JPH0562683B2 - - Google Patents
Info
- Publication number
- JPH0562683B2 JPH0562683B2 JP4274185A JP4274185A JPH0562683B2 JP H0562683 B2 JPH0562683 B2 JP H0562683B2 JP 4274185 A JP4274185 A JP 4274185A JP 4274185 A JP4274185 A JP 4274185A JP H0562683 B2 JPH0562683 B2 JP H0562683B2
- Authority
- JP
- Japan
- Prior art keywords
- amount
- movable
- optical member
- detecting
- reflective surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 25
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 26
- 239000010408 film Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- 239000004020 conductor Substances 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4274185A JPS61202111A (ja) | 1985-03-06 | 1985-03-06 | 位置変化検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4274185A JPS61202111A (ja) | 1985-03-06 | 1985-03-06 | 位置変化検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61202111A JPS61202111A (ja) | 1986-09-06 |
| JPH0562683B2 true JPH0562683B2 (enrdf_load_stackoverflow) | 1993-09-09 |
Family
ID=12644442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4274185A Granted JPS61202111A (ja) | 1985-03-06 | 1985-03-06 | 位置変化検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202111A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2950011B2 (ja) * | 1992-04-06 | 1999-09-20 | 松下電器産業株式会社 | ミラー駆動装置 |
| US5737302A (en) * | 1994-11-10 | 1998-04-07 | Kabushiki Kaisha Toshiba | Galvanomirror and optical disk drive using the same |
| CN113056229B (zh) * | 2018-10-12 | 2024-06-11 | 奇跃公司 | 用于验证运动跟踪系统的准确性的工作台系统 |
-
1985
- 1985-03-06 JP JP4274185A patent/JPS61202111A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61202111A (ja) | 1986-09-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |