JPS61202111A - 位置変化検出装置 - Google Patents

位置変化検出装置

Info

Publication number
JPS61202111A
JPS61202111A JP4274185A JP4274185A JPS61202111A JP S61202111 A JPS61202111 A JP S61202111A JP 4274185 A JP4274185 A JP 4274185A JP 4274185 A JP4274185 A JP 4274185A JP S61202111 A JPS61202111 A JP S61202111A
Authority
JP
Japan
Prior art keywords
movable mirror
stage
movable
reflective surface
position change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4274185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0562683B2 (enrdf_load_stackoverflow
Inventor
Kunihiro Nakano
中野　邦博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP4274185A priority Critical patent/JPS61202111A/ja
Publication of JPS61202111A publication Critical patent/JPS61202111A/ja
Publication of JPH0562683B2 publication Critical patent/JPH0562683B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP4274185A 1985-03-06 1985-03-06 位置変化検出装置 Granted JPS61202111A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4274185A JPS61202111A (ja) 1985-03-06 1985-03-06 位置変化検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4274185A JPS61202111A (ja) 1985-03-06 1985-03-06 位置変化検出装置

Publications (2)

Publication Number Publication Date
JPS61202111A true JPS61202111A (ja) 1986-09-06
JPH0562683B2 JPH0562683B2 (enrdf_load_stackoverflow) 1993-09-09

Family

ID=12644442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4274185A Granted JPS61202111A (ja) 1985-03-06 1985-03-06 位置変化検出装置

Country Status (1)

Country Link
JP (1) JPS61202111A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5428473A (en) * 1992-04-06 1995-06-27 Matsushita Electric Industrial Co., Ltd. Mirror driving apparatus for optical disk drive
EP0712121A3 (en) * 1994-11-10 1996-12-27 Toshiba Kk Galvanomirroir and optical disk drive apparatus using such a mirror
JP2022504734A (ja) * 2018-10-12 2022-01-13 マジック リープ， インコーポレイテッド 運動追跡システムの正確度を検証するためのステージングシステム

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5428473A (en) * 1992-04-06 1995-06-27 Matsushita Electric Industrial Co., Ltd. Mirror driving apparatus for optical disk drive
EP0712121A3 (en) * 1994-11-10 1996-12-27 Toshiba Kk Galvanomirroir and optical disk drive apparatus using such a mirror
JP2022504734A (ja) * 2018-10-12 2022-01-13 マジック リープ， インコーポレイテッド 運動追跡システムの正確度を検証するためのステージングシステム

Also Published As

Publication number Publication date
JPH0562683B2 (enrdf_load_stackoverflow) 1993-09-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term