JPS61166748U - - Google Patents
Info
- Publication number
- JPS61166748U JPS61166748U JP1985049670U JP4967085U JPS61166748U JP S61166748 U JPS61166748 U JP S61166748U JP 1985049670 U JP1985049670 U JP 1985049670U JP 4967085 U JP4967085 U JP 4967085U JP S61166748 U JPS61166748 U JP S61166748U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- polishing plate
- cylindrical wall
- polishing device
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 description 5
- 239000004744 fabric Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985049670U JPS61166748U (no) | 1985-04-03 | 1985-04-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985049670U JPS61166748U (no) | 1985-04-03 | 1985-04-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61166748U true JPS61166748U (no) | 1986-10-16 |
Family
ID=30567079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985049670U Pending JPS61166748U (no) | 1985-04-03 | 1985-04-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61166748U (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106312795A (zh) * | 2015-07-01 | 2017-01-11 | 不二越机械工业株式会社 | 研磨装置 |
-
1985
- 1985-04-03 JP JP1985049670U patent/JPS61166748U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106312795A (zh) * | 2015-07-01 | 2017-01-11 | 不二越机械工业株式会社 | 研磨装置 |
JP2017013183A (ja) * | 2015-07-01 | 2017-01-19 | 不二越機械工業株式会社 | 研磨装置 |
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