JPS61191886U - - Google Patents
Info
- Publication number
- JPS61191886U JPS61191886U JP7414585U JP7414585U JPS61191886U JP S61191886 U JPS61191886 U JP S61191886U JP 7414585 U JP7414585 U JP 7414585U JP 7414585 U JP7414585 U JP 7414585U JP S61191886 U JPS61191886 U JP S61191886U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- arm
- storage member
- work station
- swing arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 10
- 238000007599 discharging Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985074145U JPH0451995Y2 (US07709020-20100504-C00041.png) | 1985-05-21 | 1985-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985074145U JPH0451995Y2 (US07709020-20100504-C00041.png) | 1985-05-21 | 1985-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61191886U true JPS61191886U (US07709020-20100504-C00041.png) | 1986-11-29 |
| JPH0451995Y2 JPH0451995Y2 (US07709020-20100504-C00041.png) | 1992-12-07 |
Family
ID=30614165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985074145U Expired JPH0451995Y2 (US07709020-20100504-C00041.png) | 1985-05-21 | 1985-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451995Y2 (US07709020-20100504-C00041.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6428933A (en) * | 1987-07-24 | 1989-01-31 | Hitachi Electr Eng | Wafer-surface inspection device |
| JPH02132842A (ja) * | 1988-07-13 | 1990-05-22 | Tel Sagami Ltd | 半導体ウエハの移載装置 |
| JP2000042953A (ja) * | 1998-07-29 | 2000-02-15 | Janome Sewing Mach Co Ltd | 水平多関節ロボット |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58155195A (ja) * | 1982-03-05 | 1983-09-14 | 株式会社小松製作所 | ロボツトア−ム装置 |
| JPS5924292U (ja) * | 1982-08-05 | 1984-02-15 | 東京エレクトロン株式会社 | 腕状機構 |
| JPS59156688A (ja) * | 1983-02-21 | 1984-09-05 | ダイキン工業株式会社 | 三点把持形ハンド |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924292B2 (ja) * | 1976-10-15 | 1984-06-08 | カヤバ工業株式会社 | 車高調整式シヨツクアブソ−バ |
-
1985
- 1985-05-21 JP JP1985074145U patent/JPH0451995Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58155195A (ja) * | 1982-03-05 | 1983-09-14 | 株式会社小松製作所 | ロボツトア−ム装置 |
| JPS5924292U (ja) * | 1982-08-05 | 1984-02-15 | 東京エレクトロン株式会社 | 腕状機構 |
| JPS59156688A (ja) * | 1983-02-21 | 1984-09-05 | ダイキン工業株式会社 | 三点把持形ハンド |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6428933A (en) * | 1987-07-24 | 1989-01-31 | Hitachi Electr Eng | Wafer-surface inspection device |
| JPH02132842A (ja) * | 1988-07-13 | 1990-05-22 | Tel Sagami Ltd | 半導体ウエハの移載装置 |
| JP2000042953A (ja) * | 1998-07-29 | 2000-02-15 | Janome Sewing Mach Co Ltd | 水平多関節ロボット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0451995Y2 (US07709020-20100504-C00041.png) | 1992-12-07 |
