JPS61182029U - - Google Patents

Info

Publication number
JPS61182029U
JPS61182029U JP6456985U JP6456985U JPS61182029U JP S61182029 U JPS61182029 U JP S61182029U JP 6456985 U JP6456985 U JP 6456985U JP 6456985 U JP6456985 U JP 6456985U JP S61182029 U JPS61182029 U JP S61182029U
Authority
JP
Japan
Prior art keywords
molecular beam
epitaxial growth
cylindrical member
beam source
surrounding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6456985U
Other languages
English (en)
Other versions
JPH051069Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985064569U priority Critical patent/JPH051069Y2/ja
Publication of JPS61182029U publication Critical patent/JPS61182029U/ja
Application granted granted Critical
Publication of JPH051069Y2 publication Critical patent/JPH051069Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１ａ図、第１ｂ図は、それぞれ本考案に係る
分子線エピタキシヤル成長装置と分子線源部との
構成図である。第２図は、従来技術に係る分子線
エピタキシヤル成長装置の構成図である。 １……真空容器よりなる成長室、２……分子線
源、２１……ヒータ端子、２２……サーモカツプ
ル端子、３……フアーナスシユラウド、３１……
冷却用液体窒素供給・排出口、４……本考案の要
旨に係る筒状部材、５……シヤツタ、６……基板
支持装置、７……半導体基板。

Claims (1)

    【実用新案登録請求の範囲】
  1. フアーナスシユラウド３の内面にそい該フアー
    ナスシユラウド３の内面をライニングするように
    、分子線源２を囲んで設けられた着脱可能な筒状
    部材４を具備してなる分子線エピタキシヤル成長
    装置。
JP1985064569U 1985-04-30 1985-04-30 Expired - Lifetime JPH051069Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985064569U JPH051069Y2 (ja) 1985-04-30 1985-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985064569U JPH051069Y2 (ja) 1985-04-30 1985-04-30

Publications (2)

Publication Number Publication Date
JPS61182029U true JPS61182029U (ja) 1986-11-13
JPH051069Y2 JPH051069Y2 (ja) 1993-01-12

Family

ID=30595779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985064569U Expired - Lifetime JPH051069Y2 (ja) 1985-04-30 1985-04-30

Country Status (1)

Country Link
JP (1) JPH051069Y2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001323431A (ja) * 2000-05-17 2001-11-22 Nippon Steel Corp 重防食ポリウレタン被覆鋼材

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732500A (en) * 1980-08-05 1982-02-22 Tokyo Shibaura Electric Co Voice recognizing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732500A (en) * 1980-08-05 1982-02-22 Tokyo Shibaura Electric Co Voice recognizing device

Also Published As

Publication number Publication date
JPH051069Y2 (ja) 1993-01-12

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