JPS61149813A - Inspecting instrument for surface of oscillating body - Google Patents

Inspecting instrument for surface of oscillating body

Info

Publication number
JPS61149813A
JPS61149813A JP28050584A JP28050584A JPS61149813A JP S61149813 A JPS61149813 A JP S61149813A JP 28050584 A JP28050584 A JP 28050584A JP 28050584 A JP28050584 A JP 28050584A JP S61149813 A JPS61149813 A JP S61149813A
Authority
JP
Japan
Prior art keywords
tracking
output
change point
reflected light
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28050584A
Other languages
Japanese (ja)
Other versions
JPH0569163B2 (en
Inventor
Kenichi Matsui
健一 松井
Mitsuhito Kamei
光仁 亀井
Mikio Tachibana
橘　幹夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Nippon Steel Corp
Original Assignee
Mitsubishi Electric Corp
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Sumitomo Metal Industries Ltd filed Critical Mitsubishi Electric Corp
Priority to JP28050584A priority Critical patent/JPS61149813A/en
Publication of JPS61149813A publication Critical patent/JPS61149813A/en
Publication of JPH0569163B2 publication Critical patent/JPH0569163B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To decrease the number of photodetecting elements and to simplify a device by monitoring the output of a photodetecting element which photodetects reflected light without fail when tracking is in normal operation and generating an inspection start synchronizing signal when the output varies. CONSTITUTION:A tracking circuit controls tracking so that the reflected light 1 which shifts in position owing to the oscillation of a body to be inspected is aligned to the photodetecting element 2 all the time, and the photodetection output of a photodetecting element 4 which photodetects the reflected light among photodetecting elements 3-5 without fail when the tracking is in normal operation is inputted to a change point detecting circuit 16. The change point detecting circuit 16 detects the change point of the output of the photodetecting element 4 and generates and applies the inspection start synchronizing signal to a tracking signal processing circuit 14 when the change point is detected. Consequently, a photodetecting element dedicated to synchronizing signal detection needs not be provided.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は振動する物体の表面検査装置、特に検査開始
同期信号を簡単に得ることができる表面検査装［Ｃ関す
るものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a surface inspection device for a vibrating object, and particularly to a surface inspection device [C] that can easily obtain an inspection start synchronization signal.

〔従来の技術〕[Conventional technology]

一般に、例えば円筒形状物体の全表面を検査する手段と
しては、この円筒形状物体を回転させるとともに、その
母線にそって光を走査する方法が採られている。Generally, as a means for inspecting the entire surface of a cylindrical object, for example, a method is adopted in which the cylindrical object is rotated and light is scanned along its generatrix.

ところでこの種の方法においては、検査開始の同期信号
を安定して得ることおよび円筒形状物体の振動に伴なう
反射光の位置変動の影響をなくすることが重要であり、
後者については、反射光の位置変動を吸収するためのト
ラッキング装置１に関する発明として先に本出願人達に
より提案されている。However, in this type of method, it is important to stably obtain a synchronization signal for starting the inspection and to eliminate the influence of positional fluctuations of reflected light due to vibrations of the cylindrical object.
The latter was previously proposed by the present applicants as an invention relating to a tracking device 1 for absorbing positional fluctuations of reflected light.

ｔａ３図は上記先行発明を示すもので、図中（１）は図
示しない円筒形状物体からの反射光、（２）はこの反射
光（１）を受ける検査用の光電素子あるいはオグテイカ
ルファイバ束等の受光素子、（８）、（４）、（６）は
トラッキング用の複数の光電素子等の受光素子で好まし
くは上記受光素子（２）、（４）は−直線上に配置され
゛、また受光素子（８）ｔ（５）はこの直線を挾んでそ
の両側に配置される。Figure ta3 shows the above-mentioned prior invention, in which (1) shows the reflected light from a cylindrical object (not shown), and (2) shows the photoelectric element or optical fiber bundle for inspection that receives this reflected light (1). The light receiving elements (8), (4), and (6) are light receiving elements such as a plurality of photoelectric elements for tracking, and preferably the light receiving elements (2) and (4) are arranged on a - straight line. Further, the light receiving elements (8)t(5) are arranged on both sides of this straight line.

