JPS61195549A - 電子ビーム処理装置のための大電力用窓 - Google Patents
電子ビーム処理装置のための大電力用窓Info
- Publication number
- JPS61195549A JPS61195549A JP61040158A JP4015886A JPS61195549A JP S61195549 A JPS61195549 A JP S61195549A JP 61040158 A JP61040158 A JP 61040158A JP 4015886 A JP4015886 A JP 4015886A JP S61195549 A JPS61195549 A JP S61195549A
- Authority
- JP
- Japan
- Prior art keywords
- window
- high power
- foil
- power window
- fin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 29
- 239000011888 foil Substances 0.000 claims abstract description 50
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 230000008901 benefit Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- IUYOGGFTLHZHEG-UHFFFAOYSA-N copper titanium Chemical compound [Ti].[Cu] IUYOGGFTLHZHEG-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- ALKZAGKDWUSJED-UHFFFAOYSA-N dinuclear copper ion Chemical compound [Cu].[Cu] ALKZAGKDWUSJED-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
- H01J33/02—Details
- H01J33/04—Windows
Landscapes
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Electron Sources, Ion Sources (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Refuse-Collection Vehicles (AREA)
- Nitrogen Condensed Heterocyclic Rings (AREA)
- Paper (AREA)
- Particle Accelerators (AREA)
- X-Ray Techniques (AREA)
- Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US705020 | 1985-02-25 | ||
| US06/705,020 US4591756A (en) | 1985-02-25 | 1985-02-25 | High power window and support structure for electron beam processors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61195549A true JPS61195549A (ja) | 1986-08-29 |
| JPH0574899B2 JPH0574899B2 (https=) | 1993-10-19 |
Family
ID=24831733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61040158A Granted JPS61195549A (ja) | 1985-02-25 | 1986-02-25 | 電子ビーム処理装置のための大電力用窓 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US4591756A (https=) |
| EP (1) | EP0195153B1 (https=) |
| JP (1) | JPS61195549A (https=) |
| CN (1) | CN85108631B (https=) |
| AT (1) | ATE43752T1 (https=) |
| CA (1) | CA1229648A (https=) |
| DE (1) | DE3570802D1 (https=) |
| FI (1) | FI81477C (https=) |
| IL (1) | IL75535A0 (https=) |
| IN (1) | IN163830B (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013519085A (ja) * | 2010-02-08 | 2013-05-23 | テトラ ラバル ホールデイングス エ フイナンス ソシエテ アノニム | 金属箔の皺を減らすための組立体及び方法 |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4801071A (en) * | 1987-02-05 | 1989-01-31 | The United States Of America As Represented By The Secretary Of The Air Force | Method for soldering and contouring foil E-beam windows |
| US4933557A (en) * | 1988-06-06 | 1990-06-12 | Brigham Young University | Radiation detector window structure and method of manufacturing thereof |
| FI88226C (fi) * | 1990-05-24 | 1993-04-13 | Tampella Oy Ab | Foerfarande foer styrning av en elektronstraole i en elektronaccelerator samt en elektronaccelerator |
| JPH052100A (ja) * | 1990-10-12 | 1993-01-08 | Toshiba Corp | 電子ビーム照射装置および電子ビーム透過膜の製造方法 |
| DE4219562C1 (https=) * | 1992-06-15 | 1993-07-15 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
| US5478266A (en) * | 1993-04-12 | 1995-12-26 | Charged Injection Corporation | Beam window devices and methods of making same |
| US5391958A (en) * | 1993-04-12 | 1995-02-21 | Charged Injection Corporation | Electron beam window devices and methods of making same |
