JPS6117737A - 真空装置における振動緩衝用構造 - Google Patents

真空装置における振動緩衝用構造

Info

Publication number
JPS6117737A
JPS6117737A JP9397485A JP9397485A JPS6117737A JP S6117737 A JPS6117737 A JP S6117737A JP 9397485 A JP9397485 A JP 9397485A JP 9397485 A JP9397485 A JP 9397485A JP S6117737 A JPS6117737 A JP S6117737A
Authority
JP
Japan
Prior art keywords
vacuum
vacuum generator
compensating
compensating member
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9397485A
Other languages
English (en)
Japanese (ja)
Inventor
ルーデイ・ノイラント
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of JPS6117737A publication Critical patent/JPS6117737A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Vibration Prevention Devices (AREA)
JP9397485A 1984-05-02 1985-05-02 真空装置における振動緩衝用構造 Pending JPS6117737A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD26255784A DD238175A3 (de) 1984-05-02 1984-05-02 Einrichtung zur schwingungsdaempfung in vakuumsystemen
DD16F/262557-1 1984-05-02

Publications (1)

Publication Number Publication Date
JPS6117737A true JPS6117737A (ja) 1986-01-25

Family

ID=5556655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9397485A Pending JPS6117737A (ja) 1984-05-02 1985-05-02 真空装置における振動緩衝用構造

Country Status (6)

Country Link
JP (1) JPS6117737A (fr)
DD (1) DD238175A3 (fr)
DE (1) DE3508575A1 (fr)
FR (1) FR2563883B1 (fr)
GB (1) GB2159891B (fr)
SU (1) SU1502889A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4949155A (en) * 1987-07-14 1990-08-14 Sharp Kabushiki Kaisha Tape carrier for semiconductor chips
JPH0681894A (ja) * 1992-08-31 1994-03-22 Hitachi Zosen Corp 真空容器の緩衝装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20202893U1 (de) * 2002-02-25 2003-07-03 Sachsenring Fahrzeugtechnik Gm Vorrichtung zur Lagerung einer Kolbenverdichterbaugruppe
DE102004012677A1 (de) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus
JPS57188787A (en) * 1981-05-18 1982-11-19 Toshiba Corp Vibration-proof mechanism for vacuum pump
JPS6065288A (ja) * 1983-09-21 1985-04-15 Hitachi Ltd クライオポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4949155A (en) * 1987-07-14 1990-08-14 Sharp Kabushiki Kaisha Tape carrier for semiconductor chips
JPH0681894A (ja) * 1992-08-31 1994-03-22 Hitachi Zosen Corp 真空容器の緩衝装置

Also Published As

Publication number Publication date
FR2563883A1 (fr) 1985-11-08
DD238175A3 (de) 1986-08-13
GB2159891B (en) 1987-07-01
DE3508575A1 (de) 1985-11-07
FR2563883B1 (fr) 1989-12-08
SU1502889A1 (ru) 1989-08-23
GB2159891A (en) 1985-12-11
GB8511024D0 (en) 1985-06-12

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