JPS61164270U - - Google Patents
Info
- Publication number
- JPS61164270U JPS61164270U JP4878085U JP4878085U JPS61164270U JP S61164270 U JPS61164270 U JP S61164270U JP 4878085 U JP4878085 U JP 4878085U JP 4878085 U JP4878085 U JP 4878085U JP S61164270 U JPS61164270 U JP S61164270U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- sputtering
- target
- magnet
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4878085U JPS61164270U (enExample) | 1985-04-02 | 1985-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4878085U JPS61164270U (enExample) | 1985-04-02 | 1985-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164270U true JPS61164270U (enExample) | 1986-10-11 |
Family
ID=30565357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4878085U Pending JPS61164270U (enExample) | 1985-04-02 | 1985-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164270U (enExample) |
-
1985
- 1985-04-02 JP JP4878085U patent/JPS61164270U/ja active Pending
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