以上の構成において、反射光（１）が受光素子（８）あ
るいは（６）Ｋ入射すれば、この反射光（１）は検査用
の受光素子（２）から外れるため、受光素子群（２）　
ｅ　（Ｊｌ）　１（４）、　（５）全体を移動させて反
射光（１）が受光素子（２）。In the above configuration, if the reflected light (1) enters the light receiving element (8) or (6)K, this reflected light (1) will be removed from the light receiving element (2) for inspection.
e (Jl) 1 (4), (5) Move the entire body so that the reflected light (1) reaches the light receiving element (2).

（４）に入射するようｋする。そしてこれにより、円筒
形状物体の回転振動に無関係に検査が可能となる。k so that it is incident on (4). This makes it possible to inspect the cylindrical object regardless of its rotational vibration.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

ところでこの種の検査装置において、表面の検査に際し
て検査位置を特定するための同期信号については、円筒
形状物体の端部を光が横切る瞬間を検出する検出素子を
専用に設け、この検出素子の出力変化点を検出すること
により同期信号を得る方法が採られてｈる。この九め、
上記受光素子（り　Ｉ　（り　Ｉ（４）、（５）に加え
てさらに同期信号用の受光素子が必要となって全体で５
種類の素子を要し、装置構成が非常に複雑となるという
問題があつ九この発明はかかる問題点を解決するために
なされ九もので、従来必須であった同期信号用の検出素
子を省略して装置構成を簡単化しコストダウンを図るこ
とができる振動する物体の表面検査装置を得ることを目
的とする。By the way, in this type of inspection equipment, a detection element is dedicated to detect the moment when light crosses the edge of a cylindrical object, and the output of this detection element is used to generate a synchronization signal for specifying the inspection position when inspecting a surface. A method is used to obtain a synchronization signal by detecting a change point. This ninth,
In addition to the above photodetector elements (I(4) and (5)), a photodetector for synchronization signals is required, resulting in a total of 5
This invention was made to solve these problems, and eliminates the need for a detection element for synchronizing signals, which was previously essential. It is an object of the present invention to provide a surface inspection device for a vibrating object that can simplify the device configuration and reduce costs.

〔問題点を解決するための手段〕[Means for solving problems]

この発８ＡＫ係る振動する物体の表面検査装置は被検査
物体の振動による変動する反射光の位置をトラッキング
するための複数の受光素子と、これらの受光素子の中で
上記トラッキングが正常に動作している際に反射光を常
時受光する受光素子の出力を入力としその変化点を検出
して検査開始同期信号とする変化点検出回路とを備えた
ものである０ 〔作用〕 この発明においては、受光素子からの出力を入力とする
変化点検出回路を設けているので、この検出回路で上記
受光素子からの出力の変化点を検出することによ〕、こ
れを検査開始同期信号として用いることがで、：き、従
来必須であった同期信号検出用の素子を省略できる。The surface inspection device for a vibrating object according to this 8AK includes a plurality of light-receiving elements for tracking the position of the reflected light that changes due to the vibration of the object to be inspected, and the above-mentioned tracking is operating normally among these light-receiving elements. 0 [Operation] In this invention, the output of the light receiving element that constantly receives the reflected light is input, and the change point detection circuit detects the change point and uses it as an inspection start synchronization signal. Since a change point detection circuit is provided that receives the output from the light receiving element as input, by detecting the change point in the output from the light receiving element with this detection circuit, this can be used as an inspection start synchronization signal. , :The element for detecting the synchronizing signal, which was conventionally essential, can be omitted.

〔実施例〕〔Example〕

第１図および８２図はこの発明の一実施例に係る円筒形
状物体の表面検査装置を示すもので、図中第３図と同一
符号は同−又は相当部分を示す。1 and 82 show a surface inspection apparatus for a cylindrical object according to an embodiment of the present invention, in which the same reference numerals as in FIG. 3 indicate the same or corresponding parts.

第１図において（至）は振動する被検査物体としての円
筒形状物体、（ロ）は入射走査光、（２）は上記円筒形
状物体（至）の端部である。また第２図において（２）
はトラッキング処理用のトラッキング信号処理回路、（
ロ）はトラッキングが正常に動作している際に反射光（
１）を常時受光する受光素子（４）からの出力を適当な
倍率に増幅する増幅器、（至）はポジティブエツジを検
出する変化点検出回路である。In FIG. 1, (to) is a cylindrical object as a vibrating object to be inspected, (b) is an incident scanning beam, and (2) is an end of the cylindrical object (to). Also, in Figure 2 (2)
is a tracking signal processing circuit for tracking processing, (
(b) is the reflected light (
1) is an amplifier that amplifies the output from the light receiving element (4) which always receives light to an appropriate magnification, and 1) is a change point detection circuit that detects a positive edge.

