magnetic field (H) exceeds a certain value, even if the external magnetic field (H) is increased further, the magnetization amount CM) is saturated and will not increase any further. Point D in FIG. 3 is this point. The amount of magnetization CM at point D is changed to the saturation magnetization (M8
). Furthermore, starting from point D, when the external magnetic field (A) is decreased as indicated by the solid arrow, the magnetization amount CM) also begins to decrease. Even if the external magnetic field (H) is set to 0, the amount of magnetization (M) does not become 0 but remains the value of residual magnetization (Mr).

When the external magnetic field (H) is further increased in the negative direction beyond 0, the magnetization amount CM) becomes 0. The external magnetic field at this time (
The strength of H) is called the coercive force (Ha). When the external magnetic field (H) is further increased in the negative direction, the magnetization amount CM) is saturated at a certain value. This value is negative saturation magnetization (point E in Figure 3).

Furthermore, when starting from point E and starting to apply the external magnetic field (H) again in the positive direction, the magnetization amount CM) begins to increase again in the positive direction as shown by the solid arrow, and the residual magnetization point in the negative direction (-Mr
), the magnetization amount (M) becomes 0 and returns to the initial positive saturation magnetization point (third magnetization point).

The curve obtained as described above is called a hysteresis loop, and the coercive force (Ha) is obtained by this hysteresis loop. Using a vibrating sample magnetometer, we record the hysteresis loops when an external magnetic field is applied perpendicularly and parallelly to the substrate surface to obtain the perpendicular coercive force and parallel coercive force.

Next, a method for measuring the anisotropic magnetic field will be explained.

There is an anisotropic magnetic field (Hk) as an index of the perpendicular magnetic anisotropy of a perpendicular magnetic recording medium, and the larger this value is, the better the perpendicular magnetic recording medium can be magnetized in the perpendicular direction. The method for measuring the anisotropic magnetic field (Hk) will be explained with reference to FIG. In FIG. 4, 0 indicates the origin, the vertical axis indicates the amount of magnetization (CM) of the magnetized magnetic recording layer, and the horizontal axis indicates the external magnetic field (H) applied to the magnetic recording layer. Fourth
The figure shows a hysteresis loop when an external magnetic field is applied in parallel to the surface of the magnetic recording layer used as a sample. The value of the external magnetic field (H) at the intersection point P of the tangent drawn from the origin 0 to the hysteresis loop and the straight line drawn parallel to the external magnetic field axis (H) passing through the positive saturation magnetization point is the anisotropic magnetic field ( Hk).

In addition, external magnetic field (H), coercive force (Ha), anisotropic magnetic field (
The unit of Hk) is Oe.

(2) Method for measuring the pressure in the gas supply chamber The pressure measurement position in the gas supply chamber can be anywhere inside the gas supply chamber since the gas supply chamber has a nearly hermetically sealed structure, but The pressure probe was placed as close to the substrate surface as possible without interfering with the formation of the magnetic recording layer. A diaphragm-type vacuum gauge, which is not affected by the adverse effects of oxygen gas, was used for pressure measurement.

(3) Control of flow rate of introduced gas and measurement of flow rate The flow rate of gas introduced into the vacuum chamber was controlled by a combination of a mass flow meter and a gas flow rate control valve. Specifically, 1 mass flow controller (SEC series) manufactured by Estes
It was used.

(4) Moisture resistance test method A magnetic recording medium is cut out to a size of 30 x 30 mm and used as a test sample. The sample is left in an atmosphere of 60° C. and 90% RH for one week, and the state of corrosion of the magnetic recording layer is visually determined. Corrosion refers to discoloration, rust, blistering, and peeling of the magnetic recording layer. In addition, in Table 1 in Examples and Comparative Examples, cases where the above corrosion is completely severe are indicated by ○, and cases where corrosion has occurred but is less than 1/2 of the total area of the sample are indicated by Δ, and those exceeding 1 tooth are indicated by ×. did.

(5) Wear resistance test method A test sample is punched out in the shape of a 5.25-inch floppy disk, coated with a fluorocarbon lubricant to a thickness of about 20 OA, and placed in a jacket.

The above items were combined with a floppy disk durability tester (model '5K-429B' manufactured by Tokyo Engineering Corporation) and a commercially available floppy disk drive (manufactured by Kishita Tsushin Kogyo Corporation 'JA5').
51'') and run the same truck 100,000 times.

Wear resistance was determined by the presence or absence of permeability of the magnetic recording layer after running 100,000 times.

The head used in the above test was button-shaped, and the head load was about 15 g. The rotational speed of the floppy disk is 600 revolutions per minute.

In Table 1 of Examples and Comparative Examples, regarding the results of the above tests, those in which no transmission scratches were observed are indicated by ◯, and those in which transmission scratches were observed are indicated by X.

〔Example〕

An embodiment of the manufacturing method of the present invention will be described below based on Examples.

Examples 1-6. Comparative examples 1 to 8 Upper tank pressure of the electron beam evaporation apparatus shown in FIG.

