JPH0569163B2 - - Google Patents
Info
- Publication number
- JPH0569163B2 JPH0569163B2 JP59280505A JP28050584A JPH0569163B2 JP H0569163 B2 JPH0569163 B2 JP H0569163B2 JP 59280505 A JP59280505 A JP 59280505A JP 28050584 A JP28050584 A JP 28050584A JP H0569163 B2 JPH0569163 B2 JP H0569163B2
- Authority
- JP
- Japan
- Prior art keywords
- receiving element
- light receiving
- light
- cylindrical object
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 30
- 238000001514 detection method Methods 0.000 claims description 17
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000003708 edge detection Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は振動する物体の表面検査装置、特に
検査開始同期信号を簡単に得ることができる表面
検査装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a surface inspection device for a vibrating object, and particularly to a surface inspection device that can easily obtain an inspection start synchronization signal.
一般に、例えば円筒形状物体の全表面を検査す
る手段としては、この円筒形状物体を回転させる
とともに、その母線にそつて光を走査する方法が
採られている。
Generally, as a means for inspecting the entire surface of a cylindrical object, for example, a method is adopted in which the cylindrical object is rotated and light is scanned along its generatrix.
ところでこの種の方法においては、検査開始の
同期信号を安定して得ることおよび円筒形状物体
の振動に伴なう反射光の位置変動の影響をなくす
ることが重要であり、後者については、反射光の
位置変動を吸収するためのトラツキング装置に関
する発明として先に本出願人達により提案されて
いる。 By the way, in this type of method, it is important to stably obtain a synchronization signal for starting the inspection and to eliminate the influence of positional fluctuations of the reflected light due to vibrations of the cylindrical object. This invention was previously proposed by the present applicants as an invention relating to a tracking device for absorbing positional fluctuations of light.
第３図は上記先行発明を示すもので、図中１は
図示しない円筒形状物体からの反射光、２はこの
反射光１を受ける検査用の光電素子あるいはオプ
テイカルフアイバ束等の受光素子、３，４，５は
トラツキング用の複数の光電素子等の受光素子で
好ましくは上記受光素子２，４は一直線上に配置
され、また受光素子３，５はこの直線を挟んでそ
の両側に配置される。 FIG. 3 shows the above-mentioned prior invention, in which 1 is reflected light from a cylindrical object (not shown), 2 is a light-receiving element such as a photoelectric element for inspection or an optical fiber bundle that receives this reflected light 1, and 3 , 4 and 5 are light receiving elements such as a plurality of photoelectric elements for tracking, and preferably the light receiving elements 2 and 4 are arranged in a straight line, and the light receiving elements 3 and 5 are arranged on both sides of this straight line. .
以上の構成において、反射光１が受光素子３あ
るいは５に入射すれば、この反射光１は検査用の
受光素子２から外れるため、受光素子群２，３，
４，５全体を移動させて反射光１が受光素子２，
４に入射するようにする。そしてこれにより、円
筒形状物体の回転振動に無関係に検査が可能とな
る。 In the above configuration, if the reflected light 1 is incident on the light receiving element 3 or 5, this reflected light 1 will be removed from the light receiving element 2 for inspection, so the light receiving element groups 2, 3,
By moving the entire 4 and 5, the reflected light 1 is transmitted to the light receiving element 2,
Make it incident on 4. This makes it possible to inspect the cylindrical object regardless of its rotational vibration.
ところでこの種の検査装置において、表面の検
査に際して検査位置を特定するための同期信号に
ついては、円筒形状物体の端部を光が横切る瞬間
を検出する検出素子を専用に設け、この検出素子
の出力変化点を検出することにより同期信号を得
る方法が採られている。このため、上記受光素子
２，３，４，５に加えてさらに同期信号用の受光
素子が必要となつて全体で５種類の素子を要し、
装置構成が非常に複雑となるという問題があつ
た。
By the way, in this type of inspection equipment, a detection element is dedicated to detect the moment when light crosses the edge of a cylindrical object, and the output of this detection element is used to generate a synchronization signal for specifying the inspection position when inspecting a surface. A method is used to obtain a synchronization signal by detecting a change point. Therefore, in addition to the above-mentioned light receiving elements 2, 3, 4, and 5, a light receiving element for the synchronization signal is required, and a total of five types of elements are required.
