JPS6116695Y2 - - Google Patents
Info
- Publication number
- JPS6116695Y2 JPS6116695Y2 JP12622380U JP12622380U JPS6116695Y2 JP S6116695 Y2 JPS6116695 Y2 JP S6116695Y2 JP 12622380 U JP12622380 U JP 12622380U JP 12622380 U JP12622380 U JP 12622380U JP S6116695 Y2 JPS6116695 Y2 JP S6116695Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- circular
- wafers
- support rods
- holding jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 36
- 238000001035 drying Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12622380U JPS6116695Y2 (OSRAM) | 1980-09-05 | 1980-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12622380U JPS6116695Y2 (OSRAM) | 1980-09-05 | 1980-09-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5748635U JPS5748635U (OSRAM) | 1982-03-18 |
| JPS6116695Y2 true JPS6116695Y2 (OSRAM) | 1986-05-22 |
Family
ID=29486657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12622380U Expired JPS6116695Y2 (OSRAM) | 1980-09-05 | 1980-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6116695Y2 (OSRAM) |
-
1980
- 1980-09-05 JP JP12622380U patent/JPS6116695Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5748635U (OSRAM) | 1982-03-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6109677A (en) | Apparatus for handling and transporting plate like substrates | |
| JP4743939B2 (ja) | 入力モジュールを使用して半導体基板を搬送する方法および装置 | |
| US4762353A (en) | Flexible carrier for semiconductor wafer cassettes | |
| JPS6116695Y2 (OSRAM) | ||
| JP2894535B2 (ja) | ウェーハホルダー | |
| WO2002005326A3 (en) | Robotic end effector provided with wafer supporting pads elastically mounted | |
| JPH05299489A (ja) | ウェーハ搬送用ロボット | |
| JPS62152136A (ja) | 半導体ウエハのスピンチヤツク | |
| JP2982281B2 (ja) | ウエハスクラバ装置 | |
| JP3006078U (ja) | ウエハ回転乾燥装置におけるウエハ支持具 | |
| JPS6167242A (ja) | ウエ−ハ収容治具 | |
| JPS5917261A (ja) | ウエハ搬送装置 | |
| JP2568209B2 (ja) | 半導体処理用カンチレバ− | |
| JPS633455B2 (OSRAM) | ||
| JPS6139545A (ja) | ウエ−ハ用キヤリヤ− | |
| JPH0834236B2 (ja) | ウェハのロ−ディング装置 | |
| JPS6316446U (OSRAM) | ||
| JPS6311727Y2 (OSRAM) | ||
| JPS5938050Y2 (ja) | 薄片状試料支持治具 | |
| JPH0438518Y2 (OSRAM) | ||
| JPH0275724U (OSRAM) | ||
| JPH0390445U (OSRAM) | ||
| JPH0657476U (ja) | ガラス基板回転保持装置 | |
| JPS61170044A (ja) | ウェハ用キャリヤ | |
| JPH0519951Y2 (OSRAM) |