JPS6383253U - - Google Patents
Info
- Publication number
- JPS6383253U JPS6383253U JP1986176178U JP17617886U JPS6383253U JP S6383253 U JPS6383253 U JP S6383253U JP 1986176178 U JP1986176178 U JP 1986176178U JP 17617886 U JP17617886 U JP 17617886U JP S6383253 U JPS6383253 U JP S6383253U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- polishing
- eccentric
- sided
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
Description
第１図は本考案の実施例を示す図、第２図は実
施例による研摩液の流れを示す図、第３図は従来
の偏芯両面ポリツシング装置を示す図、第４図は
従来の研摩液の流れを示す図である。図において
、１はウエハ、２はキヤリアプレート、３は上面
研摩板、４は下面研摩板、５は研摩液、６は研摩
液供給口、７はダミーポケツトである。
Fig. 1 is a diagram showing an embodiment of the present invention, Fig. 2 is a diagram showing the flow of polishing liquid according to the embodiment, Fig. 3 is a diagram showing a conventional eccentric double-sided polishing device, and Fig. 4 is a diagram showing a conventional eccentric double-sided polishing device. It is a figure showing the flow of liquid. In the figure, 1 is a wafer, 2 is a carrier plate, 3 is an upper polishing plate, 4 is a lower polishing plate, 5 is a polishing liquid, 6 is a polishing liquid supply port, and 7 is a dummy pocket.
Claims (1)
偏芯された上下の研摩板によつて挾み、該研摩板
を回転させることにより、該ウエハの研摩を行な
う偏芯両面ポリツシング装置において、該キヤリ
アプレートに研摩液をウエハの上下面に分流する
形状を有するダミーポケツトを設けることを特徴
とする偏芯両面ポリツシング装置。 In an eccentric double-sided polishing device, a wafer held by a carrier plate is sandwiched between eccentric upper and lower polishing plates, and the wafer is polished by rotating the polishing plates. An eccentric double-sided polishing device characterized by providing a dummy pocket having a shape that divides polishing liquid into the upper and lower surfaces of a wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986176178U JPS6383253U (en) | 1986-11-17 | 1986-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986176178U JPS6383253U (en) | 1986-11-17 | 1986-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6383253U true JPS6383253U (en) | 1988-06-01 |
Family
ID=31116176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986176178U Pending JPS6383253U (en) | 1986-11-17 | 1986-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6383253U (en) |
-
1986
- 1986-11-17 JP JP1986176178U patent/JPS6383253U/ja active Pending
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