There was a problem that the device configuration was extremely complicated.
この発明はかかる問題点を解決するためになさ
れたもので、従来必須であつた同期信号用の検出
素子を省略して装置構成を簡単化しコストダウン
を図ることができる振動する物体の表面検査装置
を得ることを目的とする。 This invention was made to solve this problem, and is a surface inspection device for a vibrating object that can simplify the device configuration and reduce costs by omitting the detection element for the synchronization signal that was previously essential. The purpose is to obtain.
この発明に係る振動する物体の表面検査装置は
被検査物体の振動による変動する反射光の位置を
トラツキングするための複数の受光素子と、これ
らの受光素子の中で上記トラツキングが正常に動
作している際に反射光を常時受光する受光素子の
出力を入力としその変化点を検出して検査開始同
期信号とする変化点検出回路とを備えたものであ
る。
The surface inspection device for a vibrating object according to the present invention includes a plurality of light receiving elements for tracking the position of reflected light that changes due to the vibration of the object to be inspected, and a device in which the above-mentioned tracking operates normally among these light receiving elements. The apparatus is equipped with a change point detection circuit that receives as input the output of a light receiving element that constantly receives reflected light when the test is in progress, detects the change point, and uses the output as an inspection start synchronization signal.
この発明においては、受光素子からの出力を入
力とする変化点検出回路を設けているので、この
検出回路で上記受光素子からの出力の変化点を検
出するとにより、これを検査開始同期信号として
用いることができ、従来必須であつた同期信号検
出用の素子を省略できる。
In this invention, since a change point detection circuit that receives the output from the light receiving element as input is provided, this detection circuit detects a change point in the output from the light receiving element, and this is used as an inspection start synchronization signal. This makes it possible to omit the element for detecting a synchronizing signal, which was conventionally essential.
第１図および第２図はこの発明の一実施例に係
る円筒形状物体の表面検査装置を示すもので、図
中第３図と同一符号は同一又は相当部分を示す。
第１図において１０は振動する被検査物体として
の円筒形状物体、１１は入射走査光、１２は上記
円筒形状物体１０の端部である。また第２図にお
いて１４はトラツキング処理用のトラツキング信
号処理回路、１５はトラツキングが正常に動作し
ている際に反射光１を常時受光する受光素子４か
らの出力を適当な倍率に増幅する増幅器、１６は
ポジテイブエツジを検出する変化点検出回路であ
る。
1 and 2 show a surface inspection apparatus for a cylindrical object according to an embodiment of the present invention, and the same reference numerals as in FIG. 3 indicate the same or corresponding parts.
In FIG. 1, 10 is a cylindrical object as a vibrating object to be inspected, 11 is an incident scanning beam, and 12 is an end of the cylindrical object 10. Further, in FIG. 2, 14 is a tracking signal processing circuit for tracking processing, 15 is an amplifier that amplifies the output from the light receiving element 4, which always receives reflected light 1, to an appropriate magnification when tracking is operating normally; 16 is a change point detection circuit for detecting positive edges.
以上の構成において円筒形状物体１０の表面検
査は、円筒形状物体１０の表面上を第１図に示す
矢印Ａの方向に入射走査光１１を走査することに
より行なわれる。そしてこの際、反射光１の中で
円筒形状物体１０の端部１２近辺からの反射光が
到達する位置には、トラツキング用の受光素子
３，４，５が配置されている。 In the above configuration, the surface inspection of the cylindrical object 10 is performed by scanning the surface of the cylindrical object 10 with the incident scanning light 11 in the direction of arrow A shown in FIG. At this time, tracking light receiving elements 3, 4, and 5 are arranged at positions where the reflected light from the vicinity of the end 12 of the cylindrical object 10 reaches in the reflected light 1.
ここで、トラツキングは上記先行発明の動作原
理に従つて動作するものとすると、受光素子４に
は常に反射光１が入力され、しかも端部１２の情
報が含まれていることになる。 Here, assuming that the tracking operates according to the operating principle of the prior invention described above, the reflected light 1 is always input to the light receiving element 4, and information about the end portion 12 is also included.