以上の構成において円筒形状物体（転）の表面検査は、
円筒形状物体（至）の表面上を第１図に示す矢印（Ａ）
の方向に入射走査光（ロ）を走査することによシ行なわ
れる。そしてこの際、反射光（１）の中で円筒形状物体
（至）の端部（２）近辺からの反射光が到達する位置に
は、トラッキング用の受光素子り８）、（４）、（６）
が配置されている。In the above configuration, surface inspection of a cylindrical object (rolling) is performed as follows:
Arrow (A) shown in Figure 1 on the surface of a cylindrical object (to)
This is done by scanning the incident scanning light (b) in the direction of . At this time, in the reflected light (1), the position where the reflected light from the vicinity of the end (2) of the cylindrical object (to) reaches is a tracking light receiving element 8), (4), ( 6)
is located.

ここで、トラッキングは上記先行発明の動作原理に従っ
て動作するものとすると、受光素子（４）には常に反射
光（１）が入力さ、れ、しかも端部（至）の情報が含ま
れていることになる。Here, assuming that the tracking operates according to the operating principle of the above-mentioned prior invention, the reflected light (1) is always input to the light receiving element (4), and information on the end (to) is included. It turns out.

いま、受光素子（８）、（４）、（６）の出力は、光が
照射されている時に’　Ｈ’出力、先が消失している時
に％　ＬＩ出力を出すものとすると、入射走査光α力が
オーバー走査し九位曾から矢印（Ａ）方向に走査されて
円筒形状物体叫の端部（２）を照射し北隣間、受光素子
（４）の出力が１Ｌ′から′Ｔ１′に変化することにな
る。Now, assuming that the outputs of the light receiving elements (8), (4), and (6) are 'H' output when the light is irradiated and %LI output when the tip is extinguished, the incident scanning light The α force overscans and scans in the direction of the arrow (A) from the ninth position, irradiating the end (2) of the cylindrical object, and the output of the light receiving element (4) changes from 1L' to 'T1' It will change to.

上記各トラッキング用の受光素子（８）　＠　（４）　
＊　（５）からの出力は、第２図に示すようにトラッキ
ング信号処理回路（２）Ｋ入力されて処理されるが、こ
れと同時に受光素子（４）からの出力は、適当な倍率を
有する増幅器（ロ）を介して変化点検出回路（至）Ｋ入
力される。そしてこの変化点検出回路（ロ）において、
受光素子（４）からの出力の％　Ｌ　Ｉから１Ｈ′への
変化点が検出され、その検出信号は、変化点検出回路に
）から出力信号として出力される。この出力信号は、入
射走査光（ロ）が円筒形状物体（至）の端部（２）に達
した瞬間に同期しており、したがってこれを表面検査開
始の同期信号として用いることができる。Light receiving element for each of the above tracking (8) @ (4)
*The output from (5) is input to the tracking signal processing circuit (2)K and processed as shown in Figure 2. At the same time, the output from the light receiving element (4) has an appropriate magnification. The signal is inputted to the change point detection circuit (to) K via the amplifier (b). In this change point detection circuit (b),
A change point from % LI to 1H' in the output from the light receiving element (4) is detected, and the detection signal is outputted as an output signal from the change point detection circuit. This output signal is synchronized with the moment when the incident scanning light (b) reaches the end (2) of the cylindrical object (to), and therefore can be used as a synchronization signal for starting the surface inspection.

なお、上記実施例では、変化点検出回路（至）としてポ
ジティブエツジ検出回路を用いるものＫついて説明した
が、増幅器（ロ）が反転形である場合にはネガティブエ
ツジ検出回路を用いても同様の効果が得られる。In the above embodiment, a positive edge detection circuit is used as the change point detection circuit (to), but if the amplifier (b) is an inverting type, a negative edge detection circuit may also be used. Effects can be obtained.

