JPS61208275A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS61208275A
JPS61208275A JP60048839A JP4883985A JPS61208275A JP S61208275 A JPS61208275 A JP S61208275A JP 60048839 A JP60048839 A JP 60048839A JP 4883985 A JP4883985 A JP 4883985A JP S61208275 A JPS61208275 A JP S61208275A
Authority
JP
Japan
Prior art keywords
semiconductor device
pedestal
recessed section
view
bridge circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60048839A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0562829B2 (enrdf_load_stackoverflow
Inventor
Kohei Higuchi
行平 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60048839A priority Critical patent/JPS61208275A/ja
Publication of JPS61208275A publication Critical patent/JPS61208275A/ja
Publication of JPH0562829B2 publication Critical patent/JPH0562829B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP60048839A 1985-03-12 1985-03-12 半導体装置 Granted JPS61208275A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60048839A JPS61208275A (ja) 1985-03-12 1985-03-12 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60048839A JPS61208275A (ja) 1985-03-12 1985-03-12 半導体装置

Publications (2)

Publication Number Publication Date
JPS61208275A true JPS61208275A (ja) 1986-09-16
JPH0562829B2 JPH0562829B2 (enrdf_load_stackoverflow) 1993-09-09

Family

ID=12814413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60048839A Granted JPS61208275A (ja) 1985-03-12 1985-03-12 半導体装置

Country Status (1)

Country Link
JP (1) JPS61208275A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6378577A (ja) * 1986-09-22 1988-04-08 Nippon Denso Co Ltd 半導体式加速度センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6378577A (ja) * 1986-09-22 1988-04-08 Nippon Denso Co Ltd 半導体式加速度センサ

Also Published As

Publication number Publication date
JPH0562829B2 (enrdf_load_stackoverflow) 1993-09-09

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