JPS61208275A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS61208275A JPS61208275A JP60048839A JP4883985A JPS61208275A JP S61208275 A JPS61208275 A JP S61208275A JP 60048839 A JP60048839 A JP 60048839A JP 4883985 A JP4883985 A JP 4883985A JP S61208275 A JPS61208275 A JP S61208275A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- pedestal
- recessed section
- view
- bridge circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60048839A JPS61208275A (ja) | 1985-03-12 | 1985-03-12 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60048839A JPS61208275A (ja) | 1985-03-12 | 1985-03-12 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61208275A true JPS61208275A (ja) | 1986-09-16 |
| JPH0562829B2 JPH0562829B2 (enrdf_load_stackoverflow) | 1993-09-09 |
Family
ID=12814413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60048839A Granted JPS61208275A (ja) | 1985-03-12 | 1985-03-12 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61208275A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6378577A (ja) * | 1986-09-22 | 1988-04-08 | Nippon Denso Co Ltd | 半導体式加速度センサ |
-
1985
- 1985-03-12 JP JP60048839A patent/JPS61208275A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6378577A (ja) * | 1986-09-22 | 1988-04-08 | Nippon Denso Co Ltd | 半導体式加速度センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0562829B2 (enrdf_load_stackoverflow) | 1993-09-09 |
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