JPS61153340U - - Google Patents

Info

Publication number
JPS61153340U
JPS61153340U JP3681285U JP3681285U JPS61153340U JP S61153340 U JPS61153340 U JP S61153340U JP 3681285 U JP3681285 U JP 3681285U JP 3681285 U JP3681285 U JP 3681285U JP S61153340 U JPS61153340 U JP S61153340U
Authority
JP
Japan
Prior art keywords
air
type substrate
substrate processing
utility
air knife
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3681285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058675Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985036812U priority Critical patent/JPH058675Y2/ja
Publication of JPS61153340U publication Critical patent/JPS61153340U/ja
Application granted granted Critical
Publication of JPH058675Y2 publication Critical patent/JPH058675Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
JP1985036812U 1985-03-13 1985-03-13 Expired - Lifetime JPH058675Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985036812U JPH058675Y2 (cg-RX-API-DMAC7.html) 1985-03-13 1985-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985036812U JPH058675Y2 (cg-RX-API-DMAC7.html) 1985-03-13 1985-03-13

Publications (2)

Publication Number Publication Date
JPS61153340U true JPS61153340U (cg-RX-API-DMAC7.html) 1986-09-22
JPH058675Y2 JPH058675Y2 (cg-RX-API-DMAC7.html) 1993-03-04

Family

ID=30542345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985036812U Expired - Lifetime JPH058675Y2 (cg-RX-API-DMAC7.html) 1985-03-13 1985-03-13

Country Status (1)

Country Link
JP (1) JPH058675Y2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207181A (ja) * 1988-02-16 1989-08-21 Hitachi Ltd 印刷回路板の洗浄方法
JPH0579941U (ja) * 1992-03-31 1993-10-29 株式会社スガイ 物品把持装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285461A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Continuous treating apparatus for plate form objects
JPS57201028A (en) * 1981-06-05 1982-12-09 Toshiba Corp Wafer conveying device
JPS58134441A (ja) * 1982-02-04 1983-08-10 Fujitsu Ltd ウエハ処理装置
JPS6014244A (ja) * 1983-07-06 1985-01-24 Fujitsu Ltd マスク洗浄装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285461A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Continuous treating apparatus for plate form objects
JPS57201028A (en) * 1981-06-05 1982-12-09 Toshiba Corp Wafer conveying device
JPS58134441A (ja) * 1982-02-04 1983-08-10 Fujitsu Ltd ウエハ処理装置
JPS6014244A (ja) * 1983-07-06 1985-01-24 Fujitsu Ltd マスク洗浄装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207181A (ja) * 1988-02-16 1989-08-21 Hitachi Ltd 印刷回路板の洗浄方法
JPH0579941U (ja) * 1992-03-31 1993-10-29 株式会社スガイ 物品把持装置

Also Published As

Publication number Publication date
JPH058675Y2 (cg-RX-API-DMAC7.html) 1993-03-04

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