JPS61191513A - シラン化合物の連続的製造方法 - Google Patents
シラン化合物の連続的製造方法Info
- Publication number
- JPS61191513A JPS61191513A JP3122885A JP3122885A JPS61191513A JP S61191513 A JPS61191513 A JP S61191513A JP 3122885 A JP3122885 A JP 3122885A JP 3122885 A JP3122885 A JP 3122885A JP S61191513 A JPS61191513 A JP S61191513A
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- reactor
- stage
- silane compound
- disproportionation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000004756 silanes Chemical class 0.000 title abstract description 8
- 238000010924 continuous production Methods 0.000 title 1
- 238000006243 chemical reaction Methods 0.000 claims abstract description 46
- 239000003054 catalyst Substances 0.000 claims abstract description 24
- 238000007323 disproportionation reaction Methods 0.000 claims description 23
- 239000002994 raw material Substances 0.000 claims description 18
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 16
- 229910000077 silane Inorganic materials 0.000 claims description 15
- -1 silane compound Chemical class 0.000 claims description 15
- 238000004821 distillation Methods 0.000 claims description 11
- 238000000926 separation method Methods 0.000 claims description 10
- DESGIDRJCLIWRS-UHFFFAOYSA-N [SiH]Cl Chemical compound [SiH]Cl DESGIDRJCLIWRS-UHFFFAOYSA-N 0.000 claims description 5
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 5
- 239000006227 byproduct Substances 0.000 claims description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 4
- 238000000066 reactive distillation Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 3
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 claims 2
- 238000003860 storage Methods 0.000 abstract description 5
- XUGSDIOYQBRKGF-UHFFFAOYSA-N silicon;hydrochloride Chemical compound [Si].Cl XUGSDIOYQBRKGF-UHFFFAOYSA-N 0.000 abstract 3
- XTAZYLNFDRKIHJ-UHFFFAOYSA-N n,n-dioctyloctan-1-amine Chemical compound CCCCCCCCN(CCCCCCCC)CCCCCCCC XTAZYLNFDRKIHJ-UHFFFAOYSA-N 0.000 abstract 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 14
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 13
- 239000005052 trichlorosilane Substances 0.000 description 13
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 12
- 239000000203 mixture Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 8
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical class Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 6
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 5
- 239000005049 silicon tetrachloride Substances 0.000 description 5
- 239000005046 Chlorosilane Substances 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000003541 multi-stage reaction Methods 0.000 description 4
- 238000009835 boiling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000004817 gas chromatography Methods 0.000 description 3
- 150000003512 tertiary amines Chemical class 0.000 description 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 239000003957 anion exchange resin Substances 0.000 description 2
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 2
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- ICSWLKDKQBNKAY-UHFFFAOYSA-N 1,1,3,3,5,5-hexamethyl-1,3,5-trisilinane Chemical compound C[Si]1(C)C[Si](C)(C)C[Si](C)(C)C1 ICSWLKDKQBNKAY-UHFFFAOYSA-N 0.000 description 1
- KYVBNYUBXIEUFW-UHFFFAOYSA-N 1,1,3,3-tetramethylguanidine Chemical compound CN(C)C(=N)N(C)C KYVBNYUBXIEUFW-UHFFFAOYSA-N 0.000 description 1
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 description 1
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- 241000212977 Andira Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- YKFRUJSEPGHZFJ-UHFFFAOYSA-N N-trimethylsilylimidazole Chemical compound C[Si](C)(C)N1C=CN=C1 YKFRUJSEPGHZFJ-UHFFFAOYSA-N 0.000 description 1
