JPS61182283A - 超伝導回路装置の製造方法 - Google Patents
超伝導回路装置の製造方法Info
- Publication number
- JPS61182283A JPS61182283A JP60021924A JP2192485A JPS61182283A JP S61182283 A JPS61182283 A JP S61182283A JP 60021924 A JP60021924 A JP 60021924A JP 2192485 A JP2192485 A JP 2192485A JP S61182283 A JPS61182283 A JP S61182283A
- Authority
- JP
- Japan
- Prior art keywords
- film
- lead
- electrode
- onto
- superconducting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 230000004888 barrier function Effects 0.000 claims abstract description 11
- 229910001152 Bi alloy Inorganic materials 0.000 claims abstract description 8
- 238000000151 deposition Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims abstract description 6
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910052797 bismuth Inorganic materials 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 4
- 229910000978 Pb alloy Inorganic materials 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 229910052737 gold Inorganic materials 0.000 abstract description 2
- 229910052738 indium Inorganic materials 0.000 abstract description 2
- 229910052758 niobium Inorganic materials 0.000 abstract description 2
- 230000003647 oxidation Effects 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- 230000001427 coherent effect Effects 0.000 abstract 2
- 229910052745 lead Inorganic materials 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60021924A JPS61182283A (ja) | 1985-02-08 | 1985-02-08 | 超伝導回路装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60021924A JPS61182283A (ja) | 1985-02-08 | 1985-02-08 | 超伝導回路装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61182283A true JPS61182283A (ja) | 1986-08-14 |
| JPH0251268B2 JPH0251268B2 (https=) | 1990-11-06 |
Family
ID=12068617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60021924A Granted JPS61182283A (ja) | 1985-02-08 | 1985-02-08 | 超伝導回路装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61182283A (https=) |
-
1985
- 1985-02-08 JP JP60021924A patent/JPS61182283A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0251268B2 (https=) | 1990-11-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |