JPS61191906A - 自動膜厚測定装置 - Google Patents

自動膜厚測定装置

Info

Publication number
JPS61191906A
JPS61191906A JP3018185A JP3018185A JPS61191906A JP S61191906 A JPS61191906 A JP S61191906A JP 3018185 A JP3018185 A JP 3018185A JP 3018185 A JP3018185 A JP 3018185A JP S61191906 A JPS61191906 A JP S61191906A
Authority
JP
Japan
Prior art keywords
wavelength
data
film thickness
thin film
curve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3018185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357407B2 (https=
Inventor
Hidema Uchishiba
内柴　秀磨
Yuji Sasaki
祐二 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3018185A priority Critical patent/JPS61191906A/ja
Publication of JPS61191906A publication Critical patent/JPS61191906A/ja
Publication of JPH0357407B2 publication Critical patent/JPH0357407B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP3018185A 1985-02-20 1985-02-20 自動膜厚測定装置 Granted JPS61191906A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3018185A JPS61191906A (ja) 1985-02-20 1985-02-20 自動膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3018185A JPS61191906A (ja) 1985-02-20 1985-02-20 自動膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS61191906A true JPS61191906A (ja) 1986-08-26
JPH0357407B2 JPH0357407B2 (https=) 1991-09-02

Family

ID=12296588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3018185A Granted JPS61191906A (ja) 1985-02-20 1985-02-20 自動膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS61191906A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013253803A (ja) * 2012-06-05 2013-12-19 Takaoka Electric Mfg Co Ltd 膜厚測定装置および膜厚測定方法
CN106706639A (zh) * 2016-12-19 2017-05-24 清华大学 一种通过扫描形貌测量全场实时氧化速率的方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013253803A (ja) * 2012-06-05 2013-12-19 Takaoka Electric Mfg Co Ltd 膜厚測定装置および膜厚測定方法
CN106706639A (zh) * 2016-12-19 2017-05-24 清华大学 一种通过扫描形貌测量全场实时氧化速率的方法
CN106706639B (zh) * 2016-12-19 2019-11-22 清华大学 一种通过扫描形貌测量全场实时氧化速率的方法

Also Published As

Publication number Publication date
JPH0357407B2 (https=) 1991-09-02

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