| DE4438407C2 (de) * | 1994-10-27 | 1996-09-19 | Andreas Dr Rer Nat Ulrich | VUV-Lampe |
| DE19518623C2 (de) * | 1995-05-24 | 2002-12-05 | Igm Robotersysteme Ag Wiener N | Vorrichtung zum Bestrahlen von Oberflächen mit Elektronen |
| US5801387A (en) * | 1996-03-28 | 1998-09-01 | Electron Processing Systems, Inc. | Method of and apparatus for the electron beam treatment of powders and aggregates in pneumatic transfer |
| US6052401A (en) | 1996-06-12 | 2000-04-18 | Rutgers, The State University | Electron beam irradiation of gases and light source using the same |
| JP2001221899A (ja) * | 2000-02-07 | 2001-08-17 | Ebara Corp | 電子線照射装置 |
| US20020135290A1 (en) | 2001-03-21 | 2002-09-26 | Advanced Electron Beams, Inc. | Electron beam emitter |
| US7265367B2 (en) | 2001-03-21 | 2007-09-04 | Advanced Electron Beams, Inc. | Electron beam emitter |
| JP2010509709A (ja) * | 2006-10-24 | 2010-03-25 | ビー・ナノ・リミテッド | インターフェース、非真空環境内で物体を観察する方法、および走査型電子顕微鏡 |
| US7709820B2 (en) * | 2007-06-01 | 2010-05-04 | Moxtek, Inc. | Radiation window with coated silicon support structure |
| US7737424B2 (en) * | 2007-06-01 | 2010-06-15 | Moxtek, Inc. | X-ray window with grid structure |
| US20110121179A1 (en) * | 2007-06-01 | 2011-05-26 | Liddiard Steven D | X-ray window with beryllium support structure |
| US20080296479A1 (en) * | 2007-06-01 | 2008-12-04 | Anderson Eric C | Polymer X-Ray Window with Diamond Support Structure |
| KR20100037615A (ko) * | 2007-07-09 | 2010-04-09 | 브라이엄 영 유니버시티 | 대전된 분자 조작을 위한 방법 및 이를 위한 장치 |
| US9305735B2 (en) | 2007-09-28 | 2016-04-05 | Brigham Young University | Reinforced polymer x-ray window |
| US20100285271A1 (en) * | 2007-09-28 | 2010-11-11 | Davis Robert C | Carbon nanotube assembly |
| US8498381B2 (en) | 2010-10-07 | 2013-07-30 | Moxtek, Inc. | Polymer layer on X-ray window |
| EP2195860A4 (en) * | 2007-09-28 | 2010-11-24 | Univ Brigham Young | X-RAY WINDOW WITH CARBON NANOTUBE FRAME |
| US8981294B2 (en) | 2008-07-03 | 2015-03-17 | B-Nano Ltd. | Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment |
| SE533567C2 (sv) | 2009-03-11 | 2010-10-26 | Tetra Laval Holdings & Finance | Förfarande för montering av ett fönster för utgående elektroner och en fönsterenhet för utgående elektroner |
| US20100239828A1 (en) * | 2009-03-19 | 2010-09-23 | Cornaby Sterling W | Resistively heated small planar filament |
| US8247971B1 (en) | 2009-03-19 | 2012-08-21 | Moxtek, Inc. | Resistively heated small planar filament |
| US7983394B2 (en) * | 2009-12-17 | 2011-07-19 | Moxtek, Inc. | Multiple wavelength X-ray source |
| MX2012008598A (es) | 2010-02-08 | 2012-08-15 | Tetra Laval Holdings & Finance | Ensamblaje y metodo para reducir arrugas en una lamina metalica en un arreglo circular. |
| US8526574B2 (en) | 2010-09-24 | 2013-09-03 | Moxtek, Inc. | Capacitor AC power coupling across high DC voltage differential |
| US8804910B1 (en) | 2011-01-24 | 2014-08-12 | Moxtek, Inc. | Reduced power consumption X-ray source |
| US8750458B1 (en) | 2011-02-17 | 2014-06-10 | Moxtek, Inc. | Cold electron number amplifier |
| US8929515B2 (en) | 2011-02-23 | 2015-01-06 | Moxtek, Inc. | Multiple-size support for X-ray window |
| US9076628B2 (en) | 2011-05-16 | 2015-07-07 | Brigham Young University | Variable radius taper x-ray window support structure |
| US8989354B2 (en) | 2011-05-16 | 2015-03-24 | Brigham Young University | Carbon composite support structure |
