JPH0562828B2 - - Google Patents

Info

Publication number
JPH0562828B2
JPH0562828B2 JP60048838A JP4883885A JPH0562828B2 JP H0562828 B2 JPH0562828 B2 JP H0562828B2 JP 60048838 A JP60048838 A JP 60048838A JP 4883885 A JP4883885 A JP 4883885A JP H0562828 B2 JPH0562828 B2 JP H0562828B2
Authority
JP
Japan
Prior art keywords
semiconductor device
silicon substrate
bridge circuit
view
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60048838A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61208274A (ja
Inventor
Kohei Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60048838A priority Critical patent/JPS61208274A/ja
Publication of JPS61208274A publication Critical patent/JPS61208274A/ja
Publication of JPH0562828B2 publication Critical patent/JPH0562828B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP60048838A 1985-03-12 1985-03-12 半導体装置 Granted JPS61208274A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60048838A JPS61208274A (ja) 1985-03-12 1985-03-12 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60048838A JPS61208274A (ja) 1985-03-12 1985-03-12 半導体装置

Publications (2)

Publication Number Publication Date
JPS61208274A JPS61208274A (ja) 1986-09-16
JPH0562828B2 true JPH0562828B2 (enrdf_load_stackoverflow) 1993-09-09

Family

ID=12814384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60048838A Granted JPS61208274A (ja) 1985-03-12 1985-03-12 半導体装置

Country Status (1)

Country Link
JP (1) JPS61208274A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07114288B2 (ja) * 1989-09-26 1995-12-06 株式会社豊田中央研究所 半導体歪測定装置

Also Published As

Publication number Publication date
JPS61208274A (ja) 1986-09-16

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