JPS61208275A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS61208275A JPS61208275A JP60048839A JP4883985A JPS61208275A JP S61208275 A JPS61208275 A JP S61208275A JP 60048839 A JP60048839 A JP 60048839A JP 4883985 A JP4883985 A JP 4883985A JP S61208275 A JPS61208275 A JP S61208275A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- pedestal
- recessed section
- view
- bridge circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60048839A JPS61208275A (ja) | 1985-03-12 | 1985-03-12 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60048839A JPS61208275A (ja) | 1985-03-12 | 1985-03-12 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61208275A true JPS61208275A (ja) | 1986-09-16 |
JPH0562829B2 JPH0562829B2 (enrdf_load_stackoverflow) | 1993-09-09 |
Family
ID=12814413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60048839A Granted JPS61208275A (ja) | 1985-03-12 | 1985-03-12 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61208275A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6378577A (ja) * | 1986-09-22 | 1988-04-08 | Nippon Denso Co Ltd | 半導体式加速度センサ |
-
1985
- 1985-03-12 JP JP60048839A patent/JPS61208275A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6378577A (ja) * | 1986-09-22 | 1988-04-08 | Nippon Denso Co Ltd | 半導体式加速度センサ |
Also Published As
Publication number | Publication date |
---|---|
JPH0562829B2 (enrdf_load_stackoverflow) | 1993-09-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2517467B2 (ja) | 静電容量式圧力センサ | |
JPS62191730A (ja) | 圧力センサ | |
JP2575939B2 (ja) | 半導体加速度センサ | |
CN117800279A (zh) | 一种mems压敏芯片及其制备方法 | |
JPH0577304B2 (enrdf_load_stackoverflow) | ||
JP2822486B2 (ja) | 感歪センサおよびその製造方法 | |
JP2000267803A (ja) | ポインティング装置 | |
JPS61208275A (ja) | 半導体装置 | |
US6308575B1 (en) | Manufacturing method for the miniaturization of silicon bulk-machined pressure sensors | |
JPH0562828B2 (enrdf_load_stackoverflow) | ||
JPH01236659A (ja) | 半導体圧力センサ | |
JPH0562827B2 (enrdf_load_stackoverflow) | ||
JPS63113326A (ja) | 触覚センサ | |
JPS63214631A (ja) | 圧覚センサ | |
JPS5983023A (ja) | 半導体圧力差圧検出器 | |
JPS61224465A (ja) | 力センサ及びその製造方法 | |
JPH0554053B2 (enrdf_load_stackoverflow) | ||
JPS61139758A (ja) | 半導体加速度センサ | |
JPS63226073A (ja) | 力検出装置 | |
JPH01201103A (ja) | 接触検出装置 | |
JPS6381274A (ja) | 加速度センサ | |
JPH0786619A (ja) | 歪みゲージとその製造方法 | |
JPS629243A (ja) | 半導体触覚センサ | |
JPH05102283A (ja) | セルフテスト機能付加速度センサ | |
JP3120388B2 (ja) | 半導体圧力変換器 |