JPS61159369A - ウエ−ハ用ラツプ機における上定盤の昇降装置 - Google Patents

ウエ−ハ用ラツプ機における上定盤の昇降装置

Info

Publication number
JPS61159369A
JPS61159369A JP59281265A JP28126584A JPS61159369A JP S61159369 A JPS61159369 A JP S61159369A JP 59281265 A JP59281265 A JP 59281265A JP 28126584 A JP28126584 A JP 28126584A JP S61159369 A JPS61159369 A JP S61159369A
Authority
JP
Japan
Prior art keywords
valve
surface plate
back pressure
exhaust valve
reference surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59281265A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0225747B2 (cg-RX-API-DMAC7.html
Inventor
Koji Yamaga
山賀　公司
Toshio Miyashita
宮下　利雄
Yukio Ogiwara
幸雄 荻原
Tomoyuki Takeuchi
竹内　知之
Takeshi Tanaka
健 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Naoetsu Electronics Co Ltd
Shin Etsu Engineering Co Ltd
Original Assignee
Naoetsu Electronics Co Ltd
Shin Etsu Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Naoetsu Electronics Co Ltd, Shin Etsu Engineering Co Ltd filed Critical Naoetsu Electronics Co Ltd
Priority to JP59281265A priority Critical patent/JPS61159369A/ja
Publication of JPS61159369A publication Critical patent/JPS61159369A/ja
Publication of JPH0225747B2 publication Critical patent/JPH0225747B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP59281265A 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における上定盤の昇降装置 Granted JPS61159369A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59281265A JPS61159369A (ja) 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における上定盤の昇降装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59281265A JPS61159369A (ja) 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における上定盤の昇降装置

Publications (2)

Publication Number Publication Date
JPS61159369A true JPS61159369A (ja) 1986-07-19
JPH0225747B2 JPH0225747B2 (cg-RX-API-DMAC7.html) 1990-06-05

Family

ID=17636662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59281265A Granted JPS61159369A (ja) 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における上定盤の昇降装置

Country Status (1)

Country Link
JP (1) JPS61159369A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010179398A (ja) * 2009-02-04 2010-08-19 Taiyo:Kk 研磨装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010179398A (ja) * 2009-02-04 2010-08-19 Taiyo:Kk 研磨装置

Also Published As

Publication number Publication date
JPH0225747B2 (cg-RX-API-DMAC7.html) 1990-06-05

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Legal Events

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