JPS61192446U - - Google Patents

Info

Publication number
JPS61192446U
JPS61192446U JP7620385U JP7620385U JPS61192446U JP S61192446 U JPS61192446 U JP S61192446U JP 7620385 U JP7620385 U JP 7620385U JP 7620385 U JP7620385 U JP 7620385U JP S61192446 U JPS61192446 U JP S61192446U
Authority
JP
Japan
Prior art keywords
chamber
gas
etched
introduction pipe
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7620385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH051071Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985076203U priority Critical patent/JPH051071Y2/ja
Publication of JPS61192446U publication Critical patent/JPS61192446U/ja
Application granted granted Critical
Publication of JPH051071Y2 publication Critical patent/JPH051071Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1985076203U 1985-05-22 1985-05-22 Expired - Lifetime JPH051071Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985076203U JPH051071Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-05-22 1985-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985076203U JPH051071Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-05-22 1985-05-22

Publications (2)

Publication Number Publication Date
JPS61192446U true JPS61192446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-29
JPH051071Y2 JPH051071Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-12

Family

ID=30618132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985076203U Expired - Lifetime JPH051071Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-05-22 1985-05-22

Country Status (1)

Country Link
JP (1) JPH051071Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317077A (en) * 1976-07-30 1978-02-16 Nec Corp Production of semiconductor device
JPS5748226A (en) * 1980-09-05 1982-03-19 Matsushita Electronics Corp Plasma processing method and device for the same
JPS5831532A (ja) * 1981-08-18 1983-02-24 Nec Corp プラズマ処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317077A (en) * 1976-07-30 1978-02-16 Nec Corp Production of semiconductor device
JPS5748226A (en) * 1980-09-05 1982-03-19 Matsushita Electronics Corp Plasma processing method and device for the same
JPS5831532A (ja) * 1981-08-18 1983-02-24 Nec Corp プラズマ処理装置

Also Published As

Publication number Publication date
JPH051071Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-12

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