いま、受光素子３，４，５の出力は、光が照射
されている時に“Ｈ”出力、光が消失している時
に“Ｌ”出力を出すものとすると、入射走査光１
１がオーバー走査した位置から矢印Ａ方向に走査
されて円筒形状物体１０の端部１２を照射した瞬
間、受光素子４の出力が“Ｌ”から“Ｈ”に変化
することになる。 Now, assuming that the outputs of the light receiving elements 3, 4, and 5 are "H" output when the light is irradiated and "L" output when the light is disappearing, the incident scanning light 1
At the moment when the end portion 12 of the cylindrical object 10 is scanned in the direction of the arrow A from the overscanned position, the output of the light receiving element 4 changes from "L" to "H".
上記各トラツキング用の受光素子３，４，５か
らの出力は、第２図に示すようにトラツキング信
号処理回路１４に入力されて処理されるが、これ
と同時に受光素子４からの出力は、適当な倍率を
有する増幅器１５を介して変化点検出回路１６に
入力される。そしてこの変化点検出回路１６にお
いて、受光素子４からの出力の“Ｌ”から“Ｈ”
への変化点が検出され、その検出信号は、変化点
検出回路１６から出力信号として出力される。こ
の出力信号は、入射走査光１１が円筒形状物体１
０の端部１２に達した瞬間に同期しており、した
がつてこれを表面検査開始の同期信号として用い
ることができる。 The outputs from each of the tracking light receiving elements 3, 4, 5 are input to the tracking signal processing circuit 14 and processed as shown in FIG. 2, but at the same time, the output from the light receiving element 4 is The signal is inputted to a change point detection circuit 16 via an amplifier 15 having a magnification factor of 1. In this change point detection circuit 16, the output from the light receiving element 4 changes from "L" to "H".
The change point is detected, and the detection signal is outputted from the change point detection circuit 16 as an output signal. This output signal indicates that the incident scanning light 11 is the cylindrical object 1.
It is synchronized at the moment it reaches the end 12 of 0, so this can be used as a synchronization signal for starting the surface inspection.
なお、上記実施例では、変化点検出回路１６と
してポジテイブエツジ検出回路を用いるものにつ
いて説明したが、増幅器１５が反転形である場合
にはネガテイブエツジ検出回路を用いても同様の
効果が得られる。 In the above embodiment, a positive edge detection circuit is used as the change point detection circuit 16. However, if the amplifier 15 is of an inverting type, a negative edge detection circuit can be used to obtain the same effect.
また上記実施例では、被検査物体として円筒形
状物体１０を用いる場合について説明したが、シ
ート状物体あるいは角柱状物体等他の一般の振動
する試料表面の検査にも同様に適用することがで
きる。 Further, in the above embodiment, the case where the cylindrical object 10 is used as the object to be inspected has been described, but the present invention can be similarly applied to inspection of other general vibrating sample surfaces such as sheet-like objects or prismatic objects.
以上説明したように、この発明によれば、円筒
物体からの反射光を入射しその円筒物体の表面検
査を行う第１の受光素子と、第１の受光素子と同
一直線上に配された第２の受光素子と、その第２
の受光素子の両側に配され円筒物体からの反射光
に応じてその反射光が常時その第２の受光素子上
にくるようにトラツキングする第３、第４の受光
素子と、第２の受光素子の出力の変化点に基づい
て、第１の受光素子による表面検査の検査開始同
期信号を検出する変化点検出回路とを備えるよう
に構成したので、同期信号検出用の受光素子を省
略して装置構成を簡素化でき、また、第２の受光
素子と変化点検出回路とにより、トラツキング制
御状態が検査開始同期信号に基づいて確認でき、
さらに、円筒物体の表面検査を行うのは第１の受
光素子であり、表面検査の検査開始同期信号は第
２の受光素子の出力に基づいて行うように２つの
受光素子に分担しているので、円筒物体の端部に
欠陥が生じていても、第１の受光素子の表面検査
により欠陥を検出するか、または、第２の受光素
子の出力による検査開始同期信号の未発生により
表面検査不能にすることができ、したがつて、欠
陥部の誤検出を防止することができる。
As explained above, according to the present invention, there is provided a first light-receiving element that receives reflected light from a cylindrical object and inspects the surface of the cylindrical object, and a first light-receiving element that is disposed on the same straight line as the first light-receiving element. 2 light-receiving element and its second
a third and fourth light receiving element arranged on both sides of the light receiving element and tracking the reflected light from the cylindrical object so that the reflected light always falls on the second light receiving element; and a second light receiving element. The change point detection circuit detects the inspection start synchronization signal of the surface inspection by the first light receiving element based on the change point of the output of the first light receiving element. The configuration can be simplified, and the tracking control state can be confirmed based on the inspection start synchronization signal by the second light receiving element and the change point detection circuit.