- 241001494479 Pecora Species 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- OAGOUCJGXNLJNL-UHFFFAOYSA-N dimethylcyanamide Chemical compound CN(C)C#N OAGOUCJGXNLJNL-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- XLSZMDLNRCVEIJ-UHFFFAOYSA-N methylimidazole Natural products CC1=CNC=N1 XLSZMDLNRCVEIJ-UHFFFAOYSA-N 0.000 description 1
- IOQPZZOEVPZRBK-UHFFFAOYSA-N octan-1-amine Chemical class CCCCCCCCN IOQPZZOEVPZRBK-UHFFFAOYSA-N 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3122885A JPS61191513A (ja) | 1985-02-19 | 1985-02-19 | シラン化合物の連続的製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3122885A JPS61191513A (ja) | 1985-02-19 | 1985-02-19 | シラン化合物の連続的製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61191513A true JPS61191513A (ja) | 1986-08-26 |
| JPH0471008B2 JPH0471008B2 (en, 2012) | 1992-11-12 |
Family
ID=12325555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3122885A Granted JPS61191513A (ja) | 1985-02-19 | 1985-02-19 | シラン化合物の連続的製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61191513A (en, 2012) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000039027A1 (de) * | 1998-12-24 | 2000-07-06 | Bayer Aktiengesellschaft | Verfahren und anlage zur herstellung von silan |
| WO2001077017A1 (de) * | 2000-04-07 | 2001-10-18 | Solarworld Aktiengesellschaft | Verfahren und anlage zur herstellung von silan |
| WO2008047553A1 (fr) * | 2006-09-27 | 2008-04-24 | Denki Kagaku Kogyo Kabushiki Kaisha | Procédé de fabrication en continu de monosilane |
| JP2009509901A (ja) * | 2005-09-27 | 2009-03-12 | エボニック デグサ ゲーエムベーハー | モノシランの製造方法 |
| CN101798085A (zh) * | 2010-04-21 | 2010-08-11 | 江苏扬农化工集团有限公司 | 硅化镁法硅烷的制备工艺 |
| JP4847958B2 (ja) * | 2004-09-17 | 2011-12-28 | エボニック デグサ ゲーエムベーハー | シランを製造する装置および方法 |
| EP2426088A1 (en) * | 2010-09-03 | 2012-03-07 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for producing monosilane from dichlorosilane |
| US9242868B2 (en) | 2010-09-03 | 2016-01-26 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Process for separating monosilane from chlorosilanes-rich mixture |
-
1985
- 1985-02-19 JP JP3122885A patent/JPS61191513A/ja active Granted
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000039027A1 (de) * | 1998-12-24 | 2000-07-06 | Bayer Aktiengesellschaft | Verfahren und anlage zur herstellung von silan |
| US6905576B1 (en) | 1998-12-24 | 2005-06-14 | Solarworld Ag | Method and system for producing silane |
| WO2001077017A1 (de) * | 2000-04-07 | 2001-10-18 | Solarworld Aktiengesellschaft | Verfahren und anlage zur herstellung von silan |
| JP2003530290A (ja) * | 2000-04-07 | 2003-10-14 | ソーラーワールド・アクチエンゲゼルシヤフト | シラン製造方法および装置 |
| US6942844B2 (en) | 2000-04-07 | 2005-09-13 | Solarworld Aktiengesellschaft | Method and facility for producing silane |
| JP4847958B2 (ja) * | 2004-09-17 | 2011-12-28 | エボニック デグサ ゲーエムベーハー | シランを製造する装置および方法 |
| JP2009509901A (ja) * | 2005-09-27 | 2009-03-12 | エボニック デグサ ゲーエムベーハー | モノシランの製造方法 |
| WO2008047553A1 (fr) * | 2006-09-27 | 2008-04-24 | Denki Kagaku Kogyo Kabushiki Kaisha | Procédé de fabrication en continu de monosilane |
| JP5419456B2 (ja) * | 2006-09-27 | 2014-02-19 | 電気化学工業株式会社 | モノシランの連続的製造方法 |
| CN101798085A (zh) * | 2010-04-21 | 2010-08-11 | 江苏扬农化工集团有限公司 | 硅化镁法硅烷的制备工艺 |
| EP2426088A1 (en) * | 2010-09-03 | 2012-03-07 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for producing monosilane from dichlorosilane |
| WO2012028571A1 (en) * | 2010-09-03 | 2012-03-08 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for producing monosilane from dichlorosilane |
| US8871168B2 (en) | 2010-09-03 | 2014-10-28 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for producing monosilane from dichlorosilane |
| US9242868B2 (en) | 2010-09-03 | 2016-01-26 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Process for separating monosilane from chlorosilanes-rich mixture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0471008B2 (en, 2012) | 1992-11-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |