JPS6383253U - - Google Patents
Info
- Publication number
- JPS6383253U JPS6383253U JP1986176178U JP17617886U JPS6383253U JP S6383253 U JPS6383253 U JP S6383253U JP 1986176178 U JP1986176178 U JP 1986176178U JP 17617886 U JP17617886 U JP 17617886U JP S6383253 U JPS6383253 U JP S6383253U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- polishing
- eccentric
- sided
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986176178U JPS6383253U (no) | 1986-11-17 | 1986-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986176178U JPS6383253U (no) | 1986-11-17 | 1986-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6383253U true JPS6383253U (no) | 1988-06-01 |
Family
ID=31116176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986176178U Pending JPS6383253U (no) | 1986-11-17 | 1986-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6383253U (no) |
-
1986
- 1986-11-17 JP JP1986176178U patent/JPS6383253U/ja active Pending
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