JPH0225747B2 - - Google Patents

Info

Publication number
JPH0225747B2
JPH0225747B2 JP59281265A JP28126584A JPH0225747B2 JP H0225747 B2 JPH0225747 B2 JP H0225747B2 JP 59281265 A JP59281265 A JP 59281265A JP 28126584 A JP28126584 A JP 28126584A JP H0225747 B2 JPH0225747 B2 JP H0225747B2
Authority
JP
Japan
Prior art keywords
back pressure
valve
surface plate
exhaust valves
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59281265A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61159369A (ja
Inventor
Koji Yamaga
Toshio Myashita
Yukio Ogiwara
Tomoyuki Takeuchi
Takeshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Naoetsu Electronics Co Ltd
Shin Etsu Engineering Co Ltd
Original Assignee
Naoetsu Electronics Co Ltd
Shin Etsu Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Naoetsu Electronics Co Ltd, Shin Etsu Engineering Co Ltd filed Critical Naoetsu Electronics Co Ltd
Priority to JP59281265A priority Critical patent/JPS61159369A/ja
Publication of JPS61159369A publication Critical patent/JPS61159369A/ja
Publication of JPH0225747B2 publication Critical patent/JPH0225747B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP59281265A 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における上定盤の昇降装置 Granted JPS61159369A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59281265A JPS61159369A (ja) 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における上定盤の昇降装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59281265A JPS61159369A (ja) 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における上定盤の昇降装置

Publications (2)

Publication Number Publication Date
JPS61159369A JPS61159369A (ja) 1986-07-19
JPH0225747B2 true JPH0225747B2 (cg-RX-API-DMAC7.html) 1990-06-05

Family

ID=17636662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59281265A Granted JPS61159369A (ja) 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における上定盤の昇降装置

Country Status (1)

Country Link
JP (1) JPS61159369A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5195477B2 (ja) * 2009-02-04 2013-05-08 株式会社太陽 研磨装置

Also Published As

Publication number Publication date
JPS61159369A (ja) 1986-07-19

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Legal Events

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