| US9174412B2 (en) | 2011-05-16 | 2015-11-03 | Brigham Young University | High strength carbon fiber composite wafers for microfabrication |
| US8761344B2 (en) | 2011-12-29 | 2014-06-24 | Moxtek, Inc. | Small x-ray tube with electron beam control optics |
| CN105143866A (zh) | 2013-02-20 | 2015-12-09 | B-纳米股份有限公司 | 扫描电子显微镜 |
| US9173623B2 (en) | 2013-04-19 | 2015-11-03 | Samuel Soonho Lee | X-ray tube and receiver inside mouth |
| US11901153B2 (en) | 2021-03-05 | 2024-02-13 | Pct Ebeam And Integration, Llc | X-ray machine |
| CN113658837B (zh) * | 2021-08-16 | 2022-07-19 | 上海交通大学 | 一种引导自由电子透过固体的方法及固体结构 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2449872A (en) * | 1946-10-04 | 1948-09-21 | Electronized Chemleals Corp | Electron discharge vessel |
| US3440466A (en) * | 1965-09-30 | 1969-04-22 | Ford Motor Co | Window support and heat sink for electron-discharge device |
| US3442466A (en) * | 1966-04-08 | 1969-05-06 | Tenka Automaten Kirschner & Co | Take-up reeling device for safety belts and/or similar appliances |
| US3702412A (en) * | 1971-06-16 | 1972-11-07 | Energy Sciences Inc | Apparatus for and method of producing an energetic electron curtain |
| US3769600A (en) * | 1972-03-24 | 1973-10-30 | Energy Sciences Inc | Method of and apparatus for producing energetic charged particle extended dimension beam curtains and pulse producing structures therefor |
| DE2503499A1 (de) * | 1975-01-29 | 1976-08-05 | Licentia Gmbh | Elektronendurchlaessiges fenster |
| US4100450A (en) * | 1977-02-17 | 1978-07-11 | Energy Sciences Inc. | Method of and apparatus for generating longitudinal strips of energetic electron beams |
| DD138588A1 (de) * | 1978-08-29 | 1979-11-07 | Siegfried Panzer | Elektronenstrahlaustrittsfenster |
| US4362965A (en) * | 1980-12-29 | 1982-12-07 | The United States Of America As Represented By The Secretary Of The Army | Composite/laminated window for electron-beam guns |
-
1985
- 1985-02-25 US US06/705,020 patent/US4591756A/en not_active Expired - Lifetime
- 1985-06-12 CA CA000483772A patent/CA1229648A/en not_active Expired
- 1985-06-14 IN IN475/DEL/85A patent/IN163830B/en unknown
- 1985-06-14 FI FI852384A patent/FI81477C/fi not_active IP Right Cessation
- 1985-06-17 IL IL75535A patent/IL75535A0/xx unknown
- 1985-06-28 EP EP85304632A patent/EP0195153B1/en not_active Expired
- 1985-06-28 DE DE8585304632T patent/DE3570802D1/de not_active Expired
- 1985-06-28 AT AT85304632T patent/ATE43752T1/de not_active IP Right Cessation
- 1985-11-30 CN CN85108631A patent/CN85108631B/zh not_active Expired
-
1986
- 1986-02-25 JP JP61040158A patent/JPS61195549A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013519085A (ja) * | 2010-02-08 | 2013-05-23 | テトラ ラバル ホールデイングス エ フイナンス ソシエテ アノニム | 金属箔の皺を減らすための組立体及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE43752T1 (de) | 1989-06-15 |
| US4591756A (en) | 1986-05-27 |
| JPH0574899B2 (https=) | 1993-10-19 |
| EP0195153A3 (en) | 1987-01-21 |
| EP0195153B1 (en) | 1989-05-31 |
| FI81477B (fi) | 1990-06-29 |
| CN85108631B (zh) | 1988-04-20 |
| FI81477C (fi) | 1990-10-10 |
| IL75535A0 (en) | 1985-10-31 |
| FI852384L (fi) | 1986-08-26 |
| FI852384A0 (fi) | 1985-06-14 |
| DE3570802D1 (en) | 1989-07-06 |
| CA1229648A (en) | 1987-11-24 |
| EP0195153A2 (en) | 1986-09-24 |
| CN85108631A (zh) | 1986-08-20 |
| IN163830B (https=) | 1988-11-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |