JPS6367065U - - Google Patents
Info
- Publication number
- JPS6367065U JPS6367065U JP1986162646U JP16264686U JPS6367065U JP S6367065 U JPS6367065 U JP S6367065U JP 1986162646 U JP1986162646 U JP 1986162646U JP 16264686 U JP16264686 U JP 16264686U JP S6367065 U JPS6367065 U JP S6367065U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- magnet
- wafer
- surface plate
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案による一実施例を示す側断面図
、第２図は本考案による一実施例を示すＡ―Ａ断
面図、第３図は従来の研磨装置を示す側断面図、
である。
図において、１は上部定盤、２は下部定盤、３
は太陽ギア、４はインターナルギア、５はキヤリ
ア、５ａはギア部、６はウエーハ、７は上部磁石
、８は下部磁石、を示す。
FIG. 1 is a side sectional view showing one embodiment of the present invention, FIG. 2 is an AA sectional view showing one embodiment of the present invention, and FIG. 3 is a side sectional view showing a conventional polishing device.
It is. In the figure, 1 is the upper surface plate, 2 is the lower surface plate, and 3
4 is a sun gear, 4 is an internal gear, 5 is a carrier, 5a is a gear portion, 6 is a wafer, 7 is an upper magnet, and 8 is a lower magnet.
Claims (1)
回転する上下二枚の定盤１，２の間に挾んで研磨
する研磨装置であつて、 上部定盤１の上部の前記キヤリア５の真上に上
部磁石７、下部定盤２の下部の前記キヤリア５の
真下に下部磁石８を配設し、 強磁性材料よりなる前記キヤリア５を用いて前
記ウエーハ６を研磨することを特徴とする研磨装
置。[Claims for Utility Model Registration] The wafer 6 held by the carrier 5 is
It is a polishing device that performs polishing by being sandwiched between two rotating upper and lower surface plates 1 and 2, and the upper magnet 7 is placed directly above the carrier 5 on the upper part of the upper surface plate 1, and the said magnet 7 is placed on the lower part of the lower surface plate 2. A polishing apparatus characterized in that a lower magnet 8 is disposed directly below the carrier 5, and the wafer 6 is polished using the carrier 5 made of a ferromagnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986162646U JPS6367065U (en) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986162646U JPS6367065U (en) | 1986-10-22 | 1986-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367065U true JPS6367065U (en) | 1988-05-06 |
Family
ID=31090108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986162646U Pending JPS6367065U (en) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367065U (en) |
-
1986
- 1986-10-22 JP JP1986162646U patent/JPS6367065U/ja active Pending