JPS61163264A - 白金族金属の酸化膜形成法 - Google Patents

白金族金属の酸化膜形成法

Info

Publication number
JPS61163264A
JPS61163264A JP306085A JP306085A JPS61163264A JP S61163264 A JPS61163264 A JP S61163264A JP 306085 A JP306085 A JP 306085A JP 306085 A JP306085 A JP 306085A JP S61163264 A JPS61163264 A JP S61163264A
Authority
JP
Japan
Prior art keywords
ions
platinum group
oxide film
ion
group metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP306085A
Other languages
English (en)
Japanese (ja)
Inventor
Keiji Tsukada
啓二 塚田
Takuya Maruizumi
丸泉　琢也
Hiroyuki Miyagi
宮城　宏行
Teruaki Kobayashi
映章 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP306085A priority Critical patent/JPS61163264A/ja
Priority to SU864013137A priority patent/SU1581217A3/ru
Priority to DK9886A priority patent/DK9886A/da
Priority to DE19863600575 priority patent/DE3600575A1/de
Priority to DD28610686A priority patent/DD261786A5/de
Publication of JPS61163264A publication Critical patent/JPS61163264A/ja
Priority to SU864028493A priority patent/SU1577697A3/ru
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP306085A 1985-01-11 1985-01-11 白金族金属の酸化膜形成法 Pending JPS61163264A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP306085A JPS61163264A (ja) 1985-01-11 1985-01-11 白金族金属の酸化膜形成法
SU864013137A SU1581217A3 (ru) 1985-01-11 1986-01-09 Способ получени нафталиновых производных
DK9886A DK9886A (da) 1985-01-11 1986-01-09 Naphthalenderivater og fremstilling deraf
DE19863600575 DE3600575A1 (de) 1985-01-11 1986-01-10 Verfahren zur bildung eines oxidfilms aus einem element der platingruppe
DD28610686A DD261786A5 (de) 1985-01-11 1986-01-10 Verfahren zur herstellung von naphthalinderivaten
SU864028493A SU1577697A3 (ru) 1985-01-11 1986-11-13 Способ получени лактона нафталиновой кислоты

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP306085A JPS61163264A (ja) 1985-01-11 1985-01-11 白金族金属の酸化膜形成法

Publications (1)

Publication Number Publication Date
JPS61163264A true JPS61163264A (ja) 1986-07-23

Family

ID=11546779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP306085A Pending JPS61163264A (ja) 1985-01-11 1985-01-11 白金族金属の酸化膜形成法

Country Status (5)

Country Link
JP (1) JPS61163264A (es)
DD (1) DD261786A5 (es)
DE (1) DE3600575A1 (es)
DK (1) DK9886A (es)
SU (2) SU1581217A3 (es)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19620022C2 (de) * 1995-05-17 2002-09-19 Hyundai Electronics Ind Verfahren zur Herstellung einer Diffusionssperrmetallschicht in einer Halbleitervorrichtung
JP2009107773A (ja) * 2007-10-30 2009-05-21 Mitsubishi Electric Corp プリンタ装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3855230T2 (de) * 1987-08-28 1996-10-31 Sumitomo Electric Industries Verfahren zur Herstellung eines supraleitenden Gegenstandes
RU2551655C1 (ru) * 2014-05-15 2015-05-27 Федеральное государственное бюджетное учреждение науки Новосибирский институт органической химии им. Н.Н. Ворожцова Сибирского отделения Российской академии наук (НИОХ СО РАН) Способ получения (3-гидроксипропил)нафтолов

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331971A (en) * 1976-09-06 1978-03-25 Nippon Telegr & Teleph Corp <Ntt> Forming method of metal oxide film or semiconductor oxide film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331971A (en) * 1976-09-06 1978-03-25 Nippon Telegr & Teleph Corp <Ntt> Forming method of metal oxide film or semiconductor oxide film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19620022C2 (de) * 1995-05-17 2002-09-19 Hyundai Electronics Ind Verfahren zur Herstellung einer Diffusionssperrmetallschicht in einer Halbleitervorrichtung
JP2009107773A (ja) * 2007-10-30 2009-05-21 Mitsubishi Electric Corp プリンタ装置

Also Published As

Publication number Publication date
SU1581217A3 (ru) 1990-07-23
DE3600575C2 (es) 1987-03-19
DD261786A5 (de) 1988-11-09
DK9886D0 (da) 1986-01-09
DE3600575A1 (de) 1986-07-17
DK9886A (da) 1986-07-11
SU1577697A3 (ru) 1990-07-07

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