JPS61188504A - Preparation of optical waveguide lens - Google Patents

Abstract

PURPOSE:To prepare optical waveguide lens easily in large amt. by forming bowl shaped part having high refractive index on an optical waveguide layer by the CVD method using laser light. CONSTITUTION:When an SiO2 layer formed by thermal oxidation and a glass layer formed by sputter vapor deposition are built-up on an Si substrate 1 and irradiated with eximer laser light 4 in gaseous NH3 and SiH4, the reaction gas is excited by the laser light and Si3N4 layer 5 is deposited on th glass layer 3. Since the intensity of the laser light is distributed in Gaussian distribution, the film thickness of the layer 5 is also distributed in Gaussian distribution. Accordingly, optical waveguide lenses having small transmission loss are prepd. easily and in large amt. by the CVD method using laser light.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of manufacturing an optical waveguide lens used in a button such as optical communication or optical information processing.

In conventional technology-integrated optical systems, optical waveguide lenses have functions such as converting focused light and parallel light or Fourier transform, and are essential components. The configuration is shown (see Laser Research, July 1981 issue, p. 636). Here, 1 is an S5 substrate, 2 is an SlO layer serving as a buffer, 3 is a glass layer serving as an optical waveguide layer, and 6' is an optical waveguide layer made of 813N4 or the like. The refractive index of glass layer 3 is SlO□ layer 2
Furthermore, the refractive index of the optical waveguide lens 6' is also higher than that of the glass layer 30. Therefore, the propagation speed of the wavefront near the central axis of the optical waveguide lens 6' is slower than that of the peripheral area, and the focusing effect is lowered. The resulting 0 Next, the optical waveguide lens using the above-mentioned Renesil lens -
I will explain the manufacturing method of Sankaisha Dofutai using drawings. FIG. 4 is a perspective view showing the manufacturing method. An optical waveguide lens 6', which is a bowl-shaped high refractive index portion with a raised central portion, is formed by vapor deposition. If the distance between the evaporation source and the substrate is sufficient, the evaporated molecules will fly perpendicularly to the substrate. At this time, the deformed core 7 is evaporated while being rotated, and an optical waveguide lens 5', which is a bowl-shaped high refractive index portion with a raised central portion, is formed on the glass layer 3.

Problems to be Solved by the Invention As described above, optical waveguide lenses manufactured by rotating a mask during vapor deposition only produce one optical waveguide lens during one vapor deposition.

Furthermore, it is difficult to form a high-quality film by vapor deposition, and propagation loss occurs in the optical waveguide lens portion.

Means for Solving the Problems The method for manufacturing an optical waveguide lens of the present invention has been made to solve the above problems. This forms a high refractive index portion.

By using a laser beam whose working light intensity has a Gaussian distribution, an optical waveguide lens can be easily manufactured in a JIiK manner by making the CVD method using this laser and depositing a film with a glass distribution.

Embodiment A first embodiment of a method for manufacturing an optical waveguide and a laser according to the present invention is described below.
As shown in the figure. In Fig. 1(a), 1 is an St substrate, 2 is an SlO□ layer formed by thermal oxidation, 3 is a glass layer containing multiple components formed by sputter deposition, and 4 is an ArF excimer laser beam. Yes, these are placed in NH3゜5IH4 gas. The reaction gases NH3 and 5in4 are optically excited by the ArF excimer laser beam 4, resulting in the reaction 4NH3+38iH4→513N4+12H2↑, resulting in Si3. N4 layer 5
is deposited on the glass layer 3. At this time, the ArF excimer laser 4 is deposited with a Gaussian distribution of 5t.
The thickness of the 3N4 layer 6 also has a Gaussian distribution.

FIG. 2 is a perspective view of an optical waveguide lens manufactured by the optical waveguide lens manufacturing method of the present invention.

The refractive index of the glass layer 3 is 1.52. On the other hand, 8102
Since the refractive index of the layer is 1.47, the light is transmitted through the glass layer 3.
can be propagated. H・-No laser beam 6 (wavelength 0.
63 μm) was made into parallel light and propagated through the glass layer 3. The beam width of this H・-No laser beam 6 is 1 m1B,
After passing through the 5t3N4 layer 6 with a center thickness of 0.8 pme and a refractive index of 1.92, the light is condensed to 10 μm.The S z 3 layer and 4 layer are the high refractive index portions compared to the glass layer 3 which is an optical waveguide layer. 6 acted as an optical waveguide lens.

In this embodiment, glass is used as the optical waveguide layer, and 5t3N4 is used as the high refractive index portion, but any combination may be used as long as the high refractive index portion has a high refractive index as well as the optical waveguide layer.

Effects of the Invention As described above, according to the optical waveguide lens of the present invention, the optical waveguide lens can be easily manufactured by the CVD method using laser light, and the film can be easily manufactured by the CVD method. An optical waveguide lens with a small thickness and low propagation loss can be obtained.

[Brief explanation of the drawing]

Figure y81 shows the optical waveguide lens of the present invention! Figure 2 is a process diagram showing one embodiment of the optical waveguide lens according to the present invention. FIGS. 3 and 3 are perspective views of a conventional optical waveguide lens, and FIG. 4 is a perspective view showing a conventional method of manufacturing an optical waveguide lens. 1...Sl substrate, 2...SlO□ layer, 3...Glass layer, 4...ArF excimer laser beam, 6... Si3N4 layer. Name of agent: Patent attorney Toshio Nakao, 1 person□, 'Tsumu Kyo/ ---3,, JR? ---3i02 layer 3-1 single layer diagram (b) Figure 2 Figure 3/---3i substrate 2---5tOZ layer Figure 4

Claims (2)

[Claims] (1) By CVD method using laser light on the optical waveguide layer,
A method for manufacturing an optical waveguide lens, comprising the step of forming a bowl-shaped high refractive index portion. (2) The method for manufacturing an optical waveguide lens according to claim 1, wherein the high refractive index portion is Si_3N_4.