また上記実施例では、被検査物体として円筒形状物体α
のを用いる場合について説明したが、シート状物体ある
いは角柱状物体等地の一般の振動する試料表面の検査釦
も同様に適用することができる０ 〔発明の効果〕 以上説明し次ようにこの発明によれば、トラッキング用
の受光素子の出力を入力とする変化点検出回路によシ、
変化点を検出して検査開始同期信号として用いるように
しているので、従来必須であった同期信号検出用の素子
を省略して装置構成を簡素化し、安価な装置を提供する
ことができる等の効果がある。Further, in the above embodiment, the cylindrical object α is used as the object to be inspected.
Although the explanation has been given on the case where the button is used, it can be similarly applied to an inspection button for a general vibrating sample surface such as a sheet-like object or a prismatic object. According to
Since the change point is detected and used as the test start synchronization signal, the device configuration can be simplified by omitting the synchronization signal detection element that was previously required, and an inexpensive device can be provided. effective.

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの発明の一実施例を示す受光素子の位置関係
図、８２図は同様の信号処理系を示すブロック図、８３
図は先行発明のトラッキング装置を示す説明図である。 （１）・・反射光 （８）、（４）、（６）・・トラッキング用受光素子叫
・・円筒形状物体　（ロ）・・入射走査光（２）・・端
部 （２）・・トラッキング信号処理回路 （ロ）Ｏ・変化点検出回路 なお各図中、同一符号は同−又は和尚部分を示すものと
する。Fig. 1 is a positional relationship diagram of a light receiving element showing an embodiment of the present invention, Fig. 82 is a block diagram showing a similar signal processing system, and Fig. 83 is a block diagram showing a similar signal processing system.
The figure is an explanatory diagram showing a tracking device of the prior invention. (1)...Reflected light (8), (4), (6)...Tracking light receiving element...Cylindrical object (B)...Incoming scanning light (2)...End (2)... Tracking Signal Processing Circuit (B) O/Change Point Detection Circuit In each figure, the same reference numerals indicate the same or different parts.

Claims (1)

【特許請求の範囲】[Claims] 振動する被検査物体に光を照射、走査して被検査物体の
表面を検査するものにおいて、上記被検査物体の振動に
より変動する反射光の位置をトラッキングするための複
数の受光素子と、これらの受光素子の中で上記トラッキ
ングが正常に動作している際に反射光を常時受光する受
光素子の出力を入力としその変化点を検出して検査開始
同期信号とする変化点検出回路とを具備することを特徴
とする振動する物体の表面検査装置。In an apparatus that inspects the surface of a vibrating object to be inspected by irradiating and scanning the surface of the object to be inspected, a plurality of light receiving elements for tracking the position of the reflected light that changes due to the vibration of the object to be inspected; A changing point detection circuit is provided, which inputs the output of the light receiving element that constantly receives reflected light when the tracking is operating normally in the light receiving element, detects the changing point, and uses the output as an inspection start synchronization signal. A surface inspection device for a vibrating object, characterized by:
JP28050584A 1984-12-24 1984-12-24 Inspecting instrument for surface of oscillating body Granted JPS61149813A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28050584A JPS61149813A (en) 1984-12-24 1984-12-24 Inspecting instrument for surface of oscillating body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28050584A JPS61149813A (en) 1984-12-24 1984-12-24 Inspecting instrument for surface of oscillating body

Publications (2)

Publication Number Publication Date
JPS61149813A true JPS61149813A (en) 1986-07-08
JPH0569163B2 JPH0569163B2 (en) 1993-09-30

Family

ID=17626024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28050584A Granted JPS61149813A (en) 1984-12-24 1984-12-24 Inspecting instrument for surface of oscillating body

Country Status (1)

Country Link
JP (1) JPS61149813A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112304A (en) * 1976-03-17 1977-09-20 Victor Co Of Japan Ltd Contactless pick-up
JPS5932804A (en) * 1982-08-18 1984-02-22 Chino Works Ltd Length measuring device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112304A (en) * 1976-03-17 1977-09-20 Victor Co Of Japan Ltd Contactless pick-up
JPS5932804A (en) * 1982-08-18 1984-02-22 Chino Works Ltd Length measuring device

Also Published As

Publication number Publication date
JPH0569163B2 (en) 1993-09-30

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