JPS6115732U - フオトマスクのパターン検査装置 - Google Patents

フオトマスクのパターン検査装置

Info

Publication number
JPS6115732U
JPS6115732U JP1985092181U JP9218185U JPS6115732U JP S6115732 U JPS6115732 U JP S6115732U JP 1985092181 U JP1985092181 U JP 1985092181U JP 9218185 U JP9218185 U JP 9218185U JP S6115732 U JPS6115732 U JP S6115732U
Authority
JP
Japan
Prior art keywords
pattern
absence
defect
pattern inspection
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985092181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6125245Y2 (enExample
Inventor
喜久夫 三田
正幸 尾山
卓 吉田
雅人 中島
勝美 藤原
唯男 中久喜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1985092181U priority Critical patent/JPS6115732U/ja
Publication of JPS6115732U publication Critical patent/JPS6115732U/ja
Application granted granted Critical
Publication of JPS6125245Y2 publication Critical patent/JPS6125245Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1985092181U 1985-06-20 1985-06-20 フオトマスクのパターン検査装置 Granted JPS6115732U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985092181U JPS6115732U (ja) 1985-06-20 1985-06-20 フオトマスクのパターン検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985092181U JPS6115732U (ja) 1985-06-20 1985-06-20 フオトマスクのパターン検査装置

Publications (2)

Publication Number Publication Date
JPS6115732U true JPS6115732U (ja) 1986-01-29
JPS6125245Y2 JPS6125245Y2 (enExample) 1986-07-29

Family

ID=30648747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985092181U Granted JPS6115732U (ja) 1985-06-20 1985-06-20 フオトマスクのパターン検査装置

Country Status (1)

Country Link
JP (1) JPS6115732U (enExample)

Also Published As

Publication number Publication date
JPS6125245Y2 (enExample) 1986-07-29

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