JPS6116696Y2 - - Google Patents
Info
- Publication number
- JPS6116696Y2 JPS6116696Y2 JP15146683U JP15146683U JPS6116696Y2 JP S6116696 Y2 JPS6116696 Y2 JP S6116696Y2 JP 15146683 U JP15146683 U JP 15146683U JP 15146683 U JP15146683 U JP 15146683U JP S6116696 Y2 JPS6116696 Y2 JP S6116696Y2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- conductive solution
- head
- tank
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000006193 liquid solution Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15146683U JPS5984845U (ja) | 1983-09-30 | 1983-09-30 | 断線修正装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15146683U JPS5984845U (ja) | 1983-09-30 | 1983-09-30 | 断線修正装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5984845U JPS5984845U (ja) | 1984-06-08 |
| JPS6116696Y2 true JPS6116696Y2 (enrdf_load_stackoverflow) | 1986-05-22 |
Family
ID=30335640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15146683U Granted JPS5984845U (ja) | 1983-09-30 | 1983-09-30 | 断線修正装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5984845U (enrdf_load_stackoverflow) |
-
1983
- 1983-09-30 JP JP15146683U patent/JPS5984845U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5984845U (ja) | 1984-06-08 |
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