DD238175A3 - Einrichtung zur schwingungsdaempfung in vakuumsystemen - Google Patents

Einrichtung zur schwingungsdaempfung in vakuumsystemen Download PDF

Info

Publication number
DD238175A3
DD238175A3 DD26255784A DD26255784A DD238175A3 DD 238175 A3 DD238175 A3 DD 238175A3 DD 26255784 A DD26255784 A DD 26255784A DD 26255784 A DD26255784 A DD 26255784A DD 238175 A3 DD238175 A3 DD 238175A3
Authority
DD
German Democratic Republic
Prior art keywords
vacuum
recipient
vacuum generator
devices
vibration
Prior art date
Application number
DD26255784A
Other languages
German (de)
English (en)
Inventor
Rudi Neuland
Original Assignee
Zeiss Jena Veb Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Jena Veb Carl filed Critical Zeiss Jena Veb Carl
Priority to DD26255784A priority Critical patent/DD238175A3/de
Priority to DE19853508575 priority patent/DE3508575A1/de
Priority to SU857773781A priority patent/SU1502889A1/ru
Priority to FR8505706A priority patent/FR2563883B1/fr
Priority to GB08511024A priority patent/GB2159891B/en
Priority to JP9397485A priority patent/JPS6117737A/ja
Publication of DD238175A3 publication Critical patent/DD238175A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Vibration Prevention Devices (AREA)
DD26255784A 1984-05-02 1984-05-02 Einrichtung zur schwingungsdaempfung in vakuumsystemen DD238175A3 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DD26255784A DD238175A3 (de) 1984-05-02 1984-05-02 Einrichtung zur schwingungsdaempfung in vakuumsystemen
DE19853508575 DE3508575A1 (de) 1984-05-02 1985-03-11 Einrichtung zur schwingungsdaempfung in vakuumsystemen
SU857773781A SU1502889A1 (ru) 1984-05-02 1985-03-19 Устройство дл демпфировани колебаний в вакуумных системах
FR8505706A FR2563883B1 (fr) 1984-05-02 1985-04-16 Dispositif d'amortissement des vibrations dans les systemes a vide
GB08511024A GB2159891B (en) 1984-05-02 1985-05-01 Damping oscillations in vacuum systems
JP9397485A JPS6117737A (ja) 1984-05-02 1985-05-02 真空装置における振動緩衝用構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD26255784A DD238175A3 (de) 1984-05-02 1984-05-02 Einrichtung zur schwingungsdaempfung in vakuumsystemen

Publications (1)

Publication Number Publication Date
DD238175A3 true DD238175A3 (de) 1986-08-13

Family

ID=5556655

Family Applications (1)

Application Number Title Priority Date Filing Date
DD26255784A DD238175A3 (de) 1984-05-02 1984-05-02 Einrichtung zur schwingungsdaempfung in vakuumsystemen

Country Status (6)

Country Link
JP (1) JPS6117737A (fr)
DD (1) DD238175A3 (fr)
DE (1) DE3508575A1 (fr)
FR (1) FR2563883B1 (fr)
GB (1) GB2159891B (fr)
SU (1) SU1502889A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0526746Y2 (fr) * 1987-07-14 1993-07-07
JPH0681894A (ja) * 1992-08-31 1994-03-22 Hitachi Zosen Corp 真空容器の緩衝装置
DE20202893U1 (de) * 2002-02-25 2003-07-03 Sachsenring Fahrzeugtechnik Gm Vorrichtung zur Lagerung einer Kolbenverdichterbaugruppe
DE102004012677A1 (de) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus
JPS57188787A (en) * 1981-05-18 1982-11-19 Toshiba Corp Vibration-proof mechanism for vacuum pump
JPS6065288A (ja) * 1983-09-21 1985-04-15 Hitachi Ltd クライオポンプ

Also Published As

Publication number Publication date
FR2563883A1 (fr) 1985-11-08
JPS6117737A (ja) 1986-01-25
GB2159891B (en) 1987-07-01
DE3508575A1 (de) 1985-11-07
FR2563883B1 (fr) 1989-12-08
SU1502889A1 (ru) 1989-08-23
GB2159891A (en) 1985-12-11
GB8511024D0 (en) 1985-06-12

Similar Documents

Publication Publication Date Title
DE69631362T2 (de) Vorrichtung zur Schwingungsdämpfung
DE69408015T2 (de) Einrichtung zur Regelung von aktiven Lagern
EP2903709B1 (fr) Système et procédé destinés à amortir des vibrations lors d'analyses microscopiques
DE69032856T2 (de) Schwingungsdämpfungssystem
EP2673531B1 (fr) Montage sans vibrations d'un objet sur une structure
EP1803963B1 (fr) Modul hybride de rigidité pour islolation de vibrations
EP1735542B1 (fr) Interface a dissipation des forces de cisaillement, destinee a amortir les vibrations mecaniques
DE112006001416T5 (de) Systeme und Verfahren zur aktiven Schwingungsdämpfung
EP2128700B1 (fr) Système de lithographie et procédé de réglage d'un système de lithographie
DE10351243B4 (de) Adaptiver Schwingungstilger
DE2814093C2 (de) Antischallgeber
DE4322958A1 (de) Aktives Stellelement
EP0464597B1 (fr) Support actif à amortissement hydraulique pour moteur
DD238175A3 (de) Einrichtung zur schwingungsdaempfung in vakuumsystemen
EP2071211B1 (fr) Isolant de vibrations destiné à l'utilisation sous vide
EP1322873B1 (fr) Actionneur d'extension piezo-electrique
EP0470064B1 (fr) Moteur à combustion interne
DE2757047A1 (de) Mechanischer kraftverstaerker
DE102007023963B4 (de) Vorrichtung für einen Schwingungserreger
DE102017101968A1 (de) Hydrolager
DE4300669C1 (de) Luftfeder mit einem elastomeren Luftfederbalg und einem Zusatzvolumen
DE102012104552A1 (de) Vorrichtung zum dynamischen Anregen eines Bauteils sowie Prüfstand mit selbiger
DE102011016552A1 (de) Dämpfungsanordnung für Tieftemperatur-Messzelle
DE102008046636A1 (de) Aerostatische Lageranordnung mit zugeordneter elektrostatischer Vorspanneinheit, insbesondere für die Vakuumanwendung
DE102019203012B3 (de) Schwingungsdämpferanordnung

Legal Events

Date Code Title Description
RPI Change in the person, name or address of the patentee (searches according to art. 11 and 12 extension act)
RPI Change in the person, name or address of the patentee (searches according to art. 11 and 12 extension act)
ENJ Ceased due to non-payment of renewal fee