JPS61180104A - 位置変位測定装置 - Google Patents

位置変位測定装置

Info

Publication number
JPS61180104A
JPS61180104A JP21509985A JP21509985A JPS61180104A JP S61180104 A JPS61180104 A JP S61180104A JP 21509985 A JP21509985 A JP 21509985A JP 21509985 A JP21509985 A JP 21509985A JP S61180104 A JPS61180104 A JP S61180104A
Authority
JP
Japan
Prior art keywords
reflected light
light
measured
position displacement
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21509985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0371041B2 (cg-RX-API-DMAC7.html
Inventor
Toshio Ichikawa
市川　敏夫
Hideto Kondo
秀人 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP21509985A priority Critical patent/JPS61180104A/ja
Publication of JPS61180104A publication Critical patent/JPS61180104A/ja
Publication of JPH0371041B2 publication Critical patent/JPH0371041B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Optical Distance (AREA)
JP21509985A 1985-09-30 1985-09-30 位置変位測定装置 Granted JPS61180104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21509985A JPS61180104A (ja) 1985-09-30 1985-09-30 位置変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21509985A JPS61180104A (ja) 1985-09-30 1985-09-30 位置変位測定装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57034090A Division JPS58151507A (ja) 1982-03-05 1982-03-05 位置検出用ホトダイオ−ド

Publications (2)

Publication Number Publication Date
JPS61180104A true JPS61180104A (ja) 1986-08-12
JPH0371041B2 JPH0371041B2 (cg-RX-API-DMAC7.html) 1991-11-11

Family

ID=16666736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21509985A Granted JPS61180104A (ja) 1985-09-30 1985-09-30 位置変位測定装置

Country Status (1)

Country Link
JP (1) JPS61180104A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272517A (en) * 1990-06-13 1993-12-21 Matsushita Electric Industrial Co., Ltd. Height measurement apparatus using laser light beam
CN105932090A (zh) * 2016-04-27 2016-09-07 河北大学 一种基于侧向光伏效应的薄膜结构位置灵敏探测器
EP2434945B1 (en) * 2009-05-27 2018-12-19 Analog Devices, Inc. Multiuse optical sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272517A (en) * 1990-06-13 1993-12-21 Matsushita Electric Industrial Co., Ltd. Height measurement apparatus using laser light beam
EP2434945B1 (en) * 2009-05-27 2018-12-19 Analog Devices, Inc. Multiuse optical sensor
CN105932090A (zh) * 2016-04-27 2016-09-07 河北大学 一种基于侧向光伏效应的薄膜结构位置灵敏探测器

Also Published As

Publication number Publication date
JPH0371041B2 (cg-RX-API-DMAC7.html) 1991-11-11

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