Evacuate the gas supply chamber pressure until it becomes 5 x 10 Torr or less and 5 x iQ Torr or less.9
Next, a gas with less chemical activity is introduced from the upstream side in the direction of movement of the substrate, and at the same time a gas containing oxygen is introduced from the downstream side, and a biaxially stretched polyethylene terephthalate film with a thickness of 50 μm is passed at a predetermined running speed. The magnetic recording layer is continuously formed on the film by melting and vaporizing the ferromagnetic metal by electron beam evaporation. A shielding plate with an opening is provided inside the electron beam evaporation apparatus so that the incident angle of the evaporated vapor flow is 26" or less, and a cooling drum is provided so that the back surface of the polyethylene terephthalate film is kept at 50° C. or less. The electron beam evaporator used was model EGL-110 manufactured by Japan Vacuum Technology Co., Ltd., and the power source for the electron beam evaporator was HP-1610F manufactured by Nippon Vacuum Technology Co., Ltd. A vapor-deposited metal with a purity of 999% or higher was used.

By the above-mentioned manufacturing method, the gas introduced from the upstream side and the gas introduced from the downstream side with respect to the direction of movement of the evaporated metal and the substrate, and the flow rate ratio of the two gases (gas flow rate introduced from the upstream side / gas introduced from the downstream side) A magnetic recording layer was formed by changing the flow rate), the pressure near the substrate, etc. as shown in Table 1. The obtained magnetic recording media are referred to as Examples 1 to 6. In Examples 1 to 6, the gas introduced from the downstream side was either oxygen alone or a mixed gas containing oxygen.

Using the electron beam evaporation equipment used in Examples 1 to B,
A gas with low chemical activity was introduced from the downstream side in the direction of movement of the substrate, or a gas with a thickness of 50 μm was produced using the same manufacturing method as described in Examples 1 to 6, except that no gas was supplied.
A magnetic recording layer was continuously formed on the biaxially stretched polyethylene terephthalate film.

The obtained magnetic recording media are referred to as Comparative Examples 1 to 6.

Table 1 also shows the vapor deposited metal, introduced gas, flow rate ratio, pressure near the substrate, etc. of Comparative Examples 1 to 6.

The thickness of the magnetic recording layer was adjusted to 2,000 to 3,000 Å by changing the running speed of the polyethylene terephthalate film that was the base. Further, Examples 1 to 6. The power input to the electron beam evaporator in Comparative Examples 1 to 6 was constant at 4 kW.

Examples 1 to 6 and Comparative Example 1 obtained as above
~Tables also include the results of perpendicular coercive force, anisotropic magnetic field, moisture resistance test, and abrasion resistance test for the magnetic recording medium in Part B.
They are all shown in 1.

As is clear from the results shown in Table 1, the magnetic recording media of Examples 1 to 6 formed by the manufacturing method of the present invention all have excellent magnetic properties in the perpendicular direction.

It was also a perpendicular magnetic recording medium with excellent moisture resistance and i4 abrasion resistance.

On the other hand, among Comparative Examples 1 to 6 in which oxygen gas was not introduced from the downstream side with respect to the substrate movement direction, Comparative Examples 1 to 4 in which Co was used as the vapor deposition material suffered corrosion in a short period of time in an atmosphere of 60°C and 90% RH. Comparative Examples 5 and 6 in which re was used as the vapor deposition material had a drawback in abrasion resistance.

All of Comparative Examples 1 to 6 were difficult to put to practical use as perpendicular magnetic recording media in terms of durability.

[Brief explanation of drawings]

Fig. 1 is a schematic diagram showing an example of an electron beam evaporation apparatus for carrying out the manufacturing method of the present invention, Fig. 2 is an explanatory diagram of the incident angle of the evaporated vapor flow, and Fig. 3 is an illustration of the coercive force of the magnetic recording layer. FIG. 4 is a schematic diagram showing a measurement example of a hysteresis loop that detects the anisotropic magnetic field of a magnetic recording layer. 1: Substrate supply device 3: Substrate cooling drum 5: Substrate winding device 6: Organic polymer film 7: Shielding plate
8: Electron beam evaporator 9 Two ferromagnetic metals 1
0: Vacuum chamber 11: Exhaust port 12: Exhaust port 13A, 13B
: Dregs flow rate control pulp 18A, 18B
: Gas supply pipes 19A, 19B : Gas supply chamber A: Evaporated vapor flow B: Normal line to the substrate surface C: Substrate surface θ: Incident angle 0: Origin M: Rinka H: External magnetic field Hk: Anisotropy Sexual magnetic field patent applicant
Higashishi Co., Ltd. Pth

Claims (1)

[Claims] (1) A vapor deposition device equipped with a running system consisting of a long substrate supply device, a substrate cooling drum, and a substrate winding device is provided inside the vacuum container, and a gas with low chemical activity and oxygen is contained in the vacuum atmosphere of the vacuum container. When forming a perpendicular magnetic recording layer on a running elongated substrate by vacuum evaporation using a ferromagnetic metal as an evaporation material while introducing a gas containing introduced,
A method for manufacturing a perpendicular magnetic recording medium, characterized in that the gas containing oxygen is introduced from the downstream side in the direction of movement of the substrate and supplied to a perpendicular magnetic recording layer forming region.