Furthermore, the first light-receiving element performs the surface inspection of the cylindrical object, and the inspection start synchronization signal for surface inspection is shared between the two light-receiving elements so that the inspection is performed based on the output of the second light-receiving element. Even if a defect occurs at the end of the cylindrical object, the defect is detected by the surface inspection of the first light-receiving element, or the surface inspection is not possible because the inspection start synchronization signal is not generated by the output of the second light-receiving element. Therefore, erroneous detection of defective parts can be prevented.
第１図はこの発明の一実施例を示す受光素子の
位置関係図、第２図は同様の信号処理系を示すブ
ロツク図、第３図は先行発明のトラツキング装置
を示す説明図である。
１……反射光、３，４，５……トラツキング用
受光素子、１０……円筒形状物体、１１……入射
走査光、１２……端部、１４……トラツキング信
号処理回路、１６……変化点検出回路、なお各図
中、同一符号は同一又は相当部分を示すものとす
る。
FIG. 1 is a positional relationship diagram of a light receiving element showing an embodiment of the present invention, FIG. 2 is a block diagram showing a similar signal processing system, and FIG. 3 is an explanatory diagram showing a tracking device of the prior invention. 1... Reflected light, 3, 4, 5... Tracking light receiving element, 10... Cylindrical object, 11... Incident scanning light, 12... End, 14... Tracking signal processing circuit, 16... Change In the point detection circuit, the same reference numerals indicate the same or corresponding parts in each figure.
Claims (1)
その円筒物体の表面の検査を行う振動する物体の
表面検査装置において、上記円筒物体からの反射
光を入射しその円筒物体の表面検査を行う第１の
受光素子と、その第１の受光素子と同一直線上に
配された第２の受光素子と、その第２の受光素子
の両側に配され上記円筒物体からの反射光に応じ
てその反射光が常時その第２の受光素子上にくる
ようにトラツキングする第３、第４の受光素子
と、上記第２の受光素子の出力の変化点に基づい
て、上記第１の受光素子による表面検査の検査開
始同期信号を検出する変化点検出回路とを備えた
ことを特徴とする振動する物体の表面検査装置。1 In a surface inspection device for a vibrating object that scans light along the generatrix of a rotating cylindrical object to inspect the surface of the cylindrical object, the surface of the cylindrical object is inspected by inputting reflected light from the cylindrical object. A first light receiving element, a second light receiving element disposed on the same straight line as the first light receiving element, and a second light receiving element disposed on both sides of the second light receiving element that responds to the reflected light from the cylindrical object. The third and fourth light receiving elements track the reflected light so that it always falls on the second light receiving element, and the surface area of the first light receiving element is determined based on the change point of the output of the second light receiving element. 1. A surface inspection device for a vibrating object, comprising a change point detection circuit that detects an inspection start synchronization signal for inspection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28050584A JPS61149813A (en) | 1984-12-24 | 1984-12-24 | Inspecting instrument for surface of oscillating body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28050584A JPS61149813A (en) | 1984-12-24 | 1984-12-24 | Inspecting instrument for surface of oscillating body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61149813A JPS61149813A (en) | 1986-07-08 |
| JPH0569163B2 true JPH0569163B2 (en) | 1993-09-30 |
Family
ID=17626024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28050584A Granted JPS61149813A (en) | 1984-12-24 | 1984-12-24 | Inspecting instrument for surface of oscillating body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149813A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52112304A (en) * | 1976-03-17 | 1977-09-20 | Victor Co Of Japan Ltd | Contactless pick-up |
| JPS5932804A (en) * | 1982-08-18 | 1984-02-22 | Chino Works Ltd | Length measuring device |
-
1984
- 1984-12-24 JP JP28050584A patent/JPS61149813A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52112304A (en) * | 1976-03-17 | 1977-09-20 | Victor Co Of Japan Ltd | Contactless pick-up |
| JPS5932804A (en) * | 1982-08-18 | 1984-02-22 | Chino Works Ltd | Length measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61149813A (en) | 1986